Two-dimensional semiconductor template material and its preparation method
A two-dimensional semiconductor and template technology, which is applied in the field of semiconductor template materials and its preparation, can solve the problems of strict operating conditions, complex equipment and cumbersome steps, etc., and achieve the effect of low cost, excellent performance and simple process
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Embodiment 1
[0014] The present invention provides a two-dimensional semiconductor template material and a preparation method thereof. The steps are as follows:
[0015] (1) Raw material Ti 3 SiC 2 Preparation: Take 144g of titanium powder, 28g of silicon powder, and 24g of carbon powder, use 196g of absolute ethanol as the grinding medium, and 588g of agate beads as the grinding body, put them in a polyurethane tank, rotate at 500r / min, mix evenly for 24h, and place Dry in a vacuum drying oven for 60 hours. Load the uniformly mixed raw materials into a high-strength graphite mold with an inner diameter of 20 mm and an outer diameter of 50 mm, and preload with a jack (the pressure is 20 MPa). When sintering, use 99.9% argon protection, the sintering pressure is 30MPa, the sintering temperature is 1500℃, and the heat preservation is 3h. After the heat preservation, the power is turned off and the furnace is cooled to obtain a sintered body with a diameter of 20mm and a thickness of about 10mm....
Embodiment 2
[0019] (1) Raw material Ti 2 Preparation of AlN: Take 48g of titanium powder, 62g of titanium nitride powder, and 27g of aluminum powder, use 137g of absolute ethanol as the grinding medium, and 411g of agate beads as the grinding body, put them in a polyurethane tank, rotate at 500r / min, and mix evenly for 24h , Placed in a vacuum drying oven, dried for 60h. Load the uniformly mixed raw materials into a high-strength graphite mold with an inner diameter of 20 mm and an outer diameter of 50 mm, and preload with a jack (the pressure is 20 MPa). When sintering, use 99.9% argon protection, the sintering pressure is 30MPa, the sintering temperature is 1600℃, and the heat preservation is 2h. After the heat preservation, the power is turned off and the furnace is cooled to obtain a sintered body with a diameter of 20mm and a thickness of about 10mm. Grind in an agate mortar, and sieve through a 3000-mesh sieve to select raw material powder with a particle size of 5 μm or less.
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Embodiment 3
[0023] (1) Raw material Sc 3 LiC 2 Preparation: Take 135g of scandium powder, 7g of lithium powder, and 24g of carbon powder, use 166g of absolute ethanol as the grinding medium, and 498g of agate beads as the grinding body, put them in a polyurethane tank, rotate at 500r / min, mix evenly for 24h, and place Dry in a vacuum drying oven for 60 hours. Load the uniformly mixed raw materials into a high-strength graphite mold with an inner diameter of 20 mm and an outer diameter of 50 mm, and preload with a jack (the pressure is 20 MPa). Use 99.9% argon protection during sintering, the sintering pressure is 30MPa, the sintering temperature is 1400℃, and the heat preservation is 3h. After the heat preservation is completed, the power is turned off and the furnace is cooled to obtain a sintered body with a diameter of 20mm and a thickness of about 10mm. Grind in an agate mortar, and sieve through a 3000-mesh sieve to select raw material powder with a particle size of 5 μm or less.
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