A mold and method for producing copper-zinc-tin rotating target
A rotating target, copper-zinc-tin technology, which is applied in the direction of manufacturing tools, metal material coating process, ion implantation plating, etc., can solve the problem of not seeing the rotating copper-zinc-tin target, etc., and achieve good composition distribution uniformity, The effect of fine crystal grains and high purity
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Embodiment 1
[0018] Such as figure 1 As shown, a mold for producing a copper-zinc-tin rotating target includes a casting port 1, which is connected to a mold jacket 2; a liner 4 is arranged inside the mold jacket 2, and a An annular cavity 3; the bottom of the mold jacket 2 and the liner 4 are sealed with a bottom sealing ring 5.
[0019] The casting port 1 communicates with the annular cavity 3 through a flow pipe, and the flow pipe is inclined toward the interior of the annular cavity 3 . A layer of isolation layer is coated on the inner wall of the jacket 2, and the isolation layer is DY08 paint.
Embodiment 2
[0021] A method for producing a copper-zinc-tin rotating target, the steps are:
[0022] (1) Melting: Take raw materials according to the copper: zinc: tin molar ratio of 1.5:0.7:0.8; open the vacuum induction melting furnace, evacuate to 0.01Pa, pass nitrogen, and when the pressure reaches 0.08MPa, evacuate again to 0.01Pa; Put raw tin into the smelting furnace, smelt until completely melted at 250°C, control the temperature at 250°C, put in copper, continue smelting until completely melted, raise the temperature to 670°C, refine for 35 minutes, and finally put in zinc, control the temperature not to exceed 700°C for rapid melting , after melting completely, refining at 680°C for 12 minutes to obtain casting solution;
[0023] (2) Casting: Take the mold for producing copper-zinc-tin rotating target, dry it at 200°C, and preheat it to 600°C, pour the casting liquid obtained in step (1) into the mold; Cavity 3, the paint coated on the inner wall of jacket 2 prevents the mold f...
Embodiment 3
[0028] A method for producing a copper-zinc-tin rotating target, the steps are:
[0029] (1) Smelting: Take raw materials according to the molar ratio of copper: zinc: tin: 2.3:1.2:1.1; open the vacuum induction melting furnace, evacuate to 1Pa, pass nitrogen, and when the pressure reaches 0.1MPa, evacuate to 1Pa again; Put the raw material tin into the furnace, smelt it at 270°C until it is completely melted, control the temperature at 300°C, put in copper, continue to smelt it until it is completely melted, raise the temperature to 750°C, refine it for 25 minutes, and finally put in zinc, control the temperature not to exceed 700°C for rapid melting, all After melting, refining at 690°C for 8 minutes to obtain casting solution;
[0030] (2) Casting: Take the mold for producing copper-zinc-tin rotating target, dry it at 450°C, and preheat it to 600°C, pour the casting solution obtained in step (1) into the mold; Cavity 3, the paint coated on the inner wall of jacket 2 preven...
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