Preparation method for high-purity high-density MAX phase coating

A coating and densification technology, which is applied in the field of preparation of high-purity, strong and dense MAX phase coatings, can solve the problems of reducing the application economy of MAX phase coatings, difficulty in making targets for MAX phase composite targets, and unfavorable application of MAX phase coatings. It is easy to uniformize deposition in a large area, which is beneficial to industrial application and has the effect of low cost.
CN107620033AActive Publication Date: 2018-01-23NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
Publication Date
2018-01-23

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Abstract

The invention provides a preparation method for a high-purity high-density MAX phase coating. According to the method, an arc ion plating technology is combined with a magnetron sputtering technology,an M-position element is provided for the arc, an A-position Al element is provided for magnetron, nitrogen or hydrocarbon as reaction gas is introduced for deposition, then thermal treatment is adopted, and the high-purity high-density MAX phase coating is prepared. The prepared MAX phase coating is high in purity, good in compactness, free of a microdefect, high in preparation efficiency, low in cost and capable of overcoming the defects that large particles on the surface of a MAX phase coating prepared through a single arc method are excessive, the density is low, the efficiency is low bymeans of a magnetron sputtering method, and the defects are obvious and has the wide application prospects on the aspects of high-temperature protection, corrosion-resistant application and the like,and the industrial production of the MAX phase coating can be achieved easily.
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Description

technical field

[0001] The invention relates to the technical field of surface coatings, in particular to a preparation method of a high-purity, strong and dense MAX phase coating. Background technique

[0002] The MAX phase is a new type of ternary compound with a layered structure, and its chemical formula can be expressed as M n+1 AX n , where M is a transition group metal element; A is a main group element, mainly referring to III A and IV A group elements; X is a C or N element; n is an integer from 1 to 6. The unique layered structure of the MAX phase material makes it have both the excellent properties of metals and ceramics, such as the thermal conductivity, electrical conductivity and machinability of metal materials and the low density, high elastic modulus and oxidation resistance of ceramic materials. In addition, the MAX phase The material also has good high damage tolerance, good thermal shock resistance, etc., so it has potential wide application prospects i...

Claims

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