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Chemical vapor deposition device and method for diamond coating on micro-tools

A technology of chemical vapor deposition and diamond coating, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., to solve the overall design and process problems, reduce the volume, and accelerate the growth rate.

Active Publication Date: 2020-03-13
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is in order to solve the diamond film preparation problem of micro-cutter, the chemical vapor deposition device and method of micro-cutter diamond coating

Method used

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  • Chemical vapor deposition device and method for diamond coating on micro-tools
  • Chemical vapor deposition device and method for diamond coating on micro-tools
  • Chemical vapor deposition device and method for diamond coating on micro-tools

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specific Embodiment approach 2

[0029] Specific implementation mode two: as figure 1 , Figure 4 As shown, this embodiment is a further description of the specific embodiment one. The chemical vapor deposition device for the micro-tool diamond coating also includes a dust cover 9; the dust cover 9 is buckled in the vacuum reaction chamber 8 (for convenience of observation and adjustment, the non-fixed connection between the dust cover 9 and the workbench base 10).

specific Embodiment approach 3

[0030] Specific implementation mode three: as Figure 1-Figure 3 As shown, this embodiment is a further description of specific embodiment 1. The vacuum needle valve 19 is connected with the vacuum reaction chamber 8 through a clamp 18, a KF external thread adapter and a KF joint (that is, the vacuum needle valve 19 The thread is connected with the KF external thread adapter, the KF joint is connected with the vacuum reaction chamber 8, and the KF external thread adapter and the KF joint are connected by a clamp to ensure airtightness).

[0031] Specific implementation mode four: as figure 1 As shown, this embodiment is a further description of specific embodiment one. The hydrogen cylinder 1, the argon cylinder 2, and the methane cylinder 3 are all equipped with pressure reducing valves (which can ensure that the output of the gas pressure is within a certain range. , and protect the pipeline connected to it).

specific Embodiment approach 5

[0032] Embodiment 5: This embodiment is a further description of Embodiment 1. The three heating wires are arranged in parallel spatially and horizontally (to form a uniform temperature field near the micro-cutter substrate).

[0033] Specific implementation mode six: as figure 2 , image 3 , Figure 6 As shown, this embodiment is a further description of Embodiment 1. The electrode assembly 16 enters the vacuum reaction chamber 8 through the KF flange and the KF joint, and the KF flange and the KF joint pass through the clamp 18 and O-ring connection (that is, the vacuum reaction chamber 8 furnace cover is connected with the KF joint, the O-ring is placed between the KF flange and the KF joint, and the KF flange and the KF joint are connected through the clamp 18, and pressed O type sealing ring to ensure air tightness).

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Abstract

The invention provides a chemical vapor deposition device and method for micro-tool diamond coatings and belongs to the technical field of diamond thin film chemical vapor deposition preparation. A vacuum pump communicates with a vacuum reaction chamber through a vacuum needle valve, a hydrogen bottle, an argon bottle and a methane bottle communicate with a mixing box, and an air inlet needle valve is fixed to a furnace cover of the vacuum reaction chamber. A pressure control device communicates with the vacuum reaction chamber, an electrode assembly is fixed into the vacuum reaction chamber,and a work table is arranged in the vacuum reaction chamber. A micro-tool is fixed to the work table, two cables are led out of a heating electric source and connected with the electrode assembly, anda hard alloy sheet is attached to the end of a probe of a thermocouple. An infrared thermodetector is arranged on the exterior of the vacuum reaction chamber through a support of the infrared thermodetector, and four cold water pipes are externally connected to a cold water machine. The two cold water pipes communicate with the furnace cover of the vacuum reaction chamber, the other two cold water pipes communicate with a furnace body of the vacuum reaction chamber, and a vacuum meter is mounted on the furnace cover of the vacuum reaction chamber. The chemical vapor deposition device and method for the micro-tool diamond coatings are used for chemical vapor deposition of the micro-tool diamond coatings.

Description

technical field [0001] The invention belongs to the technical field of chemical vapor deposition preparation of diamond thin films, and in particular relates to a chemical vapor deposition device and method for diamond coating of micro-tools. Background technique [0002] In recent years, micro-products and related components have become more and more widely used in aerospace, medical, mechanical and biochemical equipment, which has led to the rapid development of micro-manufacturing technology worldwide, and at the same time put forward higher requirements for the quality of micro-fabrication. Studies have shown that improving the comprehensive cutting ability of micro-tool materials is an effective way to improve machining accuracy and cutting efficiency. [0003] Diamond is the hardest substance in nature. Because of its special properties such as high wear resistance, good thermal conductivity and excellent chemical stability, it has become an ideal material for abrasive...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/27
CPCC23C16/271
Inventor 白清顺白锦轩刘顺何欣余天凯杜云龙王永旭
Owner HARBIN INST OF TECH
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