Volatilizable organic gas sensitive material and preparation method thereof

Abstract

The invention discloses a volatilizable organic gas sensitive material. The volatilizable organic gas sensitive material consists of a stannic oxide opening-bowl-shaped multi-stage nano-structure doped with various components such as palladium, copper and tungsten. A preparation method of the volatilizable organic gas sensitive material comprises the following steps: (1) adding hydrated potassium stannate in a deionized water and ethanol mixed solution to obtain a potassium stannate solution; (2) successively adding urea and a palladium, copper and tungsten doped precursor to obtain a uniform mixed solution; (3) heating the solution and carrying out high-pressure hydro-thermal synthesis reaction; (4) reacting to obtain nano particle precipitate, washing away soluble impurity ions with deionized water, and centrifugally collecting and precipitating; and (5) drying at low temperature to obtain the stannic oxide opening-bowl-shaped multi-stage nano-structure powder doped with various components such as the palladium, the copper and the tungsten. The sintering temperature of the multi-component-doped metal oxide semiconductor gas sensitive material is low and is lower than or equal to 500 DEG C, the stability is good, sensitivity to volatilizable organic gas is high, response recovery speed is high, a preparation process of the material is simple, the cost is low, and therefore, the volatilizable organic gas sensitive material is suitable for being used on an MEMS gas sensor.

Description

technical field [0001] The invention relates to the technical field of metal oxide semiconductor gas sensors and their manufacture, in particular to a volatile organic compound (VOCs) gas sensitive material and a preparation method thereof. Background technique [0002] Gas sensors are widely used in industrial, medical, smart home, ventilation and air conditioning, security, automobile, aviation and other fields to achieve early warning detection, energy saving and emission reduction. At present, ceramic tubular gas sensors are the most widely used in the market, but their products are large in size, high in power consumption, low in sensitivity, slow in response and recovery time, difficult to automate product manufacturing, and high in manufacturing costs, which limits their application. The new MEMS metal-oxide-semiconductor gas sensor has the advantages of low power consumption, small size, high sensitivity, and easy integration, which can greatly expand its application...

AI Technical Summary

Problems solved by technology

[0004] At present, most of the sensitive materials reported in the literature are solid semiconductor nanoparticles, nanowires, and core-shell microspheres. As the coating thickness of these materials increases, the gas permeation channels are easily blocked or the time required for gas permeation is longer. Most of the doping methods reported in the literature are dipping method, ball milling method, spray pyrolysis method, these methods or doping uniformity is not good, or process equipment is complicated; ) process for low temperature sintering of sensitive materials