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Polysilazane coating solution and method for preparing composite coating containing metallic oxide-SiO2

A polysilazane, metal compound technology, applied in the field of materials, achieves the effects of good chemical stability, low equipment requirements, and good light transmittance

Inactive Publication Date: 2014-02-19
INST OF CHEM CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the refractive index and wettability of the coating still have great room for improvement.

Method used

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  • Polysilazane coating solution and method for preparing composite coating containing metallic oxide-SiO2
  • Polysilazane coating solution and method for preparing composite coating containing metallic oxide-SiO2
  • Polysilazane coating solution and method for preparing composite coating containing metallic oxide-SiO2

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] Embodiment 1: Preparation of inorganic polysilazane

[0061] 3000ml three-necked bottle, equipped with mechanical stirring, ultra-low temperature condenser, ammonia gas inlet tube and condenser tube. Vacuum through high-purity nitrogen three times, add 1800ml of dichloromethane, then lower the whole system to -30°C, add about 1000g of H 2 SiCl 2 Afterwards, ammonia gas is passed slowly for ammonolysis until the ammonia gas is no longer absorbed (there is a bubbling gas behind the reaction device, if the ammonia gas is no longer absorbed, the ammonia gas passed through will escape through the bubbler), so as to reduce the amount of ammonia gas Speed, continue to flow for 2h, stop the reaction, filter to remove ammonium chloride, and wash 3 times with the solvent dichloromethane, remove the solvent and oligomers by decompression, and obtain a colorless transparent liquid that is inorganic polysilazane, producing The ratio is about 70%, and the number average molecular w...

Embodiment 2

[0062] Embodiment 2: Preparation of inorganic polysilazane

[0063] 3000ml three-necked bottle, equipped with mechanical stirring, ultra-low temperature condenser, ammonia gas inlet tube and condenser tube. Vacuum through high-purity nitrogen three times, add 1800ml of dichloromethane, then lower the whole system to -30°C, add about 1000g of HSiCl 3 Afterwards, ammonia gas is passed slowly for ammonolysis until the ammonia gas is no longer absorbed (there is a bubbling gas behind the reaction device, if the ammonia gas is no longer absorbed, the ammonia gas passed through will escape through the bubbler), so as to reduce the amount of ammonia gas Speed, continue to pass for 2 hours, stop the reaction, filter to remove ammonium chloride, and wash with the solvent dichloromethane 3 times, remove the solvent and oligomers by decompression, and obtain a colorless transparent liquid that is inorganic polysilazane. The yield is about 70%, and the number average molecular weight of ...

Embodiment 3

[0064] Embodiment 3 prepares organopolysilazane

[0065] 3000ml three-necked bottle, equipped with mechanical stirring, ultra-low temperature condenser, ammonia gas inlet tube and condenser tube. Vacuum through high-purity nitrogen three times, add 1800ml of dichloromethane, then lower the whole system to -30°C, add about 1000g of CH 3 SiHCl 2 Afterwards, ammonia gas is passed slowly for ammonolysis until the ammonia gas is no longer absorbed (there is a bubbling gas behind the reaction device, if the ammonia gas is no longer absorbed, the ammonia gas passed through will escape through the bubbler), so as to reduce the amount of ammonia gas Speed, continue to flow for 2h, that is, stop the reaction, filter to remove ammonium chloride, and wash 3 times with solvent dichloromethane, remove solvent and oligomers by decompression method, and obtain a colorless transparent liquid that is organopolysilazane, wherein R1 is methyl, and both R2 and R3 are H. The yield is about 70%, ...

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Abstract

The invention discloses a polysilazane coating solution containing metallic elements and a method for preparing a high-transparency composite coating containing metallic oxide-SiO2. The polysilazane coating solution containing the metallic elements comprises polysilazane, a metallic compound, a solvent and a catalyst. The method for preparing the transparent composite coating containing the metallic oxide-SiO2 on the basis of the coating solution comprises the steps as follows: a substrate is coated with the coating solution; and high-temperature treatment is performed after low-temperature treatment and hydrolysis are performed for certain time. A mixture of one or more of SiO2 / TiO2, SiO2 / ZrO2, SiO2 / HrO2 and SiO2 / ZnO composite coatings can be prepared with the method. Compared with the prior art, the method is simpler, the application is wider, the surface of the coating layer is dense and even, the transparency is good, and the visible light transmittance is above 90%.

Description

technical field [0001] The invention relates to a polysilazane coating solution containing metal elements and a method for preparing a highly transparent metal oxide-silicon dioxide composite coating, which belongs to the field of material technology. Background technique [0002] Metal Oxide-Silicon Dioxide (SiO 2 ) composite coating has been widely used in the fields of optics, microelectronics, photocatalysis, and anti-corrosion due to its good chemical stability, excellent electrical and mechanical properties, and good light transmission for visible and near-infrared light. Wide range of applications. Such as SiO 2 / TiO 2 Composite coatings are often used for anti-reflection coatings, anti-reflection coatings, high-reflection coatings, insulating coatings for semiconductor devices, optical waveguide films, etc.; SiO 2 / ZrO 2 and SiO 2 / HfO 2 Composite coatings are widely used in anti-oxidation coatings and interlayer dielectrics of semiconductor devices. In additi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09D183/16C09D1/00C09D7/12B05D3/10
Inventor 徐彩虹肖凤艳罗永明张宗波
Owner INST OF CHEM CHINESE ACAD OF SCI
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