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Method for preparing diamond vacuum window with self-supporting frame by virtue of mask method

A self-supporting, diamond technology, applied in metal material coating process, gaseous chemical plating, coating, etc., can solve the problem of thermal stress cracking of diamond self-supporting window, low mechanical strength of diamond film, inability to withstand external pressure, etc. problem, to achieve the effect of good air tightness, good thermal stability and good adhesion

Inactive Publication Date: 2017-02-01
WUHAN INSTITUTE OF TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The application of the diamond vacuum window in the optical field limits the thickness of the window film layer, so the mechanical strength of the diamond film itself is not high. In the later application, the diamond self-supporting window needs to be welded to the metal flange in order to connect with the equipment. During the process, the welding device needs to be pressurized to ensure that the solder can be evenly distributed in the gap between the diamond and the metal flange. Without the protection of the frame, the diamond self-supporting window itself cannot withstand the external pressure. In addition, during the welding process, due to The difference in thermal expansion coefficient between the metal flange and the diamond self-supporting window, the increase and decrease of temperature will cause thermal stress and crack the diamond self-supporting window

Method used

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  • Method for preparing diamond vacuum window with self-supporting frame by virtue of mask method
  • Method for preparing diamond vacuum window with self-supporting frame by virtue of mask method
  • Method for preparing diamond vacuum window with self-supporting frame by virtue of mask method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] The nano-diamond film has a thickness of 4 μm and a diameter of 10 mm; a molybdenum sheet (molybdenum disc) has a thickness of 0.2 mm and a diameter of 6 mm;

[0027] In the first step, the nano-diamond film supported by the silicon substrate and the molybdenum sheet are ultrasonically cleaned with acetone and ethanol (alcohol) to remove surface impurities (ultrasonic frequency 40000Hz, power 500W), and dried for use;

[0028] In the second step, the molybdenum sheet cleaned in the first step is placed in the middle of the surface of the nano-diamond film to obtain a sample; then the sample is placed on the substrate stage in the reaction chamber of the microwave plasma chemical vapor deposition device;

[0029] The third step is to seal the reaction chamber, turn on the vacuum pump to evacuate the reaction chamber (cavity), and feed 200 sccm of hydrogen after the vacuum degree drops to the standard vacuum degree (below 1Pa);

[0030] The fourth step is to turn on the m...

Embodiment 2

[0034] The nano-diamond film has a thickness of 8 μm and a diameter of 12 mm, and a molybdenum sheet (molybdenum disc) has a thickness of 0.5 mm and a diameter of 7 mm;

[0035] In the first step, the nano-diamond film supported by the silicon substrate and the molybdenum sheet are ultrasonically cleaned with acetone and ethanol solvent (alcohol) respectively (the frequency of the ultrasonic wave is 40000Hz, and the power is 500W) to remove surface impurities, and then dried for use;

[0036] In the second step, the molybdenum sheet cleaned in the first step is placed in the middle of the surface of the nano-diamond film to obtain a sample; then the sample is placed on the substrate stage in the reaction chamber of the microwave plasma chemical vapor deposition device;

[0037] The third step is to seal the reaction chamber, turn on the vacuum pump to evacuate the reaction chamber (cavity), and feed 200 sccm of hydrogen after the vacuum degree drops to the standard vacuum degre...

Embodiment 3

[0041]The nano-diamond film has a thickness of 5 μm and a diameter of 9 mm, and a molybdenum sheet (molybdenum disc) has a thickness of 0.3 mm and a diameter of 6 mm;

[0042] In the first step, the nano-diamond film and the molybdenum sheet supported by the silicon substrate are ultrasonically cleaned with acetone and ethanol solvent (alcohol) to remove surface impurities (ultrasonic power is 200-500W), and dried for use;

[0043] In the second step, the molybdenum sheet cleaned in the first step is placed in the middle of the surface of the nano-diamond film to obtain a sample; then the sample is placed on the substrate stage in the reaction chamber of the microwave plasma chemical vapor deposition device;

[0044] The third step is to seal the reaction chamber, turn on the vacuum pump to evacuate the reaction chamber (cavity), and feed 200 sccm of hydrogen after the vacuum degree drops to the standard vacuum degree (below 1Pa);

[0045] The fourth step is to turn on the mic...

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Abstract

The invention relates to the field of diamond self-supporting windows. A method for preparing a diamond vacuum window with a self-supporting frame by virtue of a mask method is characterized by comprising the following steps: step 1, removing surface impurities through ultrasonic cleaning; step 2, placing a molybdenum sheet cleaned in the step 1 at the centre of a nano-diamond film to obtain a sample; and then placing the sample on a substrate table in a reaction cavity of a microwave plasma chemical vapour deposition device; step 3, charging hydrogen after a vacuum degree is lowered to a standard vacuum degree; step 4, turning on a microwave power supply, increasing a microwave power, closing a diaphragm valve after glow discharge is started in a reaction chamber, charging a carbon source gas, adjusting a power and a gas pressure, and stabilizing a plasma state; and step 5, corroding after the completion of deposition, so as to obtain the diamond vacuum window with the self-supporting frame. The method is capable of remarkably improving the capacity of adapting to environmental changes of the diamond self-supporting film, thus facilitating later-period welding of the diamond vacuum window with a metal flange.

Description

technical field [0001] The invention relates to the field of diamond self-supporting windows, in particular to a method for preparing a diamond self-supporting window protection frame, in particular to a method for preparing a diamond vacuum window with a self-supporting frame by using a mask method. Background technique [0002] Diamond is the hardest substance in nature. The thermal conductivity of diamond is extremely high, and the thermal expansion coefficient is extremely small; the chemical properties are stable, and it has acid resistance and alkali resistance; Good light transmission performance, so diamond has many applications in the industrial field, such as various high-power windows, specifically high-power CO 2 Laser window, high power microwave window, etc. The application of diamond vacuum windows in the optical field limits the thickness of the window film, so the mechanical strength of the diamond film itself is not high. In the later application, the dia...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/04C23C16/27C23C16/511
CPCC23C16/042C23C16/274
Inventor 马志斌任昱霖
Owner WUHAN INSTITUTE OF TECHNOLOGY
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