Ultra-fast laser micro-nano processing device with online monitoring function

Abstract

The invention belongs to the field of ultra-fast laser micro-nano processing and discloses an ultra-fast laser micro-nano processing device with an online monitoring function. The device comprises a laser unit, a dichroic mirror, a microscope, an object carrying platform and an imaging spectrometer. The laser unit is used for outputting two paths of pulsed laser with different wavelengths, and thefirst path of pulsed laser is divided into a first light beam and a second light beam, wherein the first light beam carries out laser micro-nano processing. The second light beam is combined with thesecond path of pulsed laser for spectral imaging and is combined with the first light beam at the same time. After passing through the dichroic mirror and the microscope, the combined light beams areconcentrated on an object to be processed so as to carry out cooperative laser micro-nano processing and real-time monitoring of spectra and imaging; and then non-linear optical signals such as backward coherent anti-stokes raman scattering generated by the object to be processed are collected backward and are to be received by an imaging spectrometer so as to realize real-time monitoring in theprocessing process. Through the ultra-fast laser micro-nano processing device, ultra-fast laser micro-nano processing with nonlinear imaging and spectrum online monitoring functions is realized.

Description

technical field [0001] The invention belongs to the field of laser micro-nano processing, and more specifically relates to an ultrafast laser micro-nano processing device with an online monitoring function. Background technique [0002] Ultrafast laser direct writing three-dimensional micro-nano processing is a micro-nano manufacturing technology that uses focused ultrashort pulses to interact nonlinearly with matter, and can realize photophysical and photochemical reactions on the sub-wavelength scale. Ultrafast laser direct writing technology has the following advantages: high processing precision, which can reach nanometer-level processing precision, among which femtosecond-level laser pulses cooperate with the tight focusing of the microscopic objective lens to obtain extremely high photon density and realize multi-photon absorption Micro-nano processing, and the effect of thermal influence is small, which belongs to the "cold processing" technology, so that super-resolu...

AI Technical Summary

Problems solved by technology

[0003] Although ultrafast laser direct writing technology has better performance than other traditional micro-nano processing technologies, it still has shortcomings in terms of cross-scale, available materials, high-precision processing, etc., and nano-sized defects in the processing process are generally relatively small. Difficult to observe in real time

However, the device still has the following deficiencies: 1) The background noise of the device is large, and it is impossible to process and detect micro-nano samples that are sensitive to radiation such as organisms; Stokes signal imaging, not combined with other multi-mode nonlinear spectral imaging to fully characterize molecules; 3) and the processing principle of the system is limited to femtosecond laser two-photon polymerization process

To sum up, there is currently no report on the nonlinear spectral imaging online monitoring system for ultrafast laser micro-nano processing, so it is impossible to realize the online accurate, ultra-fast and ultra-sensitive real-time characterization function for three-dimensional micro-nano-scale sample processing

Images