A cathode heating subassembly and its preparation method
A heater and assembly technology, applied in the field of cathode heater assembly and its preparation, can solve the problems of complex preparation process, long preheating time, poor reliability, etc., and achieve high heating temperature, short preheating time, and increased volume Effect
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[0027] The embodiment of the present invention provides a preparation method of a cathode heater subassembly, the preparation method includes: cutting a metal sheet with a preset thickness to obtain a rectangular metal strip, and using the rectangular metal strip as the heater 5; The heater 5 is welded to the surface of the cathode base 1 , which is the surface opposite to the emission surface of the cathode base 1 . that is figure 2 In the viewing angle shown, the upper surface of the cathode substrate 1 is the emitting surface, and the lower surface is the surface opposite to the emitting surface. At this time, the heater 5 is welded to the lower surface of the cathode substrate 1 .
[0028] In the present invention, the following conditions must be satisfied as the metal strip material: 1. The evaporation rate is small at the working temperature or the high temperature required in the treatment process. 2. The expansion coefficient is similar to that of the cathode metal...
Embodiment 1
[0039] This embodiment provides a cathode heater subassembly, see figure 2 , the assembly includes: a cathode, and a heater 5 welded on the back surface of the cathode; wherein, the cathode comprises a cathode substrate 1, the heater 5 is welded on the surface of the cathode substrate 1, and the heater 5 The thickness of the heater 5 is 0.05mm, the width of the heater 5 is 2mm consistent with the diameter of the cathode substrate 1 , and the length of the heater 5 is 3.5 times the diameter of the cathode substrate 1 . The material of the heater 5 is tungsten.
Embodiment 2
[0040] Embodiment 2: This embodiment provides a method for preparing a cathode heater subassembly. The method includes the following steps:
[0041] Step 1. Cut a tantalum metal sheet with a thickness of 0.05mm into a heater of the required size, a strip-shaped metal strip (ie a rectangular metal strip); the width of the metal strip is the same as the cathode size, which is 2mm; the length is the diameter of the cathode. 3.5 times, which is 7mm. The metal strip is the heater.
[0042] Step 1. Weld the cathode base with a diameter of 2 mm on the metal strip by laser welding.
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