Organic light emitting device and manufacturing method thereof
An electroluminescent device and electroluminescent technology, which is applied in the fields of electro-solid devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve problems such as poor water blocking ability, water vapor affecting electrical properties, etc., and achieve strong oxygen shielding ability and waterproof The effect of improved capacity and high flatness
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[0039] The preparation method of the above-mentioned organic electroluminescence device specifically comprises the following steps:
[0040] (a) A hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer and a cathode layer are sequentially formed on the cleaned anode conductive substrate by vacuum evaporation;
[0041] (b) On the cathode layer, first use methylsilane (MMS, structural formula as follows), NH 3 and H 2 As a raw material and by plasma enhanced chemical vapor deposition method (English abbreviation, PECVD), an organic barrier layer is prepared, and then trifluoromethyl and water vapor are used as raw materials on the organic barrier layer and by an atomic layer deposition method. Obtain a first inorganic barrier layer; then use amines and water vapor as raw materials on the first inorganic barrier layer and obtain a second inorganic barrier layer by atomic layer deposition; finally, alternatel...
Embodiment 1
[0060] Such as figure 1 As shown, the organic electroluminescent device of this embodiment is a layered structure, and each layer is sequentially: an anode conductive substrate 101, a hole injection layer 102, a hole transport layer 103, a light-emitting layer 104, an electron transport layer 105, and an electron injection layer. layer 106, a cathode layer 107, and an organic barrier layer 108, a first inorganic barrier layer 109, and a second inorganic barrier layer 110 overlapping in sequence. The organic barrier layer 108, the first inorganic barrier layer 109 and the second inorganic barrier layer 110 are also multi-layer, it is worth noting that: figure 1 Only one layer of organic barrier layer 108, one layer of first inorganic barrier layer 109 and one layer of second inorganic barrier layer 110 are drawn alternately, and the remaining alternately overlapping organic barrier layers 108, first inorganic barrier layer 109 and second inorganic barrier layer The blocking la...
Embodiment 2
[0086] Such as figure 2 As shown, the organic electroluminescent device of this embodiment is a layered structure, and each layer is sequentially: an anode conductive substrate 201, a hole injection layer 202, a hole transport layer 203, a light-emitting layer 204, an electron transport layer 205, and an electron injection layer. layer 206, a cathode layer 207, and an organic barrier layer 208, a first inorganic barrier layer 209, and a first inorganic barrier layer 210 overlapping in sequence.
[0087] The structure of the organic electroluminescent device is ITO / MoO 3 :NPB / TCTA / TPBI:Ir(ppy) 3 / Bphen / CsN 3 :Bphen / Al / SiCxNy / Al 2 o 3 :F / ZrO 2 :F, where: the slash " / " indicates a layered structure, and the colon ":" indicates mutual doping. The structure of the organic electroluminescent device described in this implementation is similar to that of Example 1, the difference is that: Al 2 o 3 : F is the material of the first inorganic barrier layer 209, ZrO 2 : F is the...
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