Method for preparing (Cu,Fe)3O4 spinel coating through magnetron sputtering method and application thereof

A technology of spinel coating and magnetron sputtering, which is applied in the direction of coating, sputtering coating, metal material coating process, etc., can solve the problems of difficult control of composition and thickness, slow film preparation rate and substrate bonding force. Poor and other problems, to achieve the effect of improving oxidation resistance and electrical conductivity, compact structure, and improving adhesion

Active Publication Date: 2018-08-24
NORTHEASTERN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to solve the above-mentioned technical problems, the present invention provides a kind of magnetron sputtering method preparation (Cu, Fe) 3 o 4 Methods and applications of spinel coatings, addressing (Cu,Fe) 3 o 4 In the preparation of spinel coating, the preparation rate of the film layer is slow, there are many pores, the bonding force with the substrate is poor, and the composition and thickness are not easy to control, etc.

Method used

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  • Method for preparing (Cu,Fe)3O4 spinel coating through magnetron sputtering method and application thereof
  • Method for preparing (Cu,Fe)3O4 spinel coating through magnetron sputtering method and application thereof

Examples

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Embodiment 1

[0026] Example 1: This example uses SUS 430 stainless steel as the matrix (Cr: 16mass%)

[0027] (1) Pretreatment: Use 240#, 400#, 600# SiC water scrubbing paper to grind the surface of the SUS430 stainless steel substrate, and perform edge grinding and chamfering; the substrate is sandblasted after sandblasting, and the pressure range of compressed air during sandblasting is 0.5MPa, the sand used is silica; after the substrate is sandblasted, ultrasonically cleaned with acetone for 15min; the cleaned sample is pre-oxidized in the air at 800℃ for 100h to form Cr with a thickness of about 2μm on the stainless steel surface 2 O 3 And (Mn,Cr) 3 O 4 Oxide layer

[0028] (2) Sputtering deposition to obtain alloy coating: a Cu-Fe alloy target (33% Cu content, 67% Fe content) as the cathode, the substrate as the anode, sputtering current 3.0A, sputtering pressure 0.15Pa, sputtering The injection temperature is 200℃, the sputtering time is 2h, and the Cu-Fe alloy coating with a thickness o...

Embodiment 2

[0032] Example 2 This example uses crofer22APU stainless steel as the substrate (Cr: 22mass%) (1) Pretreatment: Use 240#, 400#, 600# SiC water abrasive paper to polish the surface of crofer22APU stainless steel substrate, and perform edge grinding and chamfering treatment ; Sandblasting is carried out after the substrate is polished, the compressed air pressure range during sandblasting is 0.3MPa, and the sand used is silica; after the substrate is sandblasted, ultrasonically cleaned with acetone for 10 minutes; the cleaned sample is placed in the air at 650℃ Pre-oxidation for 150h to form Cr with a thickness of about 2.5μm on the surface of stainless steel 2 O 3 And (Mn,Cr) 3 O 4 Oxide layer

[0033] (2) Sputtering deposition to obtain alloy coating: a Cu-Fe alloy target (30% Cu content, 70% Fe content) as the cathode, the substrate as the anode, sputtering current 3.0A, sputtering pressure 0.10Pa, sputtering The injection temperature is 200℃, the sputtering time is 0.5h, and th...

Embodiment 3

[0035] Example 3 This example uses AISI 430 stainless steel as the matrix (Cr:18mass%)

[0036] (1) Pretreatment: Use 240#, 400#, 600# SiC water scrubbing paper to polish the surface of AISI430 stainless steel substrate in turn, and perform edge grinding and chamfering treatment; after polishing the substrate, perform sandblasting. The pressure range of compressed air during sandblasting is 0.4MPa, the sand used is silica; after the substrate is sandblasted, ultrasonically cleaned with acetone for 13min; the cleaned sample is pre-oxidized in the air at 750℃ for 200h to form Cr with a thickness of about 3μm on the stainless steel surface 2 O 3 And (Mn,Cr) 3 O 4 Oxide layer

[0037] (2) Sputtering deposition to obtain alloy coating: Cu-Fe alloy target (Cu content 40%, Fe content 60%) is used as the cathode, the substrate is used as the anode, the sputtering current is 3.0A, the sputtering pressure is 0.13Pa, and the sputtering The injection temperature is 200℃, the sputtering time is...

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Abstract

The invention relates to the field of preparation of (Cu,Fe)3O4 spinel coatings, in particular to a method for preparing a (Cu,Fe)3O4 spinel coating through a magnetron sputtering method and an application thereof. The method includes the following specific preparation steps that (1) pretreatment and pre-oxidation treatment are carried out; (2) sputtering deposition is carried out to obtain an alloy coating; and (3) thermal inversion is carried out to obtain the spinel coating. The method has the characteristics that the operation process is simple and the deposition speed is high, and the prepared spinel coating is compact, has good binding force with a substrate, has excellent long-time resistance to high temperature oxidation and conductivity, and can effectively suppress external diffusion of substrate Cr.

Description

Technical field [0001] The present invention relates to (Cu, Fe) 3 O 4 The field of preparation of spinel coatings, specifically related to a magnetron sputtering method (Cu, Fe) 3 O 4 Spinel coating method and its application. Background technique [0002] At present, the metal connectors used in the medium temperature (600-800°C) solid oxide fuel cell (SOFC) mainly include: Cr-based alloys, Ni-based alloys and Cr-containing ferritic stainless steels. Because ferritic stainless steel has the advantages of high temperature oxidation resistance, low price, high electrical conductivity and excellent thermal conductivity, and the thermal expansion coefficient is matched with other components, ferritic stainless steel has become the most promising connector material. However, ferritic stainless steel has serious oxidation and corrosion in the working environment of SOFC, especially in the high-temperature oxidizing environment of the cathode, and there is a problem of poisoning the S...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/16C23C14/35C23C14/58C23C14/02H01M8/10
CPCC23C14/02C23C14/165C23C14/35C23C14/5853H01M8/10H01M2008/1293Y02E60/50
Inventor 耿树江潘玥
Owner NORTHEASTERN UNIV
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