Organic polymer high-speed electro-optical modulator with loss compensation function, and manufacturing method thereof

Abstract

The invention discloses an organic polymer high-speed electro-optical modulator with a loss compensation function, and a manufacturing method thereof, and belongs to the technical field of polymer planar optical waveguide devices and manufacturing thereof. The manufacturing method comprises the following steps: implementing semiconductor processes such as spinning, photoetching and etching to form waveguide grooves in a lower polymer coating on a silicon substrate, coating the waveguide groove with a layer of an organic light amplification material by using a spinning process, forming another waveguide groove in a middle electro-optical modulation area once again by using a photoetching and wet-method etching process, coating the groove with a polarized polymer electro-optical material as a waveguide core layer of the electro-optical modulation area, finally coating an upper coating layer, performing electric field polarization on waveguide, and furthermore manufacturing the high-speed electro-optical modulator with the loss compensation function on an optical signal. By adopting the organic polymer high-speed electro-optical modulator disclosed by the invention, a signal amplification function can be achieved, multi-functionalization of a conventional single waveguide device can be achieved, moreover, the organic polymer high-speed electro-optical modulator is simple in manufacturing method, low in device cost, high in finished product yield, rapid in manufacturing speed and applicable to large-scale production.

Description

technical field [0001] The invention belongs to the technical field of polymer planar optical waveguide devices and their preparation, and specifically relates to an optical waveguide core layer with a silicon chip as a substrate, an organic optical amplification material as an input / output area of ​​a device, and a polarized polymer electro-optic material An organic polymer high-speed electro-optic modulator with loss compensation function as the optical waveguide core layer of the electro-optic modulation region of the device and its preparation method. Background technique [0002] Optical communication devices are the basis for constructing optical communication systems and networks. "Ultra-high speed, ultra-large capacity and ultra-long distance" are still the main development direction of optical fiber communication. The urgent need for electro-optic modulators and their integrated devices, the combination of high performance and low cost of electro-optic modulators an...

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Problems solved by technology

[0007] The invention adopts a silicon wafer as a substrate, an organic optical amplifying material as an optical waveguide core layer in the input / output area at both ends of the device, and a polarized polymer electro-optic material as an optical waveguide core layer in the middle electro-optic modulation area to prepare an organic polymer high-speed The electro-optic modulator not only solves the problem of relatively simple functions of traditional optical waveguides, but also effectively utilizes the advantages of organic polymer materials in integrated optical devices, especially in high-speed electro-optic modulators / electro-optic switches and organic optical waveguide amplifiers. Tap its potential in high-density integration, device miniaturization and multi-functionalization, realize the functional integration of a single waveguide, and make the electro-optical modulator prepared by it have the function of compensating for the loss of optical signals while realizing the electro-optic modulation function of optical signals

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