Ultra-fast laser micro-nano processing device with online monitoring function

A technology of micro-nano processing and ultra-fast laser, which is applied in the direction of metal processing equipment, laser welding equipment, welding equipment, etc. The size is difficult to observe in real time, etc., to achieve the effect of improving the spectral detection speed, increasing the wavelength selectivity, and improving the sensitivity and signal-to-noise ratio

Active Publication Date: 2018-12-11
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Although ultrafast laser direct writing technology has better performance than other traditional micro-nano processing technologies, it still has shortcomings in terms of cross-scale, available materials, high-precision processing, etc., and nano-sized defects in the processing process are generally relatively small. Difficult to observe in real time
However, the device still has the following deficiencies: 1) The background noise of the device is large, and it is impossible to process and detect micro-nano samples that are sensitive to radiation suc

Method used

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  • Ultra-fast laser micro-nano processing device with online monitoring function

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Embodiment 1

[0045] Taking the online monitoring of in-situ graphene generated by nonlinear spectroscopy as an example, when the device provided by the invention is used for processing, the specific operation steps are as follows:

[0046] (1) The carbon target and the nickel target are deposited on SiO by joint measurement and control sputtering in the measurement and control sputtering 2 Or on a glass substrate, the subsequent femtosecond laser direct writing method can be used on SiO 2 Or in-situ graphene generation on glass substrates;

[0047] (2) Turn on the femtosecond laser, tune the first output wavelength to 780nm, and divide this laser into the first beam for laser direct writing and the second beam for high-order nonlinear spectral imaging detection;

[0048] (3) The two-way light beams are combined in space, and pass through the achromatic beam expander 6 composed of doublet lenses;

[0049] (4) Combined beams pass through the 4F system 8;

[0050] (5) The combined beam is ...

example 2

[0055] Taking online monitoring of laser thinning molybdenum disulfide by nonlinear spectroscopy as an example, the method is described.

[0056] Si / SiO with multilayer molybdenum disulfide will be grown 2 The glass slide is placed on the loading platform, and the on-off and power of the laser are controlled by the acousto-optic modulator. When the laser is thinning molybdenum disulfide, the laser power of about 900mW is used, and the two-dimensional micro-nano platform and the three-dimensional precision press Electric platform, and take a certain gradient processing speed of about 10-1000μm / s to carry out laser thinning treatment on multi-layer molybdenum disulfide. During the processing, the pulse of the second beam and the second output Scanning is carried out on the molybdenum disulfide sample, the nonlinear four-wave mixing signal is collected by the spectrometer, and the image and spectral information changes in the process of thinning molybdenum disulfide are tracked a...

example 3

[0058] The online monitoring of processed proteins by nonlinear spectroscopy is taken as an example, and the method is illustrated.

[0059] (1) Preparation of materials: A mixed hydrogel with a solution concentration of 400 mg / mL of bovine serum albumin and 0.6 mg / mL of methylene blue was prepared. Bovine serum albumin was used as a precursor material for laser direct writing to generate cross-linking polymerization, while methylene blue was used as a photosensitizer material to initiate photo-induced cross-linking polymerization of proteins.

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Abstract

The invention belongs to the field of ultra-fast laser micro-nano processing and discloses an ultra-fast laser micro-nano processing device with an online monitoring function. The device comprises a laser unit, a dichroic mirror, a microscope, an object carrying platform and an imaging spectrometer. The laser unit is used for outputting two paths of pulsed laser with different wavelengths, and thefirst path of pulsed laser is divided into a first light beam and a second light beam, wherein the first light beam carries out laser micro-nano processing. The second light beam is combined with thesecond path of pulsed laser for spectral imaging and is combined with the first light beam at the same time. After passing through the dichroic mirror and the microscope, the combined light beams areconcentrated on an object to be processed so as to carry out cooperative laser micro-nano processing and real-time monitoring of spectra and imaging; and then non-linear optical signals such as backward coherent anti-stokes raman scattering generated by the object to be processed are collected backward and are to be received by an imaging spectrometer so as to realize real-time monitoring in theprocessing process. Through the ultra-fast laser micro-nano processing device, ultra-fast laser micro-nano processing with nonlinear imaging and spectrum online monitoring functions is realized.

Description

technical field [0001] The invention belongs to the field of laser micro-nano processing, and more specifically relates to an ultrafast laser micro-nano processing device with an online monitoring function. Background technique [0002] Ultrafast laser direct writing three-dimensional micro-nano processing is a micro-nano manufacturing technology that uses focused ultrashort pulses to interact nonlinearly with matter, and can realize photophysical and photochemical reactions on the sub-wavelength scale. Ultrafast laser direct writing technology has the following advantages: high processing precision, which can reach nanometer-level processing precision, among which femtosecond-level laser pulses cooperate with the tight focusing of the microscopic objective lens to obtain extremely high photon density and realize multi-photon absorption Micro-nano processing, and the effect of thermal influence is small, which belongs to the "cold processing" technology, so that super-resolu...

Claims

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Application Information

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IPC IPC(8): B23K26/00B23K26/70
CPCB23K26/00B23K26/702
Inventor 熊伟王锐青王帆曾晓雁郭连波陆永枫陶宇峰刘欢焦玢璋周琳琳
Owner HUAZHONG UNIV OF SCI & TECH
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