High-hardness antibacterial TiSiN/Ag nano composite functional coating and preparation method and application thereof
A composite coating and nanocomposite technology, applied in the field of materials, can solve the problems of poor wear resistance and low hardness
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[0100] The present invention also provides a method for preparing the composite coating, comprising the steps of:
[0101] a) Under vacuum or inert atmosphere, preheating atmosphere, sputter cleaning is carried out on the substrate and target to be plated;
[0102] b) optionally under a high-purity nitrogen or nitrogen-argon mixed gas atmosphere, using a pure titanium target to deposit a transition layer on the surface of the substrate to be plated;
[0103] c) co-depositing a nanocomposite layer on the surface of the product obtained in the preceding step by using a titanium silicon target and an Ag target at the same time under a high-purity nitrogen or nitrogen-argon mixed gas atmosphere to obtain the composite coating;
[0104] d) optionally under an inert atmosphere, heat-treating the product obtained in the preceding step to obtain the composite coating.
[0105] In another preference, before step a), also include steps:
[0106] a-0) polishing the substrate to be plat...
Embodiment 1
[0144] Example 1 Coating 1
[0145] (1) Perform mechanical grinding and polishing on the titanium alloy test piece to be plated, then perform ultrasonic vibration cleaning in acetone reagent, wash the sample 3 times, and air-dry the sample after cleaning.
[0146] (2) Send the sample obtained in the preceding steps into a vacuum chamber, and the vacuum chamber is pre-evacuated, and the vacuum degree of the background is 1×10 -3 Pa, the vacuum chamber is heated during the pre-evacuation process, and the heating temperature is up to 400°C.
[0147] (3) When the background vacuum and heating temperature meet the requirements, the target is cleaned by sputtering for 2 minutes, and the sample to be plated is cleaned by ion sputtering and etching for 5 minutes.
[0148] (4) Multi-arc ion plating is used to first deposit a TiN transition layer on the sample to be plated, using a pure titanium target (target purity 99.9at.%), the reaction gas is high-purity nitrogen, and the coating ...
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