Method for rapidly synthesizing spherical aluminum nitride powder with uniform grain distribution

A technology of alumina powder and aluminum nitride, applied in the field of aluminum nitride, can solve the problems of uneven product particle size distribution, affecting the use of aluminum nitride, and expensive production costs, and achieves easy control, high production cycle, and high cost. low effect

Inactive Publication Date: 2017-06-13
HEBEI COREFRA SILICON NITRIDE MATERIAL
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It can be seen that the above method can obtain spherical aluminum nitride particles, but it brings problems such as complex process equipment, expensive production cost, long production cycle, and uneven particle size distribution of the product, which affects the use of aluminum nitride in ceramics and semiconductors.

Method used

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  • Method for rapidly synthesizing spherical aluminum nitride powder with uniform grain distribution

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Embodiment 1

[0027] A method for rapidly synthesizing spherical aluminum nitride powder with uniform particle size distribution. The production steps are:

[0028] Step 1. Mix 100g of single-grade alumina powder with a particle size distribution of 13-15μm and 1g of calcium fluoride to obtain a powder with good uniformity;

[0029] Step 2. Put the mixed powder in step 1 into a multi-functional sintering furnace, inject a mixed gas of 80% carbon monoxide and 20% nitrogen, keep the temperature at 1250° C. for 3 hours, and then cool naturally to obtain an aluminum nitride block;

[0030] Step 3: Ball mill the aluminum oxide block for 18 hours to form a powder, put it into a mixed acid with a concentration of 10% hydrofluoric acid and 10% nitric acid for 1 hour, wash it with water, and finally dry it at 110±3°C for 1.5 hours. Aluminum nitride powder was obtained.

Embodiment 2

[0032] A method for rapidly synthesizing spherical mendefurium nitride powder with uniform particle size distribution. The production steps are:

[0033] Step 1. Mix 100g of single-graded alumina powder with a particle size distribution of 7-9μm and 2g of calcium fluoride to obtain a powder with good uniformity;

[0034] Step 2. Put the mixed powder in step 1 into a multi-functional sintering furnace, introduce a mixed gas of 80% carbon monoxide and 20% nitrogen, keep it warm at 1250°C for 3 hours, and then cool naturally to obtain an aluminum nitride block

[0035] Step 3: Ball mill the aluminum oxide block for 18 hours to form a powder, put it into a mixed acid with a concentration of 15% hydrofluoric acid and 15% nitric acid for 1 hour, wash it with water, and finally dry it at 110±3°C for 1.5 hours. Aluminum nitride powder was obtained.

Embodiment 3

[0037] A method for rapidly synthesizing spherical aluminum nitride powder with uniform particle size distribution. The production steps are:

[0038] Step 1. Mix 100g of single-grade alumina powder with a particle size distribution of 3-5μm and 3g of calcium fluoride to obtain a powder with good uniformity;

[0039] Step 2. Put the mixed powder in step 1 into a multi-functional sintering furnace, inject a mixed gas of 80% carbon monoxide and 20% nitrogen, keep it warm at 1250° C. for 5 hours, and then cool naturally to obtain an aluminum nitride block;

[0040] Step 3: ball mill the aluminum oxide block for 18 hours to form a powder, put it into a mixed acid with a concentration of 15% hydrofluoric acid and 10% nitric acid for treatment for 1 hour, wash it with clean water, and finally dry it at 110±3°C for 2 hours to obtain Aluminum nitride powder.

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Abstract

The invention provides a method for rapidly synthesizing spherical aluminum nitride particles with uniform particle size distribution, and belongs to the technical field of powder preparation. The preparation method comprises the following steps: (1) mixing single-graded alumina powder and an external catalyst with a mass fraction of 0-3% to obtain powder with good uniformity; (2) mixing the powder obtained in step (1) Put the material into a multi-functional sintering furnace, keep it warm for 2-8h under the condition of 1200-1500°C under the mixed gas atmosphere of nitrogen and carbon monoxide, and then cool naturally to obtain aluminum nitride block; (3) ball mill the aluminum nitride block into powder body, treated with acid, washed with water, and finally dried to obtain aluminum nitride powder. The invention has the characteristics of low production cost, simple process, high production efficiency and easy industrial production; the prepared aluminum nitride powder has the advantages of uniform particle size distribution, good particle shape and high purity.

Description

technical field [0001] The invention belongs to the technical field of aluminum nitride. Specifically, it relates to a method for spherical aluminum nitride powder with uniform particle size distribution. Background technique [0002] Aluminum nitride is a covalent bond compound, which belongs to the hexagonal crystal system and has a lead-zinc ore crystal structure. It has a series of excellent properties such as good thermal conductivity, reliable electrical insulation, low dielectric loss and dielectric constant, and low thermal expansion coefficient. It is considered to be an ideal material for highly integrated semiconductor substrates and electronic device packaging. [0003] At present, the methods for preparing aluminum nitride powder mainly include direct nitriding method of aluminum powder, carbothermal reduction method, chemical vapor deposition method and so on. Although these preparation methods are mature in technology, they all have their own shortcomings. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B21/072
Inventor 吴诚刘久明
Owner HEBEI COREFRA SILICON NITRIDE MATERIAL
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