Low-temperature vapor deposition method for carbon-based super-lubricating thin film with onion structure
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A vapor deposition and super-lubricating technology, applied in metal material coating process, vacuum evaporation plating, coating, etc.
Active Publication Date: 2016-07-20
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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Although the traditional diamond-like carbon (DLC) film has good hardness due to its high sp3 hybrid carbon content and good tribological properties, it is limited by its high brittleness. The impact of the actual application is easy to break and wear
Therefore, the application of traditional diamond-like carbon (DLC) films is greatly limited
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Embodiment 1
[0019] The method of low-temperature vapor deposition of onion structure carbon-based super-lubricating film mainly includes the following steps:
[0020] 1) Place the silicon wafers in acetone and absolute ethanol, respectively, and clean them with ultrasonic for 10 minutes, then rinse with deionized water, blow dry with nitrogen, and send them to the vacuum chamber;
[0021] 2) When the vacuum is reduced to less than 4.0×10-3 Pa, pass the working gas (Ar with a purity of 99.999%) to a pressure of 2 to 3 Pa, and apply a negative bias of -1000 to -1200V to the substrate for plasma Glow cleaning for 10min;
[0022] 3) Maintain bias voltage -1000V, frequency 3.5KHz, duty cycle 15%. During the deposition process, the Ar gas flow rate is maintained at 80 sccm, the CH4 flow rate is 40 sccm, the air pressure is maintained at 0.45 to 0.5 Pa, and the target power is 800 to 900 W. The deposition time is 1 h. The thickness of the deposited film is about 1 μm.
Embodiment 2
[0024] 1. The JEM3010 high-resolution transmission electron microscope (HRTEM) was used to characterize the microscopic morphology of the film. As shown in Figure 1, the film is composed of onion carbon embedded in an amorphous network.
[0025] 2. Use Nano-indenter II nano indenter to measure the hardness and elastic recovery of the film, and the indentation depth is 100nm, such as figure 2 As shown, the onion structure carbon film has a hardness of 21.5 GPa, an elastic modulus of 140 GPa, and an elastic recovery of 85%, indicating that the film has good toughness and strength.
[0026] 3. Using the UMT friction testing machine, the friction curve of the traditional a-C:H film is compared with the traditional a-C:H film under a load of 20N and a frequency of 10Hz ( image 3 ), the friction coefficient of the onion carbon film is 1 / 6 of the traditional a-C:H film, about 0.008, showing super lubricating performance.
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Abstract
The invention relates to a low-temperature vapor deposition method for a carbon-based super-lubricating thin film with an onion structure. The method comprises the following steps of (1) carrying out ultrasonic cleaning on silicon substrate by using acetone and absolute ethyl alcohol, and transferring the silicon substrate to a coating cavity; (2) vacuumizing until the vacuum degree is smaller than 4.0*10<-3> Pa; (3) cleaning under the following conditions: introducing Ar until the air pressure is 2-3 Pa, applying a negative bias voltage of -1000 to -1200 V to the silicon substrate to carry out plasma glow cleaning for 10 min; and (4) depositing the carbon-based super-lubricating thin film with the onion structure, namely keeping the bias voltage at -500 to -1000 V, the frequency at 3.5 KHz and the duty ratio at 15-25%; and keeping the air flow of Ar at 80-200sccm, the CH4 flow at 40-50sccm, the air pressure at 0.45-0.5 Pa, the target power at 800-900 W, the deposition time within 1 h and the deposited thin film thickness at about 1 mu m in the deposition process. The carbon-based super-lubricating thin film with the onion structure, prepared by using the low-temperature vapor deposition method, has the advantages of high hardness, excellent chemical inertness, low frictional coefficient, good wear resistance and the like.
Description
Technical field: [0001] The invention relates to a method for low-temperature gas-phase deposition of onion-structured carbon-based super-lubricating films on silicon substrates, belonging to the field of vacuum coating. technical background: [0002] Diamond-like carbon (diamond-likecarbon, DLC) film is a kind of properties similar to diamond, with high hardness, excellent chemical inertness, low friction coefficient, good wear resistance, high resistivity, good optical properties and chemical stability. Therefore, it has great application prospects in the fields of machinery, tribology, aerospace, biomedicine, optoelectronics, and even packaging and decoration. Although the traditional diamond-like carbon (DLC) film, due to its high sp 3 Hybrid carbon content has good hardness and good tribological properties, but due to its high brittleness, it is easy to break and wear in practical applications. Therefore, the application of traditional diamond-like carbon (DLC) film...
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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06
Inventor 张斌张俊彦凯雄强力龚珍彬
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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