Combined pump with simple structure and easy installation

A simple structure combined pump technology, applied in the field of combined pumps, can solve the problems of complex processing, large volume, and limited loading capacity of getter pumps, and achieve the effects of reduced leakage rate, compact structure, and easy installation

Active Publication Date: 2019-11-19
NANJING HUADONG ELECTRONICS VACUUM MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although it solves the above-mentioned problems that the getter pump cannot be heated and regenerated, the volume is large, the processing is complicated, and the maintenance is lacking, but due to its special structure, it is difficult to make the length of the getter pump longer due to the limitation of the size and weight of the magnet. , which means that the loading of the getter pump is limited by
And limited by the size of the anode chamber, it is also difficult to increase the loading capacity of the getter pump by enlarging the cross-sectional area of ​​the getter pump in an anode chamber

Method used

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  • Combined pump with simple structure and easy installation
  • Combined pump with simple structure and easy installation

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] figure 1 It is a schematic diagram of Embodiment 1 of the present invention. After uniformly mixing 40% by weight of zirconium powder and 60% by weight of zirconium-vanadium-iron alloy powder, press it into a disc with an inner diameter of 6 mm, an outer diameter of 25 mm, and a height of 1.5 mm. These discs are sintered firmly in a vacuum furnace to obtain a porous getter material (4 in the figure). These getter materials are fixed on a heating element consisting of a metal tube (3 in the picture) and a tungsten wire with a diameter of 0.4mm (5 in the picture) coated with an insulating layer through a metal gasket (2 in the picture). , and fix it on a "ji"-shaped base (6 in the picture) made of pure titanium plate with a thickness of 1mm through nuts (1 in the picture). Weld a 316L stainless steel sheet with a thickness of 0.25mm into a single-chamber anode cylinder with a diameter of 25mm and a height of 20mm (7 in the figure), and put it into the cavity at the lowe...

Embodiment 2

[0036] figure 2 It is a schematic diagram of Embodiment 2 of the present invention. This example is a combined pump with greater pumping speed, which is composed of 5 sets of combined pumps similar to Example 1. The difference from Example 1 is that the base for fixing the getter pump is slightly complicated and there is no Example 1 Titanium rod for enhanced sputtering action.

[0037] Similarly, this combination pump can be installed on the electrode flange first and then connected to the vacuum chamber, or it can be installed inside the vacuum chamber for use. Similarly, to make the combination pump work normally, it is necessary to connect and fix the anode cylinder to the anode of the high-voltage power supply, and connect the tungsten wire in the heating element to the DC or AC power supply, and at the same time, it needs to be parallel to each other on the "several"-shaped base. A set of mutually attracting magnets is installed on a flat surface.

Embodiment 3

[0039] A combination pump with simple structure and easy installation, which is composed of ion pump and getter pump, including metal gasket or ceramic gasket 2, metal tube or ceramic tube 3, multi-piece porous getter material 4, heating wire 5 , a base 6, an anode cylinder 7 and a group of magnets, the base 6 is used as the cathode of the sputtering ion pump; wherein, the multi-sheet porous getter material 4 is separated by a metal gasket 2 and fixed on a metal tube 3 and a tungsten wire 5. On the heating element, the heating element is fixed on the base 6 through the nut 1, and the porous getter material 4 and the heating element form a getter pump; the anode cylinder 7 is arranged in the cavity at the bottom of the base 6, and a group of magnets are installed on the base respectively. Attract each other on parallel planes.

[0040] The porous getter material 4 is made of one or more of titanium, zirconium, hafnium, tantalum, yttrium, niobium, molybdenum, vanadium, manganese...

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Abstract

The invention relates to a combination pump simple in structure and convenient to install. The combination pump comprises an anode cylinder formed by one or more anode chambers and used for being connected with high voltage, one or more bases used for fixing a getter pump, and the getter pump composed of one or more multi-hole suction materials. The combination pump is characterized in that the bases for fixing the getter pump can also serve as cathodes of a sputter ion pump. The combination pump has the beneficial effects that the bases serve as the cathodes, the size of the combination pumpcan be reduced remarkably, the combination pump can be installed on a standard electrode flange conveniently, and manufacturing, installing and maintaining of the combination pump are facilitated; byincreasing the size of the getter pump in the length direction or increasing the area of the cross section of the getter pump, the loading amount of the getter pump can be adjusted; and installing iseasy, the leak and outgassing rate of a vacuum system can be reduced to the greatest extent, and the combination pump can be connected to a vacuum cavity through one connector at most.

Description

technical field [0001] The invention is a combined pump with simple structure and easy installation, and belongs to the technical field of obtaining ultra-high vacuum pumps. Background technique [0002] Nowadays, many scientific research instruments or systems, such as electron microscopes, need to work normally under ultra-high vacuum conditions. In order to achieve ultra-high vacuum, 2-4 pumps need to be used in series and in parallel. A common way is to use a rotary vane pump or a scroll dry pump as a backing pump to obtain 10Pa to 10Pa -1 Foreline vacuum of Pa, then select one or more series or parallel connection from turbomolecular pump, getter pump, sputtering ion pump, titanium sublimation pump, cryogenic condensate pump and use it as a secondary pump. The specific choice depends on the cleanliness of the system, gas type, gas load, vacuum time, final ultimate pressure and other requirements. Commonly used secondary pump performance has its own advantages and dis...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B35/04F04B39/00F04B39/12F04B39/14F04B41/06
CPCF04B35/04F04B39/00F04B39/123F04B39/14F04B41/06
Inventor 郭卫斌薛函迎柴云川王浏杰
Owner NANJING HUADONG ELECTRONICS VACUUM MATERIAL
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