Method for preparing anti-friction and anti-wear f-dlc film on titanium alloy surface

A F-DLC, anti-friction and anti-wear technology, applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., to achieve the effects of high adhesion, improved tribological properties, and high hardness

Inactive Publication Date: 2019-05-14
CHONGQING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The object of the present invention is to provide a kind of method for preparing anti-friction and anti-wear F-DLC film on the surface of titanium alloy for above problem, the F-DLC film deposited on the surface of titanium alloy by this method has anti-friction and anti-wear function in biological environment, It can improve the tribological properties of medical titanium alloys in the human body environment, and solve the problems of aseptic loosening complications caused by friction and wear of titanium alloys as artificial joints and other medical devices in vivo

Method used

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  • Method for preparing anti-friction and anti-wear f-dlc film on titanium alloy surface
  • Method for preparing anti-friction and anti-wear f-dlc film on titanium alloy surface
  • Method for preparing anti-friction and anti-wear f-dlc film on titanium alloy surface

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Embodiment 1

[0021] To prepare anti-friction and anti-wear F-DLC film on the surface of titanium alloy Ti-6Al-4V substrate, follow the steps below:

[0022] 1) Pretreatment: Polish the Ti-6Al-4V surface to reduce its surface roughness to less than 10nm, then immerse it in acetone and alcohol solvent for ultrasonic cleaning for 15 minutes to remove dirt on the alloy surface, and use nitrogen to blow Dry spare.

[0023] 2) Sputtering cleaning: Put the dried Ti-6Al-4V into the middle of two parallel plates in the reaction chamber of HP-PECVD deposition system, and vacuum the reaction chamber. When the pressure of the reaction chamber is lower than 10 -4 At Pa, let argon gas and keep the reaction chamber pressure at 1.3 Pa, apply pulse bias -8kV on the plate, control the duty cycle to 15%, and pulse frequency to 1200Hz, splash the Ti-6Al-4V in the reaction chamber Spray cleaning for 20 minutes.

[0024] 3) Depositing the Si transition layer: After the sputtering cleaning is completed, pass SiH into ...

Embodiment 2

[0028] To prepare anti-friction and anti-wear F-DLC film on the surface of titanium alloy Ti-6Al-4V substrate, follow the steps below:

[0029] 1) Pretreatment: Polish the Ti-6Al-4V surface to reduce its surface roughness to less than 10nm, then immerse it in acetone and alcohol solvent for ultrasonic cleaning for 20 minutes to remove dirt on the alloy surface, and then use nitrogen Blow dry and set aside.

[0030] 2) Sputtering cleaning: Put the dried Ti-6Al-4V into the middle of two parallel plates in the reaction chamber of HP-PECVD deposition system, and vacuum the reaction chamber. When the pressure of the reaction chamber is lower than 10 -4 At Pa, pass argon gas and keep the pressure of the reaction chamber at 2.0 Pa, apply a pulse bias voltage of -13kV on the plate, control the duty cycle to 25%, and the pulse frequency to 1500Hz. Splash the Ti-6Al-4V in the reaction chamber Spray cleaning for 30 minutes.

[0031] 3) Depositing the Si transition layer: After the sputtering c...

Embodiment 3

[0035] To prepare anti-friction and anti-wear F-DLC film on the surface of titanium alloy Ti-6Al-4V substrate, follow the steps below:

[0036] 1) Pretreatment: Polish the Ti-6Al-4V surface to reduce the surface roughness to below 10nm, then immerse it in acetone and alcohol solvent for ultrasonic cleaning for 30 minutes to remove dirt on the alloy surface, and then use nitrogen Blow dry and set aside.

[0037] 2) Sputtering cleaning: Put the dried Ti-6Al-4V into the middle of two parallel plates in the reaction chamber of HP-PECVD deposition system, and vacuum the reaction chamber. When the pressure of the reaction chamber is lower than 10 -4 At Pa, pass argon gas and keep the pressure in the reaction chamber at 2.5 Pa, apply pulse bias -15kV on the plate, control the duty cycle to 35%, and the pulse frequency to 1500Hz. Splash the Ti-6Al-4V in the reaction chamber Spray cleaning for 28min.

[0038] 3) Depositing the Si transition layer: After the sputtering cleaning is completed, ...

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Abstract

The invention discloses a method for preparing an antifriction wear-resistant F-DLC film on a titanium alloy surface. A plate hollow cathode HP-PECVD method is adopted. According to the plate hollow cathode HP-PECVD method, on the basis of a traditional PECVD method, a sample disk for carrying samples in an existing deposition system reaction chamber is changed into two parallel plates; a base body is placed between the two plates; negative bias voltage is applied to the space between the two plates to form a hollow cathode effect. The method specifically comprises the following steps of (1) pretreatment; (2) sputter cleaning; (3) deposition of a Si transition layer; and (4) deposition of the F-DLC film. The F-DLC film deposited on the titanium alloy surface through the method has the antifriction wear-resistant function, the tribology performance of titanium alloy in the vivo environment can be improved, and the problem that aseptic loosening complications caused by frictional wear of titanium alloy artificial joints is solved.

Description

Technical field [0001] The invention belongs to the technical field of biomedical materials, and relates to a method for preparing an F-DLC film, in particular to a method for preparing a friction-reducing and anti-wear F-DLC film on the surface of a titanium alloy. Background technique [0002] Titanium and titanium alloys have a wide range of applications in the field of biomedicine due to their small specific gravity, strong corrosion resistance, and excellent biocompatibility, especially as hard tissue replacements such as artificial joints, artificial dental implants, and bone trauma products. Or repair medical device product materials. At the same time, with the widespread use of titanium and titanium alloy materials, its complications have become increasingly apparent. Among them, aseptic loosening is considered to be the most dangerous and morbidity one. The important factor leading to aseptic loosening is the wear debris generated in the friction and wear process of ar...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/26C23C16/24C23C16/02C23C16/517
CPCC23C16/0245C23C16/24C23C16/26C23C16/517
Inventor 王军军王林青黄伟九马建军何浩然
Owner CHONGQING UNIV OF TECH
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