AlCrTiSiCN coating structure and preparing method thereof
A technology of coating and transition layer, which is applied in the direction of coating, metal material coating process, ion implantation plating, etc., can solve the problems of limiting the application of cutting tools, low hardness of TiN coating, and inability to meet cutting conditions, etc., to achieve high Hardness and strength, good wear resistance, high hardness and toughness effect
Active Publication Date: 2018-04-17
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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Problems solved by technology
Currently commonly used TiN coating has low hardness, poor wear resistance, especially poor thermal stability, which limits its application in cutting tools
By introducing alloying elements (such as Al, Zr, Cr, V, etc.) into the TiN coating, a new multi-component coating system (such as TiAlN) can be formed, which can increase the hardness of the coating, improve the wear resistance and thermal stability of the coating, However, the anti-oxidation temperature of the coating is only 800°C, which cannot meet the cutting temperature.
Therefore, some simple binary or ternary coatings have gradually failed to meet harsh cutting conditions
Method used
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[0023] The technical solutions of the present invention will be further described below in conjunction with specific embodiments.
[0024] First, the background vacuum of the vacuum chamber is evacuated to 4.0×10 -3 Pa, and preheated to 500°C, then apply -800V DC bias voltage, flow argon gas into the vacuum chamber with a flow rate of 150 sccm, and perform glow discharge cleaning on the surface of the substrate, keep the working pressure at 2.4Pa, and discharge cleaning for 10 minutes;
[0025] Then lower the argon flow rate to 70sccm, and the working pressure drops to 0.8Pa (because the too high pressure in the transition layer will cause the ions to sputter back, and the ions are not easy to deposit, 0.8pa is the best deposition pressure when depositing the transition layer) , turn on the power of AlCr target and AlTi target at the same time, the target composition Ti30Al70, Cr30Al70 (atomic ratio, that is, the Cr atoms in the AlCr target account for 30%, the Al atoms accoun...
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Abstract
The invention discloses an AlCrTiSiCN coating structure and a preparing method thereof. The AlCrTiSiCN coating structure comprises a base body, an Al-Cr-Ti alloy transition layer and an AlCrTiSiCN coating, the Al-Cr-Ti alloy transition layer and the base body are combined, the AlCrTiSiCN coating and the Al-Cr-Ti alloy transition layer are combined, and the AlCrTiSiCN coating forms a nano-compositestructure coating with amorphous phase Si3N4 wrapping nanocrystalline phases including AlN, TiN, CrN, Al8SiC7,Cr2N0.39C0.16 and the like. The nano-composite AlCrTiSiCN coating is stable in chemical properties and does not make contact with common chemical corrosive media. The nanocrystalline phases in the coating can effectively prevent generation and development of microcracks, and the coating toughness is greatly improved. The AlCrTiSiCN coating has the high hardness and toughness and is good in wear-resisting property. The AlCrTiSiCN coating is even in thickness and compact in structure, and the good bonding strength with the base body is achieved.
Description
technical field [0001] The invention belongs to the technical field of material surface engineering, and in particular relates to an AlCrTiSiCN coating structure and a preparation method thereof. Background technique [0002] With the increasing use of modern high-efficiency high-precision machining and difficult-to-machine materials, the requirements for high-temperature hardness, wear resistance, and thermochemical stability of tools have become increasingly stringent. Currently commonly used TiN coating has low hardness, poor wear resistance, especially poor thermal stability, which limits its application in cutting tools. By introducing alloying elements (such as Al, Zr, Cr, V, etc.) into the TiN coating, a new multi-component coating system (such as TiAlN) can be formed, which can increase the hardness of the coating, improve the wear resistance and thermal stability of the coating, However, the anti-oxidation temperature of the coating is only 800°C, which cannot meet...
Claims
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IPC IPC(8): C23C14/32C23C14/06C23C14/02
CPCC23C14/0021C23C14/022C23C14/025C23C14/0664C23C14/325
Inventor 王铁钢郭玉垚刘艳梅侯翔林伟戚厚军
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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