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Laser direct writing pre-forming photocatalysis plating preparing method for material surface metal pattern

A laser direct writing, surface metal technology, applied in liquid chemical plating, metal material coating process, coating and other directions, can solve the problems of difficult pattern precision control, reduced general applicability, reduced energy utilization rate, etc. The effect of high speed, improved general applicability and practicality, and reduced equipment costs

Active Publication Date: 2018-08-24
UNIV OF SCI & TECH BEIJING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are also some problems in the above-mentioned process of laser positive light / backlight catalytic direct writing metal plating pattern, such as: ① laser as a catalytic light source needs to pass through the plating solution or matrix material to participate in the reaction, and the absorption of the laser by the plating solution or matrix material will be It causes a certain energy loss and reduces the energy utilization rate. At the same time, the laser impact on the surface of the material is easy to cause ablation, difficulty in controlling the pattern accuracy, poor coating uniformity, and reduced bonding strength; It is difficult to make full use of its advantages of high energy density when preparing with a laser with relatively small energy; ③ In the process of forming high-precision patterns, the requirements for the uniformity of the plating solution, the substrate material, and the stability of the laser light source are relatively high, and at the same time, the laser As a catalytic light source, short-wave light or extremely short-wave light is generally required to meet the energy requirements of catalysis, which reduces the general applicability of this method.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Input the shape and size data of the designed circuit pattern into the control computer of the pulsed laser direct writing system with a wavelength of 355nm, set the laser frequency to 75KHz, the power to 4.375W, the laser scanning path to scan point by point from left to right, and the scanning speed to 220mm / s, the number of scans is 1, the laser direct writing etching area is the part outside the designed circuit pattern on the surface of the alumina substrate, and the etching depth is 20 μm; the alumina substrate with a thickness of 150nm nano-titanium dioxide film deposited on the surface is placed on the laser direct writing On the Cartesian coordinate working platform of the system, the surface of the nano-titanium dioxide film faces the laser light source, and the etching area is positioned and focused; the laser direct writing program is started, and the nano-titanium dioxide film in the etching area is directly written and etched on the alumina substrate. The ...

Embodiment 2

[0035] Input the shape and size data of the designed nine-fold concentric ring pattern into the control computer of the pulsed laser direct writing system with a wavelength of 1030nm, set the laser frequency to 50KHz, the power to 5.7W, and the laser scanning path to scan point by point from right to left. The speed is 180mm / s, the number of scans is 1, the laser direct writing etching area is the part outside the designed nine-fold concentric ring pattern on the surface of the polyimide flexible substrate, and the etching depth is 10 μm; the surface is deposited with nitrogen with a thickness of 100nm The polyimide flexible substrate doped with nano-titanium dioxide film is placed on the polar coordinate working platform of the laser direct writing system, so that the surface of the nitrogen-doped nano-titanium dioxide film faces the laser light source, and the etching area is positioned and focused; Write a program to perform direct writing etching on the nitrogen-doped nano-...

Embodiment 3

[0037] Input the shape and size data of the designed dragon pattern into the control computer of the three-dimensional pulsed laser direct writing system with a wavelength of 905nm, set the laser frequency to 100KHz, the power to 7.3W, and the laser scanning path from left to right and from bottom to top. Point and layer-by-layer scanning, the scanning speed is 1000mm / s, and the number of scanning is 1 time. The laser direct writing etching area is the part outside the designed dragon-shaped pattern on the surface of the arched aluminum substrate, and the etching depth is 200nm; the surface is deposited with a thickness of The arched aluminum substrate of the 200nm nano-zinc oxide film is placed on the right-angle standard working platform of the laser direct writing system, so that the surface of the nano-zinc oxide film faces the laser light source, and the etching area is positioned and focused; the laser direct writing program is started, The nano-zinc oxide film in the etc...

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Abstract

The invention discloses a laser direct writing pre-forming photocatalysis plating preparing method for a material surface metal pattern, and belongs to the technical field of material surface treatment. The laser direct writing technology and the photocatalysis plating technology are combined, and on the basis of a laser direct writing etched pre-formed high-precision nano semiconductor film pattern, photocatalysis plating is conducted for preparing the high-quality metal pattern. The laser direct writing pre-forming photocatalysis plating preparing method for the material surface metal pattern is environment-friendly, short in process, capable of saving metal, efficient and low in cost and has universality and high stability; and the prepared metal pattern is high in size precision, goodin clad layer surface quality and excellent in performance, and the bonding strength between the prepared metal pattern and a base body is high.

Description

technical field [0001] The invention relates to the technical field of material surface treatment, and in particular provides a preparation method of laser direct writing preformed photocatalytic plating of metal patterns on the material surface. Background technique [0002] Surface metallized materials (such as printed circuit boards, surface metallized semiconductor chips, end-face metallized vacuum tubes, solar cells, metallized film capacitors, etc.) have excellent comprehensive properties such as electrical conductivity, solderability, insulation, and thermal conductivity. , intelligent transportation, healthcare, aerospace, energy and electricity and daily life and other fields have been widely used. In the actual production of surface metallized materials, it is not only necessary to cover the surface of the base material with a metallized layer, but also to process the metallized layer to prepare metal patterns (such as metal circuits, grid electrodes, etc.). There...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C18/18C23C18/32C23C18/38C23C18/42
CPCC23C18/1612C23C18/182C23C18/1868C23C18/32C23C18/38C23C18/42
Inventor 刘雪峰刘敏
Owner UNIV OF SCI & TECH BEIJING
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