A preparation system and method for electronic grade carbon tetrafluoride
A carbon tetrafluoride and preparation system technology, applied in chemical instruments and methods, preparation of halogenated hydrocarbons, organic chemistry, etc., can solve the problems of low purity of carbon tetrafluoride gas, high process requirements, unsuitable for large-scale use, etc. , to achieve the effect of less impurities, high product purity and lower maintenance rate
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[0073] The present invention provides a preparation system for an electronic grade tetrafluorocarbon, comprising a fluorine gas source, a reaction device and a purification system, a fluorine gas source sealed connection reaction device, a reaction device sealed connection purification system.
[0074] The fluorine gas source comprises an electrolytic cell, a low temperature dust collector 1, a condenser 2 and a fluorine buffer tank 3.
[0075] Among them, the electrolytic cell has an automatic system, and the feeding method is liquid level interlocking automatic feeding.
[0076] Among them, the bottom end of the condenser is provided with a hydrogen fluoride discharge device.
[0077] The reaction apparatus comprises a carbon reactor 4, a dust removal device 5, wherein the carbon reactor further comprises a secondary reactor.
[0078] The purification system comprises a washing system, an adsorption system and a distillation system. The washing system includes a washing column and...
Embodiment 1
[0080] S1. Preparation of fluorine gas: Electrolytic cell automatic production of fluorine gas. After passing through the low temperature dust collector and condenser, it reaches the fluorine buffer tank;
[0081] Among them, the temperature control of the electrolytic cell is 80-95 ° C, the acidity control is 40-42%, the liquid level interlock automatically adds hydrogen fluoride, and the uniform feeding greatly reduces the excessive addition of hydrogen fluoride. Gas through the low temperature dust collector 1, the dust collector temperature is controlled at 4 ° C, after removing the dust and electrolyte in the gas, into the condenser 2, the condenser temperature is controlled at -60 ° C, the bottom end is equipped with hydrogen fluoride discharge device, can achieve automatic discharge, recover hydrogen fluoride reuse, greatly reducing the cost, and can increase the purity of fluorine to more than 95%. The condenser outlet is docked with buffer tank 3.
[0082] S2. Preparation...
Embodiment 2
[0101] S1. Preparation of fluorine gas: Electrolytic cell automatic production of fluorine gas. After passing through the low temperature dust collector and condenser, it reaches the fluorine buffer tank;
[0102] Among them, the electrolytic cell temperature control is 95-100 °C, the acidity control is 42%, the liquid level interlock automatically adds hydrogen fluoride, and the uniform addition greatly reduces the excessive addition of hydrogen fluoride. Gas through the low temperature dust collector 1, the dust collector temperature is controlled at 3 ° C, after removing the dust and electrolyte in the gas, into the condenser 2, the condenser temperature is controlled at -80 ° C, the bottom end is equipped with hydrogen fluoride discharge device, can achieve automatic discharge, recover hydrogen fluoride reuse, greatly reducing the cost, and can increase the purity of fluorine to more than 95%. The condenser outlet is docked with buffer tank 3.
[0103] S2. Preparation of tetra...
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