A solar-blind ultraviolet single-photon avalanche detector
A single-photon avalanche and detector technology, applied in photovoltaic power generation, semiconductor devices, final product manufacturing, etc., can solve the problems of fast dynamic parameter changes, cost consumption, inconvenient integration, etc., achieve good preparation and integration, reduce packaging costs, The effect of reducing the production cost
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[0035] See figure 1 , the solar-blind ultraviolet single-photon avalanche detector of this embodiment includes a voltage source 1 , an avalanche photodetector 2 and a plurality of nanowires 3 .
[0036] Avalanche photodetector 2 is a sun-blind ultraviolet AlGaN avalanche photodetector working in Geiger mode. See figure 2 , the avalanche photodetector 2 sequentially includes a substrate layer 21 , an n-type layer 22 , an i-type absorbing layer 23 , an n-type separation layer 24 , an i-type avalanche layer 25 and a p-type layer 26 from bottom to top. An n-type ohmic contact electrode 27 and a p-type ohmic contact electrode 28 are respectively provided on the n-type layer 22 and the p-type layer 26 . The n-type ohmic contact electrode 27 and the p-type ohmic contact electrode 28 are the negative electrode and the positive electrode of the avalanche photodetector 2 respectively. The bottom surface of the substrate layer 21 is the photosensitive surface of the avalanche photode...
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