Method for growing single-layer molybdenum disulfide by chemical vapor deposition

Abstract

The invention relates to a method for growing single-layer molybdenum disulfide by chemical vapor deposition. The method comprises the steps of growing a substrate, pre-treating implanted seeds, pre-treating a precursor, carrying out ready growth, growing to obtain single-layer molybdenum disulfide monocrystal and a continuous molybdenum disulfide single-layer film, and the like. The single-layer molybdenum disulfide prepared by the method has the characteristics of high sample quality, large area, good reproducibility and the like.

Description

technical field [0001] The invention belongs to the field of preparation of novel two-dimensional nanometer materials, in particular to a method for growing single-layer molybdenum disulfide by chemical vapor deposition. technical background [0002] As a large class of graphene layered materials, transition metal chalcogenide compounds TMDC two-dimensional nanostructures represented by monolayer molybdenum disulfide have attracted widespread attention with the discovery of a number of excellent photoelectric properties and special physical phenomena. In the past two years, the research on the preparation, photoelectric properties and applications of this kind of materials is developing rapidly. The unique properties of monolayer molybdenum disulfide can be summarized as follows: [0003] 1) Monolayer molybdenum disulfide is a structure similar to sandwich S-Mo-S, which belongs to the hexagonal crystal system; [0004] 2) Bulk molybdenum disulfide is an indirect band gap s...

AI Technical Summary

Problems solved by technology

Mechanical exfoliation can obtain a single layer of molybdenum disulfide that maintains its intrinsic properties to the greatest extent. The samples are mainly used for basic physics, chemistry, and application research, but they cannot be prepared in large quantities and have poor repeatability; lithium ion intercalation is generated by the reaction of lithium and water. The hydrogen gas overcomes the principle of van der Waals force between layers to obtain oligolayer molybdenum disulfide. The main disadvantage is that the prepared samples cannot maintain the intrinsic properties and cannot obtain a large area of ​​monolayer molybdenum disulfide; Phase exfoliation is an effective method for preparing thin-layer molybdenum disulfide in large quantities, but it is limited by the low quality of the prepared samples, and it is impossible to obtain a single-layer molybdenum disulfide, which cannot meet the requirements of frontier basic research fields; Efficient method for area, higher quality monolayer molybdenum disulfide prepared by this method with quality comparable to samples prepared by mechanical exfoliation method, and with larger area

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