Medical titanium alloy surface composite film as well as preparation method and application thereof

A surface composite and titanium alloy technology, which is applied in the fields of pharmaceutical formula, medical science, metal material coating technology, etc., can solve the problems of interlayer cracking and weak bonding, etc., and achieve the effect of interlayer bonding.

Active Publication Date: 2018-12-07
大连圣多教育咨询有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the internal stress of the titanium alloy and the DLC film, the co

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0028] Example 1

[0029] 1) The titanium alloy substrate is cleaned with deionized water and then dried and placed in a vacuum chamber, and the vacuum degree of the vacuum chamber reaches 5×10 -3 After Pa, argon gas is introduced, the negative bias voltage is 5600V, the temperature is 450℃, and Ar is used. + Bombardment to clean the surface of the substrate.

[0030] 2) Deposition of TiN transition layer: vacuum degree is 5×10 -3 Pa, at a temperature of 300℃, flow 25mL / min of nitrogen into the vacuum chamber, then flow 100mL / min of argon, negative bias voltage of 150V, vacuum chamber pressure of 0.5Pa; pure titanium target material , The target power is 3kW, the substrate temperature is 220℃, the ion source power is 3kW, and the deposition time is 5min;

[0031] 3) Deposit Ti 3 N 4 Transition layer: adjust the flow rate of nitrogen gas to the vacuum chamber to 1.33 times the flow rate used in step 2), and other conditions remain unchanged;

[0032] 4) Depositing the DLC surface layer...

Example Embodiment

[0035] Example 2

[0036] 1) The titanium alloy substrate is cleaned with deionized water and then dried and placed in a vacuum chamber, so that the vacuum degree of the vacuum chamber reaches 5×10 -3 After Pa, argon gas is introduced, the negative bias voltage is 5600V, the temperature is 450℃, and Ar is used. + Bombardment to clean the surface of the substrate.

[0037] 2) Deposition of TiN transition layer: vacuum degree is 5×10 -3 Pa, at a temperature of 300°C, flow 35mL / min of nitrogen into the vacuum chamber, then flow of 80mL / min of argon, negative bias voltage of 160V, vacuum chamber pressure of 0.5Pa; using pure titanium target material , The target power is 2kW, the substrate temperature is 250℃, the ion source power is 3kW, and the deposition time is 15min;

[0038] 3) Deposit Ti 3 N 4 Transition layer: adjust the flow rate of nitrogen to the vacuum chamber to 1.33 times the flow rate used in step 2), and other conditions remain unchanged;

[0039] 4) Depositing the DLC sur...

Example Embodiment

[0042] Example 3

[0043] 1) The titanium alloy substrate is cleaned with deionized water and then dried and placed in a vacuum chamber, so that the vacuum degree of the vacuum chamber reaches 5×10 -3 After Pa, argon gas is introduced, the negative bias voltage is 5600V, the temperature is 450℃, and Ar is used. + Bombardment to clean the surface of the substrate.

[0044] 2) Deposition of TiN transition layer: vacuum degree is 5×10 -3 Pa, at a temperature of 300℃, flow 50mL / min of nitrogen into the vacuum chamber, and then flow of 60mL / min of argon. The negative bias is 200V and the pressure in the vacuum chamber is 1.0Pa; pure titanium target material is used , The target power is 2kW, the substrate temperature is 300℃, the ion source power is 3kW, and the deposition time is 30min;

[0045] 3) Deposit Ti 3 N 4 Transition layer: adjust the flow rate of nitrogen to the vacuum chamber to 1.33 times the flow rate used in step 2), and other conditions remain unchanged;

[0046] 4) Deposit...

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Abstract

The invention relates to a medical titanium alloy surface composite film as well as a preparation method and an application thereof, and belongs to the field of novel materials. The composite film onthe medical titanium alloy surface is sequentially composed of a TiN transition layer, a Ti3N4 transition layer and a DLC surface layer. The composite film structure is characterized in that a two-layer transition film layer is arranged between a medical titanium alloy matrix and a DLC thin film surface layer, wherein the TiN has a NaCl type crystal structure in the TiN transition layer and belongs to a face-centered cubic lattice; the Ti3N4 is provided with a rutile crystal structure in the Ti3N4 transition layer; due to the similarity of coordination types of atoms between the layers and thelayers, a composite film layer which is firmly combined with the interlayer is obtained, and the obtained composite film is not cracked after being used for a long time.

Description

technical field [0001] The invention relates to a medical titanium alloy surface composite film and a preparation method and application thereof, belonging to the field of new materials. Background technique [0002] Titanium alloy has the characteristics of high strength and low density, good mechanical properties, good toughness and corrosion resistance, and good biocompatibility. Iron alloy has high specific strength and mechanical properties close to human bone. Therefore, it is widely used in the manufacture of implants. Medical devices, prostheses or artificial organs that enter the human body. However, the friction coefficient of titanium alloy is large. In the complex physiological environment of the human body, due to its poor wear resistance, it seriously affects its use effect and life. In order to solve the problem of wear resistance of titanium alloys, a commonly used method is to coat the surface with a film with strong wear resistance, including diamond-like ...

Claims

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Application Information

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IPC IPC(8): C23C28/04C23C14/06C23C16/26A61L31/02A61L31/08A61L31/14
CPCA61L31/028A61L31/084A61L31/088A61L31/14A61L2400/18A61L2420/02A61L2420/08C23C14/0021C23C14/0641C23C16/26C23C28/046
Inventor 不公告发明人
Owner 大连圣多教育咨询有限公司
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