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Recovery device and recovery method for integrated high-purity nitrogen and argon

A recovery method and high-purity nitrogen technology, which is applied in the field of recovery devices integrating high-purity nitrogen and argon, can solve the problems of many moving parts, low cryogenic rectification, and low extraction rate, so as to improve economic benefits and increase extraction rate , the effect of improving the recovery rate

Pending Publication Date: 2019-09-06
上海联风能源科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The purpose of the present invention is to provide an integrated high-purity nitrogen and A recovery device for argon and its recovery method. The low-temperature rectification using this recovery method has the characteristics of simple process, convenient operation, lower energy consumption, and higher extraction rate.

Method used

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  • Recovery device and recovery method for integrated high-purity nitrogen and argon

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Embodiment 1

[0051] This embodiment aims at the shortcomings of many moving parts, high energy consumption, large investment, and low extraction rate in current argon gas recovery, and provides a low-temperature rectification process with simple and easy operation by utilizing the conditions that monocrystalline silicon manufacturers will have liquid argon supply. For an integrated high-purity nitrogen and argon recovery method that is convenient, lower energy consumption, and higher extraction yields, see figure 1 As shown, including argon recovery flow path and air nitrogen flow path: where:

[0052] The argon recovery flow path includes the following steps S11-S14:

[0053] S11, the pressure of recovering argon is very low, pressurize the recovered argon through the argon compressor 1, remove oil and dust, enter the carbon monoxide remover 2, fill the catalyst in the carbon monoxide remover, and catalyze carbon monoxide through catalytic reaction It is a carbon dioxide tower, which rem...

Embodiment 2

[0068] see figure 1 As shown, this embodiment provides an integrated high-purity nitrogen and argon recovery device for the recovery method described in Example 1 above, including an argon compressor 1, a carbon monoxide remover 2, an oxygen remover 4, an argon gas Precooling and purification system 6, air compressor 15, air precooling and purification system 16, heat exchanger 8, argon tower reboiler 9, refined argon tower 10, argon tower condensing evaporator 11, auxiliary condensing evaporator 12, nitrogen tower 13 and nitrogen tower condensing evaporator 14.

[0069] In this example, if figure 1 As shown, the argon compressor 1 is connected to the argon precooling and purification system 6 through the carbon monoxide remover 2 and the oxygen remover 4 sequentially through pipelines, and the argon compressor 1 is used to add the recovered argon Pressure treatment, the recovered argon gas after pressurization goes through the carbon monoxide remover 2 and deaerator 4 to re...

Embodiment 3

[0081] This embodiment provides an application example based on the recovery method described in the above-mentioned embodiment 1 and the recovery device described in the embodiment 2. For the secondary crystal pulling workshop, the total amount of argon gas recovered generally accounts for 80-80% of the amount used for crystal pulling. 95%, still need to supplement 5% to 20% of liquid argon separately. As far as the specific industry is concerned, 5% to 20% of liquid argon can be added to the recovery process, and its cooling capacity can be used to generate liquid nitrogen to improve the economic benefits of the entire system.

[0082] (1) For the argon recovery flow path:

[0083] Recovery of argon (O 2 2 2 、H 2 Wait.

[0084] Dry crude argon (0.5-0.7MPa(A), 20°C) enters the rectification cold box 7 through the pipeline GAr-106, first enters the heat exchanger 8 to cool down to the liquefaction point, passes through the GAr-107, and enters the refined argon The argon co...

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Abstract

The invention discloses a recovery device and recovery method for integrated high-purity nitrogen and argon. The recovery device comprises an argon compressor, a carbon monoxide removal device, a deaerator, an argon pre-cooling purification system, an air compressor, an air pre-cooling purification system, a heat exchanger, an argon column reboiler, a pure argon column, an argon column condensation evaporator, an auxiliary condensation evaporator, a nitrogen column and a nitrogen column condensation evaporator. According to the recovery method, the liquid argon cooling capacity is transferredto an air pipeline through a main heat exchanger by mainly utilizing the connection effect of the auxiliary condensation evaporator, the cooling capacity entering the nitrogen column is partially recycled, the amount of liquid argon added from the outside can be reduced, the operation cost of equipment is reduced; convenience from the liquid argon on a recovery site is utilized, the cooling capacity is supplied through liquid argon, nitrogen and hydrogen are removed by using a low-temperature distillation method, the recovery rate of the argon and the utilization rate of the hydrogen are improved, the process and operation of low-temperature distillation are simplified, and the operation energy consumption is reduced.

Description

technical field [0001] The invention relates to a method for recovering argon, in particular to a recovery device integrating high-purity nitrogen and argon and a recovery method thereof. Background technique [0002] The Czochralski method (Czochralski method) is the main method for producing single crystal silicon, and 70% to 80% of the world's single crystal silicon is produced by the Czochralski method. The most commonly used process for producing single crystal silicon by the Czochralski method is a decompression crystal pulling process that is similar to a vacuum process and a flowing atmosphere process; High-purity argon is introduced into the furnace, and the vacuum pump continuously pumps argon from the furnace to keep the vacuum in the furnace stable at about 20 torr. This process has both the characteristics of vacuum technology and the characteristics of flow atmosphere technology. Vacuum pumps for decompression crystal pulling process generally use slide valve ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F25J3/08
CPCF25J3/08F25J2215/58F25J2215/44F25J3/0426F25J3/044F25J3/04612F25J2200/02F25J2200/50F25J2200/72F25J2205/40F25J2205/82F25J2210/58F25J2220/02F25J2245/58F25J2250/20F25J2260/02F25J2270/904
Inventor 郝文炳
Owner 上海联风能源科技有限公司
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