VN (Vanadium Nitride) wear-resisting coating with low abrasion rate and preparation method thereof
A wear-resistant coating and coating technology, applied in the coating, metal material coating process, ion implantation plating and other directions, can solve the problems of low wear rate, poor repeatability, harsh conditions and so on
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experiment Embodiment 1
[0118] Experimental Example 1: Formation of VN coating
[0119] Include the following steps:
[0120] (1) M2 stainless steel and Si sheet with a Rockwell hardness (HRC) of 70 were selected as the substrate of the VN wear-resistant coating.
[0121] (2) Before deposition, the substrate was ultrasonically cleaned at 35°C for 10 minutes in a traditional detergent solution, then rinsed with deionized water for 3 minutes, placed in acetone at 25°C for 10 minutes, and then washed in absolute ethanol for 40 minutes. Ultrasonic cleaning at ℃ for 10 minutes, then ultrasonic cleaning with deionized water for 8 minutes, and finally drying with high-purity nitrogen (purity 99.9%). Then put the substrate on the rotatable base frame in the vacuum chamber, when the back pressure of the vacuum chamber is less than or equal to 1×10 -3 After Pa, fill in argon and control the air pressure at about 1Pa, then turn on the radio frequency power supply (power 200W,
[0122] frequency 50MHz) and su...
experiment Embodiment 2
[0129] The formation of experimental embodiment 2VN coating
[0130] The procedure of Experimental Example 1 was repeated for the experiment, except that the power supply parameter in step 3 was changed to an intermediate frequency (mf) power supply and a radio frequency (rf) power supply working together on the V target.
[0131] Physical properties of VN coating
[0132] The crystal structure, value of formula (1), density, hardness, friction coefficient and wear rate of the obtained VN wear-resistant coating were characterized, and the results are listed in Table 2.
[0133] Table 2 shows the physical and mechanical properties of the VN coating obtained by the joint action of the intermediate frequency (mf) power supply and the radio frequency (rf) power supply on the V target: it can be seen that the present invention is obtained by the joint action of the mf and rf power supply. Compared with comparative examples 1 to 4, the grinding coating has significantly improved ha...
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