High-order supermode direction coupling waveguide detector with symmetric horizontal directions

Abstract

The invention discloses a high-order supermode direction coupling waveguide detector with symmetric horizontal directions. The high-order supermode direction coupling waveguide detector sequentially comprises a substrate layer (1), a waveguide layer (2), an absorbing layer (3) and a covering layer (4) from bottom to top, wherein the waveguide layer (2) consists of a left waveguide (21), a middle waveguide (22) and a right waveguide (23) in parallel; the left waveguide (22) and the right waveguide (23) are of the same structure, and are symmetrically distributed. The high-order supermode direction coupling waveguide detector has the advantages that the problem of over-small incident light spot due to over-small cross section in the existing direction coupling waveguide detector, the vertical direction coupling waveguide detector and the symmetric structure type vertical direction coupling waveguide detector is solved; the diameter of the incident light spot is increased from 3 micrometers to 5 micrometers, so as to increase the photocurrent of the detector, and effectively improve the optical coupling efficiency from an optical fiber to waveguide.

Description

technical field [0001] The invention belongs to the field of optoelectronic technology, and in particular relates to the design of a horizontally symmetrical high-order supermode direction-coupled waveguide detector. Background technique [0002] The high-power high-speed photodetector is a detection device based on the interaction between light and matter, and its function is to convert the incident light signal into a high-power high-frequency signal. High-power high-speed optical detector is an indispensable device in optically controlled phased array radar, ultra-high-speed test system and optical fiber LAN communication, and its performance plays a decisive role in the whole system. [0003] Conventional vertical-incidence photodetectors cannot meet both high-speed and high-power requirements. The main reasons are as follows: one is the saturation effect, which limits the photocurrent; the other is the long transit time, which limits the response frequency; the third i...

AI Technical Summary

Problems solved by technology

However, the current waveguide detector also has the following problems: the photocurrent is unevenly distributed along the waveguide direction, it is exponentially attenuated, and the coupling loss is large; the photocurrent is very strong at the front end of the waveguide, and gradually weakens in the direction of propagation. The front end of the waveguide determines the photocurrent. The saturation value of , which limits the incident optical power

However, vertically coupled waveguide detectors with symmetrical structures usually have a very deep waveguide ridge (almost all above 10 microns), such a deep waveguide ridge is difficult to process under the existing processing conditions, making the structure Achieve yet-to-be-processed optimizations

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