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Method for preparing grating microarray with color surface by utilizing femtosecond laser, and application

A femtosecond laser and microarray technology, used in laser welding equipment, manufacturing tools, opto-mechanical equipment, etc., can solve the problems of complex preparation process, irregular surface structure, difficult control of preparation process, etc., and achieve low preparation cost and efficiency. high effect

Inactive Publication Date: 2019-04-09
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These methods all face problems such as complex preparation process, difficult control of the preparation process, and irregular surface structure, which makes it difficult to prepare large-area biomimetic surface structures with superhydrophobic properties and rich colors.

Method used

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  • Method for preparing grating microarray with color surface by utilizing femtosecond laser, and application
  • Method for preparing grating microarray with color surface by utilizing femtosecond laser, and application
  • Method for preparing grating microarray with color surface by utilizing femtosecond laser, and application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Example 1 Preparation of grating microarray structure by four-beam interference of femtosecond laser

[0026] By building a four-beam interference system and using the periodic light field distribution generated by the interference to expose, develop, and etch the photoresist flat film, a three-dimensional columnar grating microarray structure with a corresponding period can be obtained.

[0027] The method for preparing a grating microarray structure by using femtosecond laser four-beam interference, the specific steps are as follows:

[0028] (1) Build a four-beam laser interference system:

[0029] figure 1 It is a schematic diagram of the optical path of four-beam laser interference. The laser used is frequency-tripled, mode-locked, neodymium-doped yttrium aluminum garnet single-mode laser (Lab-Series) provided by American Spectrum Corporation. The four-beam coherent laser generation process is as follows:

[0030] First, the laser beam emitted by the laser 1 wi...

Embodiment 2

[0036] Embodiment 2 Utilizes superhydrophobic grating microarray structure to produce colored surface

[0037] The grating microstructure array prepared by femtosecond laser has micro-nano scale periodicity, which can diffract the incident light to produce rich colors, that is, bionic structural color. At the same time, the surface modification of the grating microstructure array enables it to obtain super-hydrophobic surface properties, that is, the structure realizes two bionic properties at the same time.

[0038] The method for producing a colored surface using a superhydrophobic grating microarray structure, the specific steps are as follows:

[0039] Preparation steps (1), (2), (3) are the same as in Example 1

[0040] (4) Modification of low surface energy materials: using thermal evaporation, the low surface energy paraffin is evaporated into gas, and the carbon material used is carbon nanoparticles, so that it is adsorbed on the surface of the grating microarray prep...

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Abstract

The invention discloses a method for preparing a grating microarray with a color surface by utilizing femtosecond laser, and application, and belongs to the technical field of bionic micro-manufacturing. The method comprises the steps of building a four-beam laser interference system, exposing a photoresist flat die, utilizing periodical distribution of an interference light field for directly carrying out single-exposure three-dimensional patterning on the photoresist flat die, obtaining a required large-area periodical grating microarray structure after developing, and diffracting an incident light through the grating microarray structure, so that the surface of the structure is colored; and meanwhile, combining with surface modification, utilizing a low-surface-energy material for carrying out surface modification on the grating microarray structure, and obtaining the grating microarray structure with two bionic characteristics of color surface and superhydrophobicity. The inventionfurther provides the application of the grating microarray with the color surface by utilizing femtosecond laser on a super-hydrophobic surface and the bionic aspect, and the super-hydrophobic characteristic and the structural color simulating insect wings can be obtained at the same time through the grating microarray subjected to low-surface-energy modification.

Description

technical field [0001] The invention belongs to the technical field of bionic micro-manufacturing, and in particular relates to a method of preparing a regular grating micro-array structure on a transparent polymer material by using a multi-beam interference photolithography technology, so that the processed surface has super-hydrophobic properties and color properties at the same time. Background technique [0002] The hydrophobic properties of the lotus leaf surface, the iridescent color of butterfly wings, and the strong adsorption force of gecko legs have bionic properties, which have great application prospects in micro-nano optoelectronic devices and soft robots. Studies have found that these novel properties are caused by some special micro-nano structures on its surface. For example, through the observation of high-precision scanning electron microscopy, the surface of the lotus leaf is covered with raised papillae one by one, with an average diameter of 5 μm, and ea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/352B23K26/06B23K26/60G03F7/00
CPCB23K26/0643B23K26/0648B23K26/352B23K26/60G03F7/00
Inventor 海珊孙洪波于永森
Owner JILIN UNIV
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