Sensor chip and manufacturing method thereof
A sensor chip, chip technology, applied in the direction of scattering characteristics measurement, etc., to achieve the effect of abundant quantity, good response signal and simple method
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Embodiment 1
[0042] Such as figure 1 As shown, a sensor chip is composed of a glass substrate 1, a metal film 2, a self-assembled film 3 and a composite film 4 of metal oxide and polymer from bottom to top in sequence. The specific preparation steps of the sensor chip are as follows:
[0043] Step 1. Coating a metal film 2 with a thickness of 49 nm on the glass substrate 1 by vacuum evaporation;
[0044] Step 2. Place the glass substrate 1 after the vapor-deposited metal film 2 in allyl mercaptan with a concentration of 1mmol / L, and after standing still for 24h, take out the glass substrate 1 from the allyl mercaptan, and use Rinse with absolute ethanol and dry with high-purity nitrogen to form a self-assembled film 3 on the metal film 2;
[0045] Step 3. Disperse the titanium dioxide powder into distilled water and ultrasonically mix to obtain a concentration of 1×10 -6 mol / L suspension solution;
[0046] Step 4. Mix 0.0355g of acrylamide, 0.0062g of N,N'-methylenebisacrylamide and 950...
Embodiment 2
[0051] A sensor chip consists of a glass substrate 1, a metal film 2, a self-assembled film 3, and a composite film 4 of metal oxide and polymer from bottom to top. The specific preparation steps of the sensor chip are as follows:
[0052] Step 1. Coating a metal film 2 with a thickness of 45 nm on the glass substrate 1 by vacuum evaporation;
[0053] Step 2. Place the glass substrate 1 after the vapor-deposited metal film 2 in mercaptoethylamine with a concentration of 0.1mmol / L. Rinse and dry with high-purity nitrogen to form a self-assembled film 3 on the metal film 2;
[0054] Step 3. Disperse the titanium dioxide powder into distilled water and ultrasonically mix to obtain a concentration of 1×10 -7 mol / L suspension solution;
[0055] Step 4. Mix 0.0086 g of methacrylic acid, 0.0344 g of ethylene glycol dimethacrylate, and 900 μL of acetonitrile solution containing 0.002 g of azobisisobutyronitrile, and ultrasonically degas for 10 minutes to obtain a mixed solution I; ...
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