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Diborane synthesis system and method thereof

A synthesis method and technology of diborane, applied in the field of diborane synthesis system, can solve the problems of difficulty in use, unreasonable design, and low extraction purity, and achieve the effect of reducing investment and improving overall performance.

Active Publication Date: 2019-12-31
博纯材料股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In recent years, with the gradual reduction of global oil and other energy resources and environmental pollution, and the impact of the greenhouse effect on the climate, countries around the world have vigorously developed clean energy and energy-saving technologies, focusing on low-carbon economy. Under this background, my country's solar cells and Semiconductor light-emitting devices and energy-saving technologies focus on low-carbon economy. Under this background, my country's solar cells, semiconductor light-emitting devices and related industries have developed rapidly. The market for diborane in the electronics industry is very broad. The existing diborane The design of the alkane preparation device is unreasonable, it is difficult to use and the extraction purity is not high, and the purification is difficult

Method used

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  • Diborane synthesis system and method thereof

Examples

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Effect test

Embodiment 1

[0029] Such as figure 1 As shown, a diborane synthesis system includes a reactor 1, and the reactor 1 is provided with an air inlet, a first air outlet, a first feeding inlet, a second feeding inlet, and a material outlet. The air inlet pipe is connected with Nitrogen bottle 2 and gas mixing device 3, the discharge port pipe is connected with the feed port of the reactor 4, the reactor 4 is provided with a discharge port, a dripping device 5 and a second gas outlet, and the discharge port pipe is connected with a treatment tank 14. The pipe of the dripping device 5 is connected with the acid tank 6, the second gas outlet pipe is connected with the adsorption tower 7, the top pipe of the adsorption tower 7 is connected with the first cold hydrazine 8, and the first cold hydrazine 8 pipe is connected with the first gas collection tank 9 and the liquid collection tank 10, the liquid collection tank 10 is provided with a heating device 11, the gas outlet pipe is connected with a se...

Embodiment 2

[0039] Diborane synthesis system, the same as in Example 1.

[0040] The method for synthesizing diborane includes the following steps:

[0041] Step 1: Pass inert gas into the reactor 1 to replace the internal environment, set the temperature of the reactor 1 to 20℃, add dimethyl ether polyethylene glycol after 12 minutes of ventilation, stir, and then add it to the reactor 1 Solid sodium borohydride, continue to stir, so that the sodium borohydride and dimethyl ether polyethylene glycol are mixed uniformly;

[0042] Step 2: Pass the mixture gas of diborane and nitrogen into the reactor 1 in step 1 according to the amount of substance 2:3. The inlet speed of diborane gas is 50g / min. The ratio of the amount of substances is 2:1 to generate intermediates and mixed waste gas, and the mixed waste gas is passed into the second cold hydrazine 12 for separation;

[0043] Step 3: Pass the intermediate in step 2 into the reactor 4, and then slowly drop sulfuric acid into the reactor 4 while ...

Embodiment 3

[0048] Diborane synthesis system, the same as in Example 1.

[0049] The method for synthesizing diborane includes the following steps:

[0050] Step 1: Pour inert gas into the reactor 1 to replace the internal environment, set the temperature of the reactor 1 to 40℃, add dimethyl ether polyethylene glycol after 15 minutes of ventilation, stir, and then add it to the reactor 1 Solid sodium borohydride, continue to stir, so that the sodium borohydride and dimethyl ether polyethylene glycol are mixed uniformly;

[0051] Step 2: Pass the mixture gas of diborane and nitrogen into the reactor 1 in step 1 according to the amount of substance 2:3. The inlet speed of diborane gas is 50g / min. The ratio of the amount of substances is 2:1 to generate intermediates and mixed waste gas, and the mixed waste gas is passed into the second cold hydrazine 12 for separation;

[0052] Step 3: Pass the intermediate in step 2 into the reactor 4, and then slowly drop sulfuric acid into the reactor 4 while ...

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Abstract

The invention provides a diborane synthesis system and a diborane synthesis method. The diborane synthesis system comprises a reaction kettle, wherein the reaction kettle is provided with a gas inlet,a first air outlet, a first charging hole, a second charging hole and a discharging hole; the gas inlet is connected with a nitrogen cylinder and a gas mixing device through pipelines; the discharging hole is connected with a feeding hole of a reactor through pipelines; the reactor is provided with a discharge hole, a dropwise adding device and a second gas outlet; the discharge hole is connectedwith a treatment tank through a pipeline; the dropwise adding device is connected with an acid pool through a pipeline; the second gas outlet is connected with an adsorption tower through a pipeline;the top end of the adsorption tower is connected with first cold trap through a pipeline; the first cold trap is connected with a first gas collection tank and a liquid collection tank through a pipeline, a heating device is arranged in the liquid collection tank, a gas outlet is connected with a second cold trap through a pipeline, the second cold trap is connected with a second gas collection tank through a pipeline, the second cold trap is connected with the liquid collection tank through a pipeline, and the liquid collection tank is connected with a filling device through a pipeline. Thesystem and the method have the advantages of high reaction speed, high purification efficiency and the like.

Description

Technical field [0001] The invention relates to the field of industrial gas production, in particular to a diborane synthesis system and method. Background technique [0002] Diborane is a gas with a boiling point of -92.5°C. It has the characteristics of strong ignition. It can be used as fuel and rocket propellant. Diborane is mainly used as a dopant for semiconductor manufacturing diffusion and oxidation in the electronics industry. Used in semiconductor integrated circuit IC, liquid crystal display LCD, semiconductor light-emitting device LED, solar cell PV and other industries, diborane can also be used as a mixed gas when forming the borophosphosilicate glass insulating film. When used as a mixed gas, it needs to be used Nitrogen, helium, hydrogen and other gases are diluted and used. In addition, it can be used after being converted from high-grade borane and amine appendages into a stable processed form. [0003] In recent years, with the gradual reduction of global oil an...

Claims

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Application Information

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IPC IPC(8): C07F5/02
CPCC07F5/027
Inventor 陈国富龚施健
Owner 博纯材料股份有限公司
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