High-strength multilayer-film photoelectric glass and preparation method thereof

A technology of photoelectric glass and multi-layer film, applied in photovoltaic power generation, coating, circuit and other directions, can solve problems affecting product performance and other issues

Inactive Publication Date: 2014-02-19
WENZHOU UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the application of AZO films in flat panel displays and touch panels still faces some problems, and further exploration and experimental research are needed.
In the actual production and application of AZO thin film, it is urgent to solve the problem o

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  • High-strength multilayer-film photoelectric glass and preparation method thereof
  • High-strength multilayer-film photoelectric glass and preparation method thereof
  • High-strength multilayer-film photoelectric glass and preparation method thereof

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but not as a basis for limiting the present invention.

[0025] Example. A high-strength multi-layer photoelectric glass comprises a glass substrate 1 on which a silicon dioxide layer 2 , an aluminum oxide thin film layer 3 and an AZO thin film layer 4 are sequentially arranged. The silicon dioxide layer 2 is a high-purity silicon dioxide layer.

[0026] To realize the preparation method of the aforementioned high-strength multilayer film-based photoelectric glass, proceed as follows:

[0027] ① Pre-clean the glass substrate;

[0028] ② Repeat step ① 3-4 times, and then dry in a vacuum oven;

[0029] ③Cleaning the glass substrate by ion beam sputtering under vacuum conditions;

[0030] ④ In the environment where argon is used as the working gas, silicon dioxide, aluminum oxide and AZO (collectively referred to as sputtering targets) are ...

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Abstract

The invention discloses a high-strength multilayer-film photoelectric glass and a preparation method thereof. The multilayer-film stack photoelectric glass comprises a glass substrate, wherein a silicon dioxide layer, an aluminum oxide film layer and an AZO (aluminum-doped zinc oxide) film layer are arranged on the glass substrate in sequence. The preparation method comprises the following steps: 1. the glass substrate is pre-cleaned; 2. Step 1 is repeated for 3 to 4 times, and then the pre-cleaned glass substrate is dried in a vacuum drying oven; 3. the glass substrate goes through ion beam sputter cleaning under a vacuum condition; 4. under the environment where argon serves as the working gas, sputtering target materials are sputtered on the surface of the glass substrate through magnetron sputtering to form linings, the sputtering target materials are silicon dioxide, aluminum oxide and AZO, and the linings are the silicon dioxide layer, the aluminum oxide film layer and the AZO film layer. The invention achieves the reflection, refraction and scattering of incident sunlight through the co-action of the aluminum oxide film layer and the AZO film layer, so that the photoelectric property of an AZO film is improved.

Description

technical field [0001] The invention relates to a photoelectric glass and a preparation method thereof, in particular to a high-strength multilayer film system photoelectric glass and a preparation method thereof. Background technique [0002] All over the world, conventional energy sources such as coal, oil, and natural gas are limited and are becoming increasingly exhausted. A series of environmental pollution problems such as greenhouse effect, ozone layer destruction, and acid rain brought about by the use of these energy sources are threatening the survival of human beings. living environment. The sun is an inexhaustible and inexhaustible huge clean energy pool. The radiant solar energy received by the earth every year is 1.8×1018kW·h, which is 1.2×104 times the energy consumed by human beings every year. Therefore, using solar power to generate electricity has become the focus of competing research in various countries, and it is also one of the ways to solve energy p...

Claims

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Application Information

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IPC IPC(8): C23C14/10C23C14/08C23C14/35H01L31/052H01L31/0224H01L31/18
CPCY02E10/50Y02P70/50
Inventor 廖宁波陈鹏飞
Owner WENZHOU UNIVERSITY
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