Novel fluorenyl β-oxime ester compound, photopolymerization initiator and photoresist composition containing same
A photoresist and compound technology, applied in the fields of novel fluorenyl β-oxime ester compounds, photopolymerization initiators containing the same, and photoresist compositions, can solve the problem of reduced yield of by-products and low sensitivity , production reduction and other problems, to achieve the effect of highlighting the residual film thickness, excellent sensitivity, and minimizing defects
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0091] [Example 1] Preparation of 1-(9,9-diethyl-9H-fluoren-2-yl)-1,2-propanedione-2-oxime-O-acetate
[0092] Reaction 1. Synthesis of 9,9-diethyl-9H-fluorene (2)
[0093]
[0094] Under a nitrogen atmosphere, dissolve 200.0g (1.20mol) of fluorene (1), 268.8g (4.80mol) of potassium hydroxide and 19.9g (0.12mol) of potassium iodide in 1L of anhydrous dimethyl sulfoxide, and dissolve the reactants After holding at 15°C, 283.3 g (2.60 mol) of bromoethane were added slowly over 2 hours and the reaction was stirred at 15°C for 1 hour. Next, 2 L of distilled water was added to the reactant, and after stirring for 30 minutes, the product was extracted with 2 L of dichloromethane, and after the extracted organic layer was washed twice with 2 L of distilled water, the recovered organic layer was dried with anhydrous magnesium sulfate and dried under reduced pressure. The solvent was distilled off under reduced pressure, and the obtained product was distilled by fractional distillat...
Embodiment 2
[0112] [Example 2] Preparation of 1-(9,9-diethyl-9H-fluoren-2-yl)-1,2-propanedione-2-oxime-O-propionate (6)
[0113]
[0114] Dissolve 89.0 g (0.29 mol) of 1-(9,9-diethyl-9H-fluoren-2-yl)-1,2-propanedione-2-oxime (4) in 1 L of N-methanol under a nitrogen atmosphere In base-2-pyrrolidone (NMP), after the reactant was kept at -5°C, 35.4g (0.35mol) trimethylamine was added, and the reaction solution was stirred for 30 minutes. Considering to avoid increasing the temperature of the reactant, slowly add the dissolved A solution of 32.4 g (0.35 mol) of propionyl chloride in 75 ml of N-methyl-2-pyrrolidone for 30 minutes and stirred for 30 minutes. Next, 1 L of distilled water was slowly added to the reactant and stirred for 30 minutes to separate the organic layer, and the recovered organic layer was dried with anhydrous magnesium sulfate and the solvent was distilled off under reduced pressure. Recrystallized from 1 L of ethanol and dried the resulting solid product to give 95....
Embodiment 3
[0117] [Example 3] Preparation of 1-(9,9-diethyl-9H-fluoren-2-yl)-1,2-propanedione-2-oxime-O-butyrate (7)
[0118]
[0119] Dissolve 29.8g (0.097mol) of 1-(9,9-diethyl-9H-fluoren-2-yl)-1,2-propanedione-2-oxime (4) in 300ml of N- In methyl-2-pyrrolidone (NMP), keep the reactant at -5°C, then add 11.7g (0.116mol) triethylamine, stir the reaction solution for 30 minutes, in order to avoid increasing the temperature of the reactant, carefully A solution of 12.4 g (0.116 mol) of butyryl chloride dissolved in 15 ml of N-methyl-2-pyrrolidone was added slowly over 30 minutes and stirred for 30 minutes. Next, 300 ml of distilled water was slowly added to the reactant and stirred for 30 minutes to separate the organic layer, and the recovered organic layer was dried with anhydrous magnesium sulfate and the solvent was distilled off under reduced pressure, and the resulting product was purified by silica gel column chromatography. Product (elution solvent; ethyl acetate:n-hexane=1:4)...
PUM
| Property | Measurement | Unit |
|---|---|---|
| dispersity | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More