Manufacturing method of high-performance silicon nitride sealing ring
A silicon nitride and sealing ring technology, which is applied in the field of preparation of high-performance silicon nitride sealing rings, can solve the problems of increasing the manufacturing cost of silicon nitride products and high sintering costs, and achieve the effect of promoting densification and improving mechanical properties
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example 1
[0029] The weight ratios of silicon nitride powder, magnesium oxide, aluminum oxide and yttrium oxide are 93%, 4%, 0.5% and 2.5% respectively, and the four are composed of mixed powder, and then 1% PVB of the mixed powder weight is added and mixed to obtain mixture. Then, configure grinding balls and absolute ethanol according to the weight ratio of mixture: grinding balls: absolute ethanol = 1: 2.5: 1.2, pour into a stirring ball mill, and ball mill for 6 hours to obtain a silicon nitride composite powder slurry.
[0030] Then, the silicon nitride composite powder slurry is pumped into the closed-loop granulation tower for granulation, and the process is N 2 atmosphere, the inlet temperature is 170°C, and the outlet temperature is 70°C to obtain silicon nitride granulated powder;
[0031] The obtained silicon nitride granulated powder is poured into a sealing ring mold, pre-molded at 20 MPa, and then subjected to 150 MPa cold isostatic pressing to obtain a high-density silic...
example 2
[0035] The weight ratios of silicon nitride powder, magnesium oxide, aluminum oxide and yttrium oxide are 90%, 5.5%, 1% and 3.5% respectively, and the four are combined to form a mixed powder, and then 1% of the weight of the mixed powder is added with PVB and 1% The PEGs are mixed to obtain a mixture. Then, configure grinding balls and absolute ethanol according to the weight ratio of mixture: grinding balls: absolute ethanol = 1:3:1.5, pour into a stirring ball mill, and ball mill for 4 hours to obtain a silicon nitride composite powder slurry.
[0036] Then, the silicon nitride composite powder slurry is pumped into the closed-loop granulation tower for granulation, and the process is N 2 atmosphere, the inlet temperature is 185°C, and the outlet temperature is 80°C to obtain silicon nitride granulated powder;
[0037] The obtained silicon nitride granulated powder is poured into a sealing ring mold, pre-molded at 40 MPa, and then subjected to 170 MPa cold isostatic pressi...
example 3
[0041] The weight ratios of silicon nitride powder, magnesium oxide, aluminum oxide and yttrium oxide are 95%, 2.5%, 1% and 1.5% respectively, and the four are combined to form a mixed powder, and then 0.5% of the weight of the mixed powder is added with PVB and 2% The PEGs are mixed to obtain a mixture. Then, configure grinding balls and absolute ethanol according to the weight ratio of mixture: grinding balls: absolute ethanol = 1:2:1, pour into a stirring ball mill, and ball mill for 8 hours to obtain a silicon nitride composite powder slurry.
[0042] Then, the silicon nitride composite powder slurry is pumped into the closed-loop granulation tower for granulation, and the process is N 2 atmosphere, the inlet temperature is 155°C, and the outlet temperature is 60°C to obtain silicon nitride granulated powder;
[0043] The obtained silicon nitride granulated powder is poured into a sealing ring mold, pre-molded at 60 MPa, and then subjected to 200 MPa cold isostatic pressi...
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