C/h-BN composite evaporation boat used for film coating and manufacturing method thereof

The technology of evaporation boat and composite block is applied in the field of evaporation element for vacuum evaporation of aluminized film and its production, which can solve the problems of shortening the service life of the evaporation boat, changing the resistance of the evaporation boat, uneven corrosion of the evaporation boat, etc., so as to improve the high temperature Antioxidant ability, reducing thermal radiation heat loss, significant economic and social benefits

Inactive Publication Date: 2017-02-01
曹志冠
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the uneven corrosion of the evaporation boat, and because the evaporated aluminum liquid also participates in conduction and heat generation, it is easy to cause the aluminum liquid to splash, burn through the substrate, and form pinholes in the middle and late stages of the evaporation boat life.
The reason is: during the use of the existing evaporation boat, some of the surface of the boat body is gradually corroded due to the microcracks that appear at high temperature, and cracks or cavities are left in the evaporation process, so that the molten evaporation material (especially active aluminum liquid) ) will penetrate into these cracks or cavities, change the resistance of the evaporation boat, and cause the density of the evaporation boat to decrease, resulting in uneven local heat dissipation, which makes the evaporation material wet and spread poorly on the surface of the evaporation boat during the evaporation process, causing evaporation material Sputtering occurs, which affects the coating quality and shortens the service life of the evaporation boat. At the same time, the surface of the evaporation boat also loses more heat energy due to thermal radiation at high temperatures, and the energy consumption is high.

Method used

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  • C/h-BN composite evaporation boat used for film coating and manufacturing method thereof

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Experimental program
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Effect test

Embodiment 1

[0024] The C / h-BN composite evaporating boat used for the coating described in this embodiment, the particles are 100 to 200 mesh raw material powder, mixed with weight percentage BN: 94%, CaO: 5%, B2O3: 1%;

[0025] Process the upper and lower surfaces of a graphite block with a thickness of 8mm to obtain a suitable joint form, then perform sandblasting on the upper and lower surfaces, and then coat a mixture of phenolic resin, graphite, and cubic boron nitride, with a mass percentage of 1:0.5: 0.5;

[0026] The mixed powder and the treated graphite block are placed alternately in the high-temperature furnace mold according to the thickness of 2:1, a total of 6 layers each, and placed in a high-temperature vacuum furnace for hot-press sintering.

[0027] When the pressure in the high-temperature vacuum furnace is less than 0.2Pa, start to feed N2 into the furnace, and pressurize to 5MPa at a temperature of 150°C; when the temperature rises to 1100°C, pressurize to 10MPa; The...

Embodiment 2

[0031] The C / h-BN composite evaporating boat used for the coating described in this embodiment, the particles are 100-200 mesh raw material powder, mixed with weight percentage BN: 96%, CaO: 3%, B2O3: 1%;

[0032] Process the upper and lower surfaces of graphite blocks with a thickness of 8mm to obtain a suitable joint form, and then perform sandblasting on the upper and lower surfaces;

[0033] Mix medium-temperature coal tar pitch powder and cubic boron nitride powder with particles of 100-200 mesh at a mass percentage of 1:0.5;

[0034]Coat or spread the mixed BN powder and coal tar pitch / boron nitride mixture powder on the surface of the graphite block, first spread a layer of coal tar pitch / boron nitride mixture powder, then spread a layer of BN powder mixture, and then According to the thickness of 100:1:200, it is laid layer by layer into the high-temperature furnace mold, and a total of 6 layers are hot-pressed and sintered.

[0035] When the pressure in the high-temp...

Embodiment 3

[0039] The C / h-BN composite evaporation boat for coating described in this embodiment, the particles are 100-200 mesh raw material powder, with weight percentage BN: 51%, AlN: 45%, CaO: 3%, B2O3: 1% to mix;

[0040] Process the upper and lower surfaces of graphite blocks with a thickness of 8mm to obtain a suitable joint form, and then perform sandblasting on the upper and lower surfaces;

[0041] Mix medium-temperature coal tar pitch powder and cubic boron nitride powder with particles of 100-200 mesh at a mass percentage of 1:0.5;

[0042] Coat or spread the mixed BN powder and coal tar pitch powder mixture on the surface of the graphite block, first spread a layer of coal tar pitch powder mixture, and then spread a layer of BN powder mixture, in turn according to the thickness of 100:1:200 Lay layer by layer into the high-temperature furnace mold, and a total of 6 layers are hot-pressed and sintered.

[0043] When the pressure in the high-temperature vacuum furnace is les...

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Abstract

The invention relates to an evaporation element used for vacuum evaporation aluminum film coating and a manufacturing method thereof, in particular to a C / h-BN composite evaporation boat used for film coating and a manufacturing method thereof. A composite evaporation boat body is made from a C / h-BN composite material, wherein multiple layers of hexagonal boron nitrate and graphite heating elements are alternately overlapped from top to bottom and subjected to hot-pressing sintering to be integral, and then the C / h-BN composite material is obtained. The C / h-BN composite evaporation boat is characterized in that the surface layer of the boat body is a hexagonal boron nitrate sintered layer with evaporation grooves, the bottom layer of the boat body is a graphite heating element, and the surface of the graphite heating element is at least coated with one layer of oxidation-resistant thermal resistance coating. The specific resistance of the evaporation boat is relatively stable, heating is stable, it is avoided that due to uneven local heating, evaporation materials are sputtered, and film coating quality is improved. Meanwhile, because the hexagonal boron nitrate sintered layer protects the boat body, the service life is prolonged. The oxidation-resistant thermal resistance coating for usage substantially reduces heat energy loss caused by thermal irradiation of the graphite heating element under a vacuum environment, and therefore the effect of saving electric energy is achieved.

Description

technical field [0001] The invention relates to an evaporation element for vacuum evaporation of aluminum-coated thin films and a manufacturing method thereof, in particular to a C / h-BN composite evaporation boat for coating and a manufacturing method thereof. Background technique [0002] The most common method for coating substrates with evaporated materials (metals, especially aluminum) is by physical deposition evaporation in a high vacuum environment. The method used is to contact the evaporation material with the surface of the evaporation boat, and the evaporation material will be melted and vaporized or sublimated when heated, and the substrate to be coated is passed over the evaporation boat, and the evaporation material is deposited on the surface of the substrate as a thin evaporation material layer. [0003] For the constant vapor flow required by the product, the evaporation boat is directly energized and heated to 1450-1650°C, connected to the input evaporation...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/52C04B35/5833C04B35/5835C04B35/622C04B35/645C04B41/87C04B41/88C23C14/26
CPCC04B35/522C04B35/583C04B35/622C04B35/645C04B41/009C04B41/5042C04B41/87C04B41/88C04B2235/3208C04B2235/3225C04B2235/3409C04B2235/3821C04B2235/3826C04B2235/3865C04B2235/612C04B2235/66C23C14/243C23C14/26
Inventor 曹志冠
Owner 曹志冠
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