Method for improving mechanical property on surface of metal workpiece

A metal workpiece and performance technology, which is applied in the field of improving the surface mechanical properties of metal workpieces, can solve the problems of complicated operation and high preparation cost, and achieve the effects of low preparation cost, simple operation and improved corrosion resistance.

Inactive Publication Date: 2013-08-14
SOUTHWEST JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing problems are: magnetron sputtering needs to change the target or fill different reaction gases, the operation is complicated, and the preparation cost is high

Method used

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  • Method for improving mechanical property on surface of metal workpiece

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specific Embodiment approach

[0023] A kind of embodiment of the present invention is: a kind of method that improves the mechanical property of metal workpiece surface, and its concrete steps are:

[0024] A. Put the metal workpiece into the vacuum chamber of the magnetron sputtering equipment, and the vacuum chamber is evacuated to 2×10 -３ Pa;

[0025] B. Introduce argon gas into the vacuum chamber to a pressure of 2.0Pa, apply a DC voltage of -1000V, glow discharge to form plasma, and clean the metal workpiece by sputtering for 30 minutes, then turn off the argon gas and DC power supply;

[0026] C. Introduce nitrogen gas into the vacuum chamber to a pressure of 0.05Pa, and argon gas to a pressure of 0.5Pa, apply a substrate bias voltage of -20V on the metal workpiece, and turn on the power supply of the titanium sputtering target;

[0027] D. Adjust the angle between the surface of the metal workpiece and the normal line of the titanium sputtering target to be 40 degrees, and deposit a 0.2 micron tita...

Embodiment 2

[0031] A kind of embodiment of the present invention is: a kind of method that improves the mechanical property of metal workpiece surface, and its concrete steps are:

[0032] A. Put the metal workpiece into the vacuum chamber of the magnetron sputtering equipment, and the vacuum chamber is evacuated to 1.5×10 -3 Pa;

[0033] B. Introduce argon gas into the vacuum chamber to a pressure of 0.5Pa, apply a DC voltage of -900V, glow discharge to form plasma, and perform sputter cleaning on the metal workpiece for 100 minutes, then turn off the argon gas and DC power supply;

[0034] C. Introduce oxygen into the vacuum chamber to a pressure of 0.10Pa, and argon to a pressure of 1.5Pa, apply a substrate bias of -150V on the metal workpiece, and turn on the power supply of the titanium sputtering target;

[0035] D. Adjust the angle between the surface of the metal workpiece and the normal line of the titanium sputtering target to be 20 degrees, and deposit a 0.1 micron titanium ox...

Embodiment 3

[0040] A kind of embodiment of the present invention is: a kind of method that improves the mechanical property of metal workpiece surface, and its concrete steps are:

[0041] A. Put the metal workpiece into the vacuum chamber of the magnetron sputtering equipment, and the vacuum chamber is evacuated to 0.5×10 -3 Pa;

[0042] B. Introduce argon gas into the vacuum chamber to a pressure of 1.5Pa, apply a DC voltage of -800V, glow discharge to form plasma, and clean the metal workpiece by sputtering for 10 minutes, then turn off the argon gas and DC power supply;

[0043] C. Introduce acetylene to the vacuum chamber to a pressure of 0.10Pa, and argon to a pressure of 2.0Pa, apply a substrate bias of -200V on the metal workpiece, and turn on the power supply of the titanium sputtering target;

[0044] D. Adjust the angle between the surface of the metal workpiece and the normal line of the titanium sputtering target to be 70 degrees, and sputter and deposit a 0.15 micron titani...

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Abstract

The invention discloses a method for improving mechanical property on the surface of a metal workpiece. The method mainly comprises the following steps of: firstly, sputtering and cleaning the metal workpiece; then, sputtering and depositing by periodically and alternately changing the included angle between the surface of the metal workpiece and the plane normal of a sputtering target material in a magnetron sputtering device; and depositing to obtain multilayers of ceramic thin films with different crystal orientations on the metal workpiece. With the adoption of the method, multilayers of ceramic thin films with low internal stress can be deposited on the surface of the metal workpiece. The deposited multilayers of ceramic thin films are low in internal stress and strong in bonding force with the metal workpiece, and the mechanical property on the surface of the metal workpiece is good. The method is simple to operate, short in preparation time and low in preparation cost.

Description

technical field [0001] The invention relates to a method for improving the mechanical properties of the surface of a metal workpiece, belonging to the technical field of material surface processing. Background technique [0002] The rapid development of modern industrial technology has put forward higher and higher requirements for the mechanical properties of key structural metal parts, tools, and molds. The use of thin film deposition to modify the surface of key metal parts has become an important means to improve the life of parts. The harsh service conditions of some parts require that the surface of the parts must have high hardness, wear resistance, heat resistance, toughness and strength. Ceramic films such as nitrides, oxides, and carbides have high hardness and high wear resistance. Therefore, depositing or coating ceramic films such as nitrides, oxides, and carbides on the surface of metal parts can improve the wear resistance and wear resistance of mechanical par...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34
Inventor 冷永祥黄楠谢东孙鸿王进陈俊英杨苹
Owner SOUTHWEST JIAOTONG UNIV
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