Hydrothermal method for preparing HfO2 nano-particles

Abstract

The invention relates to a hydrothermal method for preparing HfO2 nano-particles. According to the invention, hafnium tetrachloride is dissolved in water, such that a hafnium oxychloride solution is obtained; a sodium hydroxide solution is dropped into the hafnium oxychloride solution, such that a precursor solution is obtained; dodecylamine is dissolved in a solvent, such that a dodecylamine solution is obtained; the dodecylamine solution is mixed with the above precursor solution, and the mixture is subjected to normal-temperature magnetic stirring, such that a mixed solution is carried out; a hydrothermal reaction is carried out; and separation, washing and drying are carried out, such that the nano-particles are obtained. The method provided by the invention is simple and convenient, and has good repeatability low cost. The method can be used in mass production. The prepared HfO2 nano-particles have uniform particle size distribution, and have a good application prospect.

Description

technical field [0001] The invention belongs to the field of preparation of HfO2 nanomaterials, in particular to a method for preparing HfO by hydrothermal method 2 nanoparticle approach. Background technique [0002] HfO 2 It has a high dielectric constant (the dielectric constant of the bulk material is 25, and the film material is about 20.25), a large band gap (~5.79eV), a high reflection coefficient (~2.9), a high refractive index (1.82 ~1.93) and resistance to laser damage threshold, excellent chemical stability and biocompatibility. Based on the above excellent properties, HfO 2 It has broad application prospects in the fields of MOS gate dielectric layer, optical coating, organic catalysis, solid electrolyte and biomedicine. [0003] Ananthakumar Ramadoss et al prepared spherical HfO with a size of about 20 nm by heating or ultrasound-assisted sol-gel method 2 nanoparticles, but the resulting nanoparticles agglomerate severely. The sol-gel method is a powder ma...

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Problems solved by technology

Liu Jianqiang [Liu Jianqiang et al., National Natural Science Foundation of China, 2004, 6(35): 730-733] and others synthesized HfO by high-temperature solid-phase method 2 Nano-powder, high-temperature solid-phase synthesis method is a traditional method for synthesizing luminescent materials. Although it is beneficial to industrial production, this method has high cost and high equipment requirements, and the doping degree is not high, and the particle size is large. powder with better performance

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