31 results about "Electron scanning microscopy" patented technology

The invention discloses a method for determining contribution of pores with different apertures in a shale reservoir stratum to porosity, and belongs to the technical field of petroleum, geology and mining exploration and development. The method comprises the following steps: selecting three groups of parallel samples from shale reservoir stratum samples at the same depth; carrying out a low-temperature nitrogen adsorption-desorption experiment on the first group of samples to determine contribution of the pores with aperture ranging from 0.4-100 nm to the porosity; carrying out argon ion polishing and electron scanning microscope examination on the second group of samples to determine the contribution of the pores with aperture ranging from 50 nm to 3 microns to the porosity; carrying out mercury intrusion analysis on the third group of samples to determine the contribution of the pores with aperture greater than 1000 nm to the porosity; synthesizing the analytic data of the three groups of parallel samples, and obtaining the determination results of contribution of the pores with different apertures in the shale reservoir stratum to the porosity. The method can determine the contribution of the pores with different apertures in the shale reservoir stratum to the porosity, and overcomes the defect of the conventional gas adsorption method and the mercury intrusion method for determining the contribution of the pores with different apertures in the shale reservoir stratum to the porosity.

A non-woven fabric having such a structure that fine fibers having a small fineness are entangled with one another and a sheet obtained by impregnating the non-woven fabric with an elastic polymer satisfy the following requirements:the fine fibers should be obtained by splitting a strippable and splittable composite short fiber comprising at least two components; the fine fibers should have a monofilament size of 0.01 to 0.5 denier; the fine fibers should form a fine non-woven fabric structure that they are entangled with one another at random; the apparent density should be 0.18 to 0.45 g/cm3; the average area of spaces between fibers in the cross section of the non-woven fabric measured by the image analysis of an electron scanning microscope should be 70 to 250 mum2; and the non-woven fabric should have such a uniform structure that the standard deviation of the area of a space between fibers in the cross section of the non-woven fabric measured by the image analysis of the electron scanning microscope is 200 to 600 mum2.The non-woven fabric and sheet are advantageously used as a substrate for artificial leather.

The invention discloses a steel material microstructure automatic identification method based on deep learning. The method comprises the following steps: 1, determining the microstructure type and microstructure magnification times of to-be-identified steel, collecting historical steel material microstructure pictures with the same specification and size obtained by an electronic scanning microscope under the magnification times to obtain a data set, and determining a category label for each picture in the data set; 2, performing the same preprocessing on all the pictures collected in the step1; 3, constructing a convolutional neural network CNN-ICAM model; 4, presetting the number of iterations, using cross entropy as a loss function, and training a neural network CNN-ICAM model by usinga stochastic gradient descent method; and 5, preprocessing a steel material microstructure picture to be recognized according to the method in the step 2, and then automatically recognizing the steelmaterial microstructure picture by using the convolutional neural network model trained in the step 4. The method not only can improve the identification precision, but also can improve the recognition speed.

The present invention relates to a wafer defect searching method. The wafer defect searching method comprises the following steps: a detection machine detects defect information of a wafer and transmits the defect information to an electronic scanning microscope; and the electronic scanning microscope photographs the wafer according to the defect information. The invention can quickly and accurately detect defects on the upper, lower and side surfaces of the wafer by using the detection machine, determine the defect information of the detected wafer, and transmit the defect information to theelectronic scanning microscope; and the electronic scanning microscope can quickly and accurately find the position of the defect on the wafer according to the defect information, and automatically take a photo of the defect on the wafer. The invention solves the problem that the manual photographing speed of the wafer is slow and the position of the defect is inaccurate, can improve the production efficiency, can provide a powerful help for finding the cause of the defects on the wafer, and has great significance for improving the yield of the products.

The invention relates to a method for determining lens errors in a Scanning Electron Microscope, more specifically to a sample that enables such lens errors to be determined. The invention describes, for example, the use of cubic MgO crystals which are relatively easy to produce as so-called 'self-assembling' crystals on a silicon wafer. Such crystals have almost ideal angles and edges. Even in the presence of lens errors this may give a clear impression of the situation if no lens errors are present. This enables a good reconstruction to be made of the cross-section of the beam in different under- and over-focus planes. The lens errors can then be determined on the basis of this reconstruction, whereupon they can be corrected by means of a corrector.

The invention discloses a method for automatically detecting the edge of a silicon chip. The method comprises: step one, an automatic defect detector scans the silicon chip and stores a scanning result to form a file with a KLARF format; step two, a virtual crystal element is added to the KLARF file stored in the step one; the virtual crystal element integrally covers the edge of the whole silicon chip; step three, a coordinate of a detection point of the edge of the silicon chip is calculated in a coordinate system adopted by the KLARF file; step four, the coordinate of the detection point calculated in the step three is used as virtual defect and is added to the KLARF file edited in the step two; and step five, an electron scanning microscope is used to carry out automatic detection on the virtual defect of the KLARF file edited in the step four. Through functional integration of data analytic software and a detection machine, the method realizes automatic detection on the position of the edge of the silicon chip, saves manpower and material resource, improves efficiency and strengthens data accuracy and analyzability.

The invention discloses a measurement method of striation-shaped morphology characterization parameters, which is used for quantitatively measuring the severity of striation-shaped morphology etched by deep holes. The method comprises the following steps: obtaining a hole section image output by an electronic scanner microscope, and identifying a centre point coordinate of a hole in the hole section image; obtaining the length values of n diameters at the centre point coordinate, and ensuring that n is an integer greater than 1; computing the variance of the length values of the n diameters, and taking the variance as a striation-shaped morphology characterization parameter of the hole. The invention further discloses a measurement device of striation-shaped morphology characterization parameters.

The invention discloses a detection method for an electric connection defect of a chip. The method comprises that a substrate is removed to expose the end portion of a conductive channel in the lowermost layer connected to an active region on a substrate; a first mode of an electron scanning microscope is used to obtain morphology images of multiple layers of conductive channels from the lowermostone; a second mode of the electron scanning microscope is used to obtain morphology images of interconnection lines of the layers from the lowermost layer; in the morphology images of multiple layersof conductive channels, defect positioning information of the interconnection line in the subsequent layer is obtained according to the contrast of the end portions of the different conductive channels; and in the morphology images of the interconnection lines of the layers, a defect position is discovered according to the defect positioning information. The work voltage of the first mode is lower than that of the second mode. The method can be used to locate the defect position rapidly.

In the case of monitoring a resolution of a scanning electron microscope, it is required to prepare a sample and to use a measuring algorithm so as to reduce the pattern dependency of an index value of resolution to be measured in order to measure a variation in the size of an electron beam with a high degree of accuracy. According to the present invention, there is used a sample having a sectional shape which is appropriate for monitoring the resolution, that is, the sample has a pattern with such a sectional shape that a side wall of the pattern is inclined so as to prevent an electron beam irradiated on the sample from impinging upon the side wall of the pattern. With this configuration, it is possible carry out such resolution monitor that does not depend upon a sectional shape of a pattern.

The invention discloses a preparation method of nanometer alpha-Fe2O3, and belongs to the technical field of chemical industry. The method is characterized in that an active substance is added to 50g of a Fe(NO3)3 solution with the concentration of 10%, and is mixed and dissolved, an alkaline solution is added, the obtained mixture is heated and refluxed, and the obtained material undergoes liquid-solid separation to obtain the nanometer alpha-Fe2O3. The method concretely comprises the following steps: adding a certain amount of the active substance to 50g of the Fe(NO3)3 solution with the concentration of 10%, fully mixing and dissolving the active substance in the Fe(NO3)3 solution, adding the alkaline solution with a certain concentration to adjust the pH value to a value in a certain range, carrying out heating boiling refluxing for a certain time, and carrying out liquid-solid separation at a certain temperature for a certain time to obtain the nanometer alpha-Fe2O3. The average particle size of the obtained alpha-Fe2O3 is 2-5nm; and an electron scanning microscopy result shows that the alpha-Fe2O3 prepared through the method has suitable grain size and uniform distribution.

The invention relates to a method for detecting diameter-to-thickness ratio of flake alumina particles, which is characterized by orderly comprising steps during the detection process: (1) flake alumina is added into absolute ethyl alcohol, is dispersed and treated in ultrasonic waves through a ultrasonic cell disruptor; (2) a liquid is dropped onto an electron microscopy sample table after being treated through the ultrasonic waves, and is dried to do ion sputtering gold-plated operation by adopting an ion sputtering device; and (3) an electronic microscope photograph is obtained by adopting an electron scanning microscope, the particle size and the thickness of flake alumina particles is tested, and the diameter-to-thickness ratio of the flake alumina particles is counted. The flake alumina particles are put into the absolute ethyl alcohol, are fully suspended and dispersed, and are distributed on different angles, and vertical and transverse particles can be conveniently found during the measuring process to test thickness. The method for detecting the diameter-to-thickness ratio of the flake alumina particles is steady in testing result, excellent in repeatability and easy to master an operation method.

In a scanning electron microscope, an atmospheric pressure space having a specimen arranged therein and a vacuum space arranged on a charged particle optical system side are isolated from each other using an isolation film that transmits charged particle beams. The scanning electron microscope has an electron optical lens barrel, a chassis, and an isolation film. The electron optical lens barrel radiates a primary electron beam onto a specimen. The chassis is directly bonded to the inside of the electron optical lens barrel and has an inside that turns into a lower vacuum state than the inside of the electron optical lens barrel at least during the radiation of the primary electron beam. The isolation film isolates a space in an atmospheric pressure atmosphere having a specimen mounted therein and the inside of the chassis in a lower vacuum state, and transmits the primary charged particle beam.

The invention discloses a method for researching sand soil solidification effects by carbonic anhydrase mineralization bacteria. The method includes the steps: firstly, solidification sample preparation; secondly, direct shear experiment; thirdly, calcium carbonate content measurement; fourthly, X-ray diffraction experiment sample preparation; fifthly, electron scanning microscope experiment sample preparation. According to the method, the solidification effects of different grouting modes are explored, sand soil solidification experiments of factors such as calcium source kinds, solidification environment temperature, consolidating fluid concentration and particle diameter are implemented, the solidification effects are compared, and the modes, the concentration and the like with optimalsolidification effects are preferentially selected. The solidification effects of a solidification sample are represented by comparing and analyzing shearing strength and calcium carbonate depositionof the solidification sample under different conditions, a crystal form of calcium carbonate is acquired by an X-ray diffraction instrument, and a microscopic image of the solidification sample is observed by a scanning electron microscope.

The invention discloses an experimental simulation method of a pre-op site selection of coronary artery bypass graft anastomosis, comprising the following steps of: preparing the anastomotic models of different formations; cultivating human vessel histocyte obtained by separation in DMEM containing 10% fetal calf serum (GIBCO) in the atmosphere of 5% CO2 at 37 DEG C till fusing, then digesting toprepare cell suspension, cultivating the cells on a glass slide, placing the glass slide in a six-orifice plate for standing cultivation for 6 h for later use; fixing the glass slide carried with thecultivated vessel histocyte in an anastomotic opening area of the anastomotic model; connecting the whole anastomotic model to a closed-circuit perfusion system which is driven by a peristaltic pump,simulating blood flow of human body to perform dynamic loading experiment, taking out the cell glass slide to image with a fluorescence microscope, and scanning with an electron scanning microscope.

The invention belongs to the technical field of sample preparation, and discloses a sample preparation method for electron microscope scanning. The method comprises the following steps: taking out a sample from glutaraldehyde stationary liquid, and cleaning the sample for three times with a PBS buffer solution for 20 min each time; fixing the sample by uising 1% citric acid for 1 h, cleaning the sample for three times with the PBS with pH of 7 .4 for 15 min each time; performing dehydration by using low concentration gradient ethanol, and performing the dehydration by using 30% ethanol and 50%ethanol for 15 min respectively; and performing dehydration by using high concentration gradient ethanol. According to the sample preparation method disclosed by the invention, by exploring and improving the sample preparation technology of the electron scanning microscope (SEM), electron microscope samples of various developmental stages of mosquitoes are not only successfully prepared, electronmicroscope photographing and re-description are comprehensively performed on ultrafine structures of the anopheles sinensis at various developmental stages, thereby not only providing a more comprehensive technique for the preparation of the insect electron microscope samples, but also providing more detailed morphological characteristic data for the taxonomic analysis of the anopheles sinensis.

A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units for transforming coordinates in the horizontal (X) direction and the vertical (V) direction. An area to be tested in a sample is scanned with an electron beam in an arbitrary direction. As the first and second transforming units, small-capacity transformation tables (LUTs) capable of operating at high speed in each of the horizontal (X) direction and the vertical (Y) direction are used. By also using a large-capacity transformation table (LUT) that stores coordinate transformation data corresponding to plural scan types, a test apparatus compatible with the plural scan types, having multiple functions, and capable of performing high-speed scan control is realized.

The application discloses a hole spacing measuring method of hole etching morphology, and is used for automatically measuring the hole spacing of the hole etching morphology. The method includes: obtaining a hole profile image output by an electronic scanning microscope and recognizing a central point coordinate of a first hole and a central point coordinate of a second hole in the hole profile image, and the first hole and the second hole are located in different horizontal rows and adjacent in the hole profile image; calculating an absolute value of a difference between the central point coordinate of the first hole and the central point coordinate of the second hole in the direction of a longitudinal coordinate axis, and regarding the absolute value as a first distance; and determiningthe first distance as the hole spacing between the first hole and the second hole. The application also discloses a hole spacing measuring apparatus of the hole etching morphology.

The invention discloses a monitoring method of an environmental magnetic shield of an electronic scanning microscope, and the monitoring method comprises the following steps that a line drawing of a silicon wafer to be measured is selected; a plurality of measuring points are selected on one side of the line drawing, measuring data of the measuring points are collected, and measuring data of relative points of the measuring points are collected on the other side of the line drawing; first difference values among the measuring data of corresponding points on the two sides of the line drawing are calculated; the maximum difference value and the minimum difference value among the first difference values are obtained, and a second difference value between the maximum difference value and the minimum difference value is calculated and is used as a measuring result; the measuring result is recorded in an environmental magnetic shield influence control chart; and according to the measuring result recorded in the environmental magnetic shield influence control chart every time, a dynamic monitoring chart of the influence of the environmental magnetic shield is obtained. The invention provides the method for monitoring the environmental magnetic shield of the electronic scanning microscope by utilizing the line width and the line width roughness of the measured drawing.

The invention relates to a pinctada martensii dunker antibody vital injection experimental method which comprises the following steps of: placing a pinctada martensii dunker into artificial seawater to be bred and retaining a healthy individual; preparing a soluble substrate protein antibody which is relevant to mineralization and purifying the antibody; injecting the purified antibody into a body of the injection group healthy individual according to the proportion and equivalently injecting nonimmune rabbit serum to a contrast group; separating, washing and soaking a shell of the injected healthy individual into a NaOH solution for eight minutes, washing and drying in the air; cutting off an area at the periphery of an injection point of the dried shell, sticking the area on a metal sheet and spraying metal powder on the surface of the shell; then placing the shell under an electronic scanning microscope, observing the abnormal growing condition of an innermost nacreous layer, confirming the influence of the antibody on the process of mineralization and further positioning the function of substrate protein in the process of the mineralization. The invention provides a research way for researching the mineralization of biological shellfish and an in-vivo factor and signal passage in vivo and provides a new idea for the research of a mineralization model.