Micro-electromechanical system (MEMS) humidity sensor and preparation method thereof

A humidity sensor and comb tooth technology, which is applied in the direction of instruments, scientific instruments, and manufacturing microstructure devices, etc., can solve the problems of difficult integration, poor performance, and low sensor accuracy, and achieve easy integration and processing, simple preparation process, and process The effect of strong compatibility

Active Publication Date: 2014-03-12
中科芯未来微电子科技成都有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the electrolyte humidity sensor has a narrow measurement range, poor repeatability, and its service life is short; the polymer compound humidity sensor has the advantages of good humidity sensing performance and high sensitivity, but its performance is reduced and stable under high temperature and high humidity conditions. Poor performance, corrosion resistance and anti-contamination ability are also weakened; semiconductor ceramic material humidity sensor has the advantages of good humidity sensing performance, simple production, low cost, short r

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  • Micro-electromechanical system (MEMS) humidity sensor and preparation method thereof
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  • Micro-electromechanical system (MEMS) humidity sensor and preparation method thereof

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Embodiment 1

[0049] Figures 1 to 3 It is a structural schematic diagram of the MEMS humidity sensor provided in this embodiment. As shown in the figure, the MEMS humidity sensor includes a support base 1 , an electrical isolation layer 102 disposed on the support base 1 , and a comb assembly disposed on the electrical isolation layer 102 .

[0050] The comb-tooth assembly includes a first comb-tooth connecting electrode 2, a first comb-tooth 3, a second comb-tooth connecting electrode 4 and a second comb-tooth 5 arranged on the electrical isolation layer 102, and the first comb-tooth connecting electrode 2 is connected to There is a first comb-teeth test electrode 10, the second comb-teeth connection electrode 4 is connected to a second comb-teeth test electrode 11, and the first comb-teeth test electrode 10 is connected to the first conductive electrode 15 through an electrode connection line 12, The two comb-teeth test electrodes 11 are connected to the second conductive electrode 13 v...

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Abstract

The invention discloses a micro-electromechanical system (MEMS) humidity sensor and a preparation method thereof. The MEMS humidity sensor is designed to solve the problems that the existing humidity sensor has high cost and low precision. The MEMS humidity sensor comprises a supporting base, an electrical isolation layer arranged on the supporting base and comb tooth components arranged on the electrical isolation layer, wherein heating resistor strips are arranged between the comb tooth components. The invention also provides a preparation method of the MEMS humidity sensor. The MEMS humidity sensor provided by the invention is simple in structure, high in sensitivity, high in process compatibility, wide in application range, safe and reliable; the preparation process is simple and easy to implement; and integrated processing is facilitated.

Description

technical field [0001] The invention relates to a MEMS humidity sensor and a preparation method thereof. Background technique [0002] Humidity is a parameter that characterizes the content of water vapor in the atmosphere, generally expressed as relative humidity (%RH), and its value represents the ratio of the pressure of water vapor in the air to the saturated water vapor pressure at the same temperature. Air humidity is directly related to people's daily work, life and production, so the monitoring and control of humidity is becoming more and more important. However, the measurement of humidity will be affected by other factors (atmospheric pressure, temperature), and its calibration is also a difficult problem. Therefore, it can be said that among conventional environmental parameters, humidity is one of the most difficult parameters to measure accurately. The well-known hair hygrometer, psychrometer, etc. can no longer meet the actual needs at this stage. Therefore, ...

Claims

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Application Information

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IPC IPC(8): G01N27/22B81B7/02B81C1/00
CPCG01N27/127
Inventor 毛海央陈媛婧谌灼杰欧文陈大鹏
Owner 中科芯未来微电子科技成都有限公司
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