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High-power pulsed magnetron sputtering CrAlSiN nano-composite coating and preparation method thereof

A nanocomposite coating and coating technology, which is applied in coating, sputtering plating, metal material coating technology, etc., can solve the problems of low fracture toughness, inability to meet advanced processing technology requirements, poor high temperature oxidation resistance, etc. , to achieve the effect of dense structure, fine grain, good high temperature thermal stability and corrosion resistance

Active Publication Date: 2017-09-05
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This type of coating is still widely used on cutting tools, but its low fracture toughness and poor high temperature oxidation resistance make it unable to meet the requirements of some advanced processing technologies

Method used

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  • High-power pulsed magnetron sputtering CrAlSiN nano-composite coating and preparation method thereof
  • High-power pulsed magnetron sputtering CrAlSiN nano-composite coating and preparation method thereof
  • High-power pulsed magnetron sputtering CrAlSiN nano-composite coating and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0020] In this example, a CrAlSiN nanocomposite coating was prepared on a polished high-speed steel sheet by high-power pulse and DC pulse co-sputtering technology, and the size of the high-speed steel sample was 25×30×1 mm. The substrates were ultrasonically cleaned in acetone, alcohol, and distilled water for 20 min each, and then cleaned with high-purity N 2 Dry it, and then place it on the sample holder facing the target in a high-power pulse and DC pulse co-sputtering coater. The rotation speed of the turntable is selected as 30 r / min, and the distance between the target and the base is 80 mm. The targets are made of pure metals Cr, Al and Si (all with a purity of 99.99 wt.%), and the working gas and reaction gas are made of high-purity Ar and N respectively. 2 (The purity is 99.999%).

[0021] First, the background vacuum of the vacuum chamber is evacuated to 1.0×10 -3 Above Pa; turn on the heating system, raise the temperature to 300 ℃, and wait until the vacuum degr...

Embodiment 2

[0026] In this example, a CrAlSiN nanocomposite coating is deposited on a polished cemented carbide substrate YG8, and the sample size is 19×19×2 mm. The substrates were ultrasonically cleaned in acetone, alcohol, and distilled water for 20 min each, and then cleaned with high-purity N 2 Blow-dry, the rotation speed of the turret is selected as 30 r / min, and the distance between the target and the base is 80 mm. The targets are made of pure metal Cr and Al (both with a purity of wt. 99.9%), and the working gas and reaction gas are made of Ar and N respectively. 2(The purity is 99.999%). In the process of depositing the CrAlSiN nanocomposite coating in this embodiment, the Cr target, the Al target and the Si target power supply, the power is 1KW, 1.0KW, 0.6KW respectively, and other process parameters are the same as the embodiment 1.

[0027] The phase composition and structure of the CrAlSiN coating prepared under the process of the present invention are the same as those o...

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Abstract

The invention relates to a nano-composite coating and a preparation technology thereof, and specifically relates to a preparation technology of a CrAlSiN nano-composite coating. The CrAlSiN nano-composite coating is prepared on metal or a hard alloy matrix by adopting a co-sputtering technology of high-power pulse and direct current pulse. Pure metals of Cr, Al and Si (the purities are all 99.99% by weight) are selected to be target materials, wherein a Cr target is selected by the high-power pulse, and an Al target and a Si target are selected by a direct current pulse sputtering. Ar gas is piped in before a film is coated, -800 V bias voltage is adopted, and a substrate is washed by glow for 10-30 min. Then the three target materials are opened, bombard washing is conducted on the surfaces of the substrate and the target materials, and the bias voltage is gradually reduced to -30-100 V. The Al target and the Si target are closed, and a pure Cr transition layer is deposited for 10-40 min. Reactant gas N2 is piped in, the Al target and the Si target are opened, and a CrAlSiN coating is deposited for 120-360 min. According to the high-power pulsed magnetron sputtering CrAlSiN nano-composite coating and the preparation method thereof, the CrAlSiN nano-composite coating is good in overall performance, simple in preparation technology, controllable in component and good in repeatability; and industrialized production is easy.

Description

technical field [0001] The invention relates to a coating preparation technology, in particular to a preparation process for preparing a CrAlSiN nanocomposite coating with high hardness and high strength by adopting novel high-power pulse and DC pulse co-sputtering technology. Background technique [0002] Cutting tool materials mainly include high-speed steel, cemented carbide and ceramic cutting tools. High-speed steel has good toughness, but its hardness is low, and it is easy to chip when processing high-temperature alloys, with short life and low efficiency. Cemented carbide has good hardness, plasticity, toughness, wear resistance, etc., and is the most commonly used material for cutting superalloys. However, at high temperature, the elements in the workpiece are easy to diffuse into the tool material binder Co phase, which weakens the bonding strength between the hard phase and the binder, and causes adhesive wear and diffusion wear. The red hardness of ceramic cutt...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06C23C14/02
CPCC23C14/022C23C14/025C23C14/0641C23C14/352
Inventor 范其香王铁钢吴正环王政权刘艳梅张涛
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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