Manganese-cobalt-nickel-oxygen thermistor detector with bent supporting leg micro-bridge structure and method

A micro-bridge structure, manganese-cobalt-nickel technology, applied in the direction of electric radiation detectors, can solve the problem of limited space for improvement, limit the technical approach of micro-bridge, etc., and achieve the effect of reducing thermal conductivity and improving response rate

Inactive Publication Date: 2019-01-18
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, manganese-cobalt-nickel-oxygen thermistors are all immersed. The thermistor sheet is bonded to the germanium lens through selenium-arsenic glass. The thermal conductivity is limited by the thermal conductivity of the immersion material, and there is limited room for improvement.
In addition, the manganese-cobalt-nickel-oxygen thermistor material needs to be annealed at a high temperature of 700°C after each film throwing, which limits the technical approach of making microbridges by releasing sacrificial layer materials such as polyimide

Method used

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  • Manganese-cobalt-nickel-oxygen thermistor detector with bent supporting leg micro-bridge structure and method
  • Manganese-cobalt-nickel-oxygen thermistor detector with bent supporting leg micro-bridge structure and method

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Embodiment Construction

[0030] Three specific embodiments of the detector are provided below, and the present invention is further described. The main variable parameter in the embodiment is SiO 2 The thickness of the sacrificial layer, the thickness of the manganese-cobalt-nickel-oxygen thin film is 10 μm, and the thicknesses of the sacrificial layers are 1 μm, 2 μm, and 3 μm, respectively. The thickness of the sacrificial layer cannot exceed 3 μm, otherwise it is easy to wrinkle during the annealing process, resulting in cracks in the heat-sensitive film.

[0031] 1. Cleaning of the substrate:

[0032] Select a 0.5mm thick transparent double-polished sapphire substrate, clean it with chloroform, ether, acetone, and alcohol in sequence to remove oil and impurities on the surface, then rinse it with deionized water, and then dry it with high-purity nitrogen.

[0033] 2. Preparation of sacrificial layer:

[0034] Using a magnetron sputtering coating machine to sputter SiO on the cleaned sapphire su...

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Abstract

The invention discloses a manganese-cobalt-nickel-oxygen thermistor detector with a bent supporting leg micro-bridge structure and a method. The thermistor detector comprises a double parabolic sapphire substrate, a SiO2 bridge pier grown by a magnetron sputtering method, a manganese-cobalt-nickel-oxygen thin film material and an ohmic contact electrode of a bent leg structure. After the bent legand a sacrificial layer below the manganese-cobalt-nickel material are released, a self-supporting suspended structure is formed. According to the structure, the direct heat conduction between a photosensitive surface and the lower substrate is reduced, and the heat conduction between the electrode and the substrate is effectively reduced, so that a response ratio of the thermistor detector is greatly improved.

Description

technical field [0001] The invention relates to a thermistor detector, in particular to a manganese-cobalt-nickel-oxygen thermistor detector with a micro-bridge structure of curved support legs and a preparation method thereof. Background technique [0002] Thermal infrared detector is an important infrared detector. Compared with photon infrared detector, it has the advantages of room temperature operation, wide response spectrum, high reliability, low preparation cost and simple device packaging. It is widely used in military and civilian applications. Wide range of applications. Among them, manganese-cobalt-nickel-oxygen, a ternary alloy material of manganese, cobalt, and nickel transition metal oxides, has the advantages of high temperature coefficient of resistance, convenient preparation, and high reliability, and has played an important role in space science and railway shaft temperature detection. In the past, people's research on manganese-cobalt-nickel-oxygen mate...

Claims

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Application Information

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IPC IPC(8): G01J5/20
CPCG01J5/20
Inventor 刘福浩杨晓阳贾嘉蒋科罗毅龚玮陈心恬谢晶李向阳
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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