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Energy saving preparation method for aluminum electrolytic capacitor anodic aluminum foil

A technology of aluminum electrolytic capacitors and anode aluminum foil, which is applied in the direction of electrolytic coating, surface reaction electrolytic coating, superimposed layer plating, etc., to achieve the effect of reducing energy consumption

Active Publication Date: 2020-02-21
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] At present, there is no report on the combination of vapor deposition technology and direct current oxidation treatment to prepare anode aluminum foil for aluminum electrolytic capacitors

Method used

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  • Energy saving preparation method for aluminum electrolytic capacitor anodic aluminum foil
  • Energy saving preparation method for aluminum electrolytic capacitor anodic aluminum foil
  • Energy saving preparation method for aluminum electrolytic capacitor anodic aluminum foil

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] Plasma-enhanced atomic layer deposition (referred to as PEALD deposition): clean the etched foil and put it into the reaction chamber, heat the etched foil to 80°C for 10 minutes in a vacuum of 10Pa, and pass Al(CH 3 ) 3 After the precursor, clean with high-purity nitrogen for 10s; after 10s of plasma oxygen is introduced into the reaction chamber (the radio frequency power is turned on at the same time, the power of the radio frequency power is 80W), and high-purity nitrogen is purged for 10s; the above repeated steps are recorded as a cycle, Al until etched on both sides of the foil 2 o 3 The film layer reaches 240cycles;

[0044] Electrochemical formation: calcinate the coated corrosion foil in an air furnace at 600±25°C for 10 minutes; then perform DC oxidation. The electrolyte temperature is 85°C, and 15% ammonium adipate is the chemical solution. At 50V, 50mA·cm -2 Oxidation under the parameters. Constant pressure continued for 10 minutes. Anneal in an air ...

Embodiment 2

[0046] ALD deposition: clean the corroded foil and put it into the reaction chamber, heat the corroded foil to 177°C for 10min in a vacuum of 10Pa, and inject Al(CH 3 ) 3 After the precursor, clean it with high-purity nitrogen gas for 10s; pour pure water into the reaction chamber for 7s, and clean it with high-purity nitrogen gas for 10s; the above repeated steps are recorded as a cycle until the Al on both sides of the foil is corroded. 2 o 3 The film layer reaches 240cycles;

[0047] Electrochemical formation: calcining the coated corrosion foil in an air furnace at 600±25°C for 30 minutes; then conduct DC oxidation. The electrolyte temperature is 85°C, and 1.4% ammonium dihydrogen phosphate is the chemical solution. At 100V, 50mA·cm -2 The oxidation was carried out under the parameters, and the constant pressure was continued for 10 minutes. Anneal in an air atmosphere at 600±25°C for 2±0.2min, and finally perform supplementary formation to obtain the final product. R...

Embodiment 3

[0049] ALD deposition: clean the corroded foil and put it into the reaction chamber, heat the corroded foil to 250°C for 20min in a vacuum of 10Pa, and inject Al(CH 3 ) 3 After the precursor, wash with high-purity nitrogen for 5s; pour pure water into the reaction chamber for 5s, and wash with high-purity nitrogen for 5s; the above repeated steps are recorded as a cycle, until the Al on both sides of the foil is etched. 2 o 3 The film layer reaches 240cycles;

[0050] Electrochemical formation: calcining the coated corrosion foil in an air furnace at 600±25°C for 30 minutes; then conduct DC oxidation. The temperature of the electrolyte is 85°C, 10% boric acid and 0.9% ammonium pentaborate are the chemical solution. At 200V, 50mA·cm -2 The oxidation was carried out under the parameters, and the constant pressure was continued for 10 minutes. Anneal in an air atmosphere at 600±25°C for 2±0.2min, and finally perform supplementary formation to obtain the final product. Record...

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Abstract

The invention discloses an energy saving preparation method for an aluminum electrolytic capacitor anodic aluminum foil and belongs to the field of aluminum electrolytic capacitors. The energy savingpreparation method comprises the steps that an aluminum metal organic compound is used as a precursor by utilizing a vapour deposition method supplemented by plasma enhancement, an aluminium oxide dielectric medium is grown on the surface of a corroded aluminum foil and then is subjected to high-temperature heat treatment, then anodic oxidation, annealing and filling formation are performed, and the aluminum electrolytic capacitor anodic aluminum foil is obtained. According to the energy saving preparation method for the aluminum electrolytic capacitor anodic aluminum foil, by means of the vapour deposition technology supplemented by plasma, a layer of Al2O3 can be rapidly and evenly deposited on the surface of the corroded foil directly, compared with a traditional water treatment method,conversion by the strong electric field action is not needed, therefore, the energy consumption in the anodic oxidation process is reduced by 33.8%-66.2%.

Description

technical field [0001] The invention belongs to the field of aluminum electrolytic capacitors, and in particular relates to an energy-saving preparation method of anode aluminum foils for aluminum electrolytic capacitors. Background technique [0002] The preparation of anode aluminum foil for aluminum electrolytic capacitors is usually to grow a layer of Al on the surface of corroded aluminum foil by anodic oxidation method. 2 o 3 dielectric layer. However, with the continuous growth of the oxide film in the traditional DC anodic oxidation method, its ohmic impedance continues to increase, and a large amount of Joule heat will be generated in the constant current stage, resulting in serious energy dissipation; in addition, with the progress of anodic oxidation, the alumina Side reactions such as dissolution, oxygen evolution, hydration, and breakdown of the oxide film lead to the need for additional energy to repair the oxide film, prolonging the reaction time and further...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/40C23C16/513C25D11/10C25D11/18C25D11/16C23C16/455C23C28/04
CPCC23C16/403C23C16/45525C23C16/513C23C28/04C25D11/10C25D11/16C25D11/18
Inventor 杜显锋李响李卓熊礼龙
Owner XI AN JIAOTONG UNIV
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