Resistive pressure sensor and preparation method thereof

A resistive pressure and sensor technology, applied in the direction of sensors, instruments, measuring force, etc., can solve the problems of large volume, rough pulse detection results, inability to realize real-time monitoring and early warning, etc., and achieve the effect of wide sensing range

Active Publication Date: 2020-08-11
BEIJING GRAPHENE INST +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, the traditional pulse measuring instrument is large in size and has poor affinity with the human body, so it is not suitable for carrying measurement at any time, and cannot realize the functions of real-time monitoring and early warning
On the other hand, high sensitivity and the lower limit of detection pressure are very important for the precise detection of small pressure. The detection results of the existing wearable resistive pressure sensor devices are relatively rough and cannot distinguish the systolic and diastolic pulse peaks. details, it is impossible to achieve further blood pressure calculation, and it is also impossible to judge the health status of the human body

Method used

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  • Resistive pressure sensor and preparation method thereof
  • Resistive pressure sensor and preparation method thereof
  • Resistive pressure sensor and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Put a copper foil with a thickness of 25 μm and a clean surface in a casing with a magnetic control device, then place the casing in a tube furnace, and raise the temperature of the furnace body to 1000 ° C under a hydrogen atmosphere with a flow rate of 300 sccm. The pressure of the system is 350 Pa, keep it for 30 minutes; keep the temperature of the furnace body at 1000°C, feed the hydrogen gas with the flow rate of 200 sccm and the methane gas with the flow rate of 1 sccm, keep it for 1 hour; single-layer graphene film.

[0041] The graphene film grown on the back side of the copper foil substrate was etched with 90W air plasma on the back side of the copper foil substrate for 5 minutes, and only the graphene film on the front side of the copper foil substrate remained. Put the copper foil with the graphene side facing upwards, place the electrospinning anode nozzle 25 cm above the copper foil / graphene, and the raw material for spinning is dimethyl formamide of PAN ...

Embodiment 2

[0051] Place the copper foil with a thickness of 25 μm and a clean surface in a casing with a magnetic control device, then place the casing in a tube furnace, and raise the temperature of the furnace body to 1000 ° C under a hydrogen atmosphere with a flow rate of 100 sccm. The pressure of the system is 120Pa, keep it for 30 minutes; keep the temperature of the furnace body at 1020°C, feed in hydrogen gas with a flow rate of 100 sccm and methane gas with a flow rate of 5 sccm, keep it for 30 minutes; the temperature drops rapidly to room temperature, ends the growth of graphene, and forms copper A single-layer graphene film full of layers on the foil.

[0052]The graphene film grown on the back of the copper foil substrate was etched with 90W air plasma on the back of the copper foil substrate for 3 minutes, and only the graphene film on the front of the copper foil substrate remained. Copper foil has graphene face up, the anode nozzle of electrospinning is placed 25 centimet...

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Abstract

The invention provides a resistance type pressure sensor. The resistance type pressure sensor comprises a polydimethylsiloxane film / graphene film / high-molecular polymer fiber network / high-molecular polymer fiber network / graphene film / polydimethylsiloxane film structure, wherein the surface where a polydimethylsiloxane film makes contact with a graphene film is of a micro / nano structure. The resistance type pressure sensor is wide in sensing range, high in sensitivity and accuracy, stable in performance and durable.

Description

technical field [0001] The invention belongs to the technical field of resistive pressure sensors, and in particular relates to a resistive pressure sensor and a preparation method. Background technique [0002] With the development of the Internet of Things, big data has brought a lot of convenience to human production and life. In order to achieve real-time communication with big data, portable and wearable flexible devices have gradually become a hot frontier research field in recent years. The flexible pressure sensor can bend and twist with the human body, and can feel the surface movement of the human body to be compressed by force. These deformations will make the sensitive layer of the sensor convert the pressure data into electrical signals and feed them back to the electronic equipment in real time, so as to record and analyze the movement trajectory of the human body and health indicators. [0003] According to the sensing principle, pressure sensors can be roug...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/20A61B5/02
CPCA61B5/02A61B5/6801G01L1/20
Inventor 刘忠范魏迪任华英郑黎明
Owner BEIJING GRAPHENE INST
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