Vertical vacuum sputtering coating production line

Abstract

The invention discloses a vertical vacuum sputtering coating production line. The vertical vacuum sputtering coating production line comprises a transmission assembly line and a coating assembly line, wherein the coating assembly line is connected with the transmission assembly line. The transmission assembly line comprises a rail, at least one transmission trolley and at least one substrate carrying device. The transmission trolley runs on the rail and transmits the substrate carrying device. The coating assembly line comprises an inlet cavity, an inlet transition cavity, an inlet buffer cavity, a coating cavity, an outlet buffer cavity, an outlet transition cavity and an outlet cavity. Compared with the prior art, the transmission assembly line and the coating assembly line are connected end to end to form an annular assembly line, so that the occupied area is saved; intelligent control is adopted for substrate transmission in the whole coating production line, so that manpower and material resources are saved, and production efficiency is improved; all cavities in the coating assembly line are replaced or added according to requirements of products, so that the whole coating production line meets the requirements of various coating processes; andthe service life is prolonged, resources are saved, and therefore the vertical vacuum sputtering coating production line has quite wide application prospects.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a vertical vacuum sputtering coating production line. Background technique [0002] Vacuum coating technology first appeared in the 1930s, industrial applications began to appear in the 1940s and 1950s, and industrial mass production began in the 1980s. It has been widely used in electronics, aerospace, packaging, decoration, hot stamping and printing industries. Vacuum coating technology is a novel new technology of material synthesis and processing, and is an important part of the field of surface engineering technology. Vacuum coating technology is to use physical and chemical means to coat the solid surface with a layer of coating with special properties, so that the solid surface has wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, electrical conductivity, magnetic conductivity, insulation and decoration. ...

AI Technical Summary

Problems solved by technology

However, the cathode device is affected by its own dimensional accuracy and strong magnetic attraction, especially during installation, the assembly accuracy is difficult to meet the design accuracy requirements

Chinese patent CN201778106U discloses a rectangular planar magnetron cathode structure in vacuum coating equipment. This cathode structure solves the above problems to a certain extent, but its target utilization rate still cannot achieve a qualitative leap

Chinese patent CN201770767U discloses a vacuum coating cathode device. The main technical problem solved by this patent is to simplify the process of replacing the target, save the time required for replacing the target, and does not solve the technical problem of low target utilization.

Chinese patent CN201981253U discloses a rectangular planar magnetron sputtering cathode. For the shortcomings of the sputtering cathode with an anode frame, the anode frame is canceled and the structure is simplified; in addition, the structure of the shield is improved to avoid the problem of grounding of the shield ; The improvement of the planar cathode still fails to increase the utilization rate of the target

However, because the signals of the substrate entering and exiting cannot be accurately received, and the human-controlled action has a certain delay, it is usually impossible to open the inlet and outlet gate valves in a timely manner, which reduces production efficiency.

In addition, the vacuum coating production line has very high requirements on the vacuum environment, so the thickness of the door body of the vacuum chamber will increase. Correspondingly, the thickness of the gate valves at the entrance and exit of the production line will increase, and the difficulty of manual operation will increase.

[0004] With the rapid development of coating technology in the field of vacuum coating, the requirements for coating products are getting higher and higher. Therefore, more and more improvements have occurred in the coating production line, and the requirements of the production line have increased accordingly. The overall stability of the coating production line in the prior art stability and coating uniformity, low production efficiency and high equipment cost; and most of the existing coating production lines can only meet the coating of one target material, or the entire production line is only suitable for one type of target material, which cannot meet the current requirements. Therefore, there is an urgent need for a coating production line that can adapt to a variety of targets and the entire coating process is easy to operate

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