Metalized magnetic core and preparation method thereof and chip inductor
A metallization and magnetic core technology, which is applied in the direction of inductors with magnetic cores, transformer/inductor cores, transformer/inductor components, etc., can solve the problem of metal film layer oxidation, poor heat resistance of products, and reduction of film Layer thickness and other issues, to achieve the effect of high adhesion, low cost, and reduce internal stress
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[0037] The present invention also provides a method for preparing a metallized magnetic core, comprising the steps of:
[0038] Take the magnetic core, the magnetic core is provided with an electrode region; adopt the mode of magnetron sputtering to prepare the first coating layer and the second coating layer successively on the surface of the electrode region to obtain a metal film layer, and the first coating layer includes alternating n layers of first metal layers and n-1 layers of second metal layers are provided, and the material of the first metal layer is one or more of nickel-copper alloy, nickel-vanadium alloy, silver, copper, and iron-nickel-copper alloy , the material of the second metal layer is one or more of nickel-copper alloy, nickel-vanadium alloy, silver, copper, iron-nickel-copper alloy, and the material of the second metal layer and the first metal layer Different, n is an integer of 2-8, and the second plating layer is a silver layer or a tin layer.
[0...
Embodiment 1
[0048] A method for preparing a metallized magnetic core, comprising the steps of:
[0049] Take a ferrite core, and prepare a first coating layer and a second coating layer on the electrode region by magnetron sputtering to obtain a metallized magnetic core. The first coating layer includes two alternately arranged nickel-copper alloy layers and one Copper layer, the second plating layer is silver layer.
[0050] Sputtering the first coating layer: Arrange the magnetic cores and put them in a special fixture, cover them, and the mask only exposes the electrode area, then install it on the film rack for vacuum coating, push the vacuum machine, evacuate, and charge Enter the argon gas, turn on the power supply of the nickel-copper alloy target, the current of the alloy target is set to 20A, and the thickness of the obtained nickel-copper alloy layer is 1 micron;
[0051] Turn off the power supply of the nickel-copper alloy target material, turn on the power supply of the coppe...
Embodiment 2
[0055] A method for preparing a metallized magnetic core, comprising the steps of:
[0056] Take a ferrite core, and prepare a first coating layer and a second coating layer on the electrode region by magnetron sputtering to obtain a metallized magnetic core. The first coating layer includes two layers of nickel-vanadium alloy layers alternately arranged and one layer silver layer, the second plating layer is a tin layer.
[0057] Sputtering the first coating layer: Arrange the magnetic cores and put them in a special fixture, cover them, and the mask only exposes the electrode area, then install it on the film rack for vacuum coating, push the vacuum machine, evacuate, and charge Enter the argon gas, turn on the power supply of the nickel-vanadium alloy target, the current of the alloy target is set to 20A, and the thickness of the obtained nickel-vanadium alloy layer is 2 microns;
[0058] Turn off the power supply of the nickel-vanadium alloy target material, turn on the p...
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