Micro-arc discharge micro-cutting device and cutting method for sic single wafer
A technology of micro-arc discharge and cutting method, which is applied in the field of micro-arc discharge micro-cutting and micro-arc discharge micro-cutting device, can solve the problems of surface roughness of SiC single wafer warping deformation, save precious hard and brittle materials, reduce surface roughness, etc. Roughness, TTV reduction effect
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Embodiment 1
[0047] Step 1, moving the machine tool table to a position where the distance between the SiC single crystal rod 24 and the wire saw 10 is 100 microns;
[0048] Step 2. Fill the electrolyte tank 17 with an alkaline electrolyte whose pH value is 7. Make the alkaline electrolyte pass through the conduit 11 and spray it from the nozzle to the top of the cutting place where the wire saw 10 and the SiC single crystal rod 24 are located; make the rotating shaft drive the SiC single crystal rod 24 to rotate, and open the pulse power supply box 14, and the pulse current Under the action of an electric field, the alkaline electrolyte between the SiC single crystal rod 24 and the wire saw 10 undergoes electrolysis to generate oxygen and form an oxygen film; the voltage of the pulse power box 14 is 0-700V, the voltage pulse width is 6μs-18μs, and the peak value The current is 0-500A, and the current pulse width is 1000μs-3000μs.
[0049] Step 3. Adjust the pulse power supply box 14 so t...
Embodiment 2
[0051] Step 1. Move the machine tool table to a position where the distance between the SiC single crystal rod 24 and the wire saw 10 is 125 microns;
[0052] Step 2. Fill the electrolyte tank 17 with an alkaline electrolyte whose pH value is 8. Make the alkaline electrolyte pass through the conduit 11 and spray it from the nozzle to the top of the cutting place where the wire saw 10 and the SiC single crystal rod 24 are located; make the rotating shaft drive the SiC single crystal rod 24 to rotate, and open the pulse power supply box 14, and the pulse current Under the action of an electric field, the alkaline electrolyte between the SiC single crystal rod 24 and the wire saw 10 undergoes electrolysis to generate oxygen and form an oxygen film; the voltage of the pulse power box 14 is 0-700V, the voltage pulse width is 6μs-18μs, and the peak value The current is 0-500A, and the current pulse width is 1000μs-3000μs.
[0053] Step 3. Adjust the pulse power supply box 14 so tha...
Embodiment 3
[0055] Step 1. Move the machine tool table to a position where the distance between the SiC single crystal rod 24 and the wire saw 10 is 150 microns;
[0056] Step 2. Fill the electrolyte tank 17 with an alkaline electrolyte whose pH value is 9. Make the alkaline electrolyte pass through the conduit 11 and spray it from the nozzle to the top of the cutting place where the wire saw 10 and the SiC single crystal rod 24 are located; make the rotating shaft drive the SiC single crystal rod 24 to rotate, and open the pulse power supply box 14, and the pulse current Under the action of an electric field, the alkaline electrolyte between the SiC single crystal rod 24 and the wire saw 10 undergoes electrolysis to generate oxygen and form an oxygen film; the voltage of the pulse power box 14 is 0-700V, the voltage pulse width is 6μs-18μs, and the peak value The current is 0-500A, and the current pulse width is 1000μs-3000μs.
[0057] Step 3. Adjust the pulse power supply box 14 so tha...
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Abstract
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