Double-layer double-scale composite-structure oxide-titanium-dioxide film, preparation process and use thereof
A composite structure, titanium dioxide technology, applied in sustainable manufacturing/processing, final product manufacturing, semiconductor/solid-state device manufacturing, etc., to achieve the effect of simple preparation process, wide source of raw materials, and promotion of commercialization process
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Embodiment 1
[0032] A double-layer double-scale composite structure oxide-titanium dioxide thin film, comprising the following steps:
[0033] Step 1, the matrix 0 was washed with ethanol, acetone and water in sequence in ultrasonic wave, then blown dry with nitrogen, and soaked it in 200mM TiCl 4 In the aqueous solution, seal and keep warm at 70°C for 80 minutes. After the solution was cooled to room temperature, the substrate 0 was taken out, rinsed with acetone, ethanol and water respectively, blown dry with nitrogen, and then dried at 100°C for 10 minutes to obtain a layer of primary structure titanium oxide 1 with pores on the substrate 0;
[0034] Step 2, after drying the above, TiO has been deposited 2 Substrate 0 of the film was ultrasonically washed in water for 5 minutes and soaked in 40mM TiCl 4 In the aqueous solution, seal and keep warm at 90°C for 60 minutes. After the solution was cooled to room temperature, the matrix 0 was taken out, washed with acetone, ethanol and wat...
Embodiment 2
[0037] A double-layer double-scale composite structure oxide-titanium dioxide thin film, comprising the following steps:
[0038] Step 1, the substrate was washed with ethanol, acetone and water in sequence in ultrasonic, then blown dry with nitrogen, and soaked it in 300mM TiCl 4 In the aqueous solution, seal and keep warm at 80°C for 50min. After the solution was cooled to room temperature, the substrate was taken out, washed with acetone, ethanol and water respectively, blown dry with nitrogen, and then dried at 150°C for 10 minutes to obtain titanium oxide 1 with a primary structure with pores;
[0039] Step 2, after drying the above, TiO has been deposited 2 The substrate of the film was washed ultrasonically in water for 5 min and soaked in 50 mM TiCl 4 In the aqueous solution, seal and keep warm at 100°C for 40 minutes. After the solution was cooled to room temperature, the matrix was taken out, rinsed with acetone, ethanol and water in sequence, and then sintered at...
Embodiment 3
[0042] A double-layer double-scale composite structure oxide-titanium dioxide thin film, comprising the following steps:
[0043] Step 1, the substrate was washed with ethanol, acetone and water in sequence in ultrasonic, then blown dry with nitrogen, and soaked it in 400mM TiCl 4 In the aqueous solution, seal and keep warm at 100°C for 40 minutes. After the solution was cooled to room temperature, the substrate was taken out, washed with acetone, propanol and water respectively, dried with nitrogen, and then sintered at 500°C for 30 minutes at a high temperature to obtain titanium oxide 1 with a primary structure with pores;
[0044] Step 2, after drying the above, TiO has been deposited 2 The substrate of the film was ultrasonically washed in water for 5 minutes, soaked in 60mM TiCl4 aqueous solution, and kept sealed at 120°C for 30 minutes. After the solution was cooled to room temperature, the substrate was taken out, rinsed with acetone, ethanol and water in sequence, a...
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