Field-effect transistor biosensor and preparation method thereof
A biosensor and field effect tube technology, applied in the field of biosensors, can solve the problems of low detection sensitivity and long time consumption, and achieve the effects of ultra-high sensitivity, easy manufacture, and short detection time
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0041] Such as Figure 1-2 As shown, it is a field effect tube biosensor according to an embodiment of the present invention, which is aimed at detecting the specific protein concentration related to some specific diseases of the human body. A sensor substrate with a field effect tube (FET) structure, a polydimethylsiloxane (PDMS) storage tank prepared on the sensor substrate for sealing the target solution (analysis solution) in the field effect tube channel area.
[0042] The sensor base is prepared on a silicon substrate, and an intermediate layer of SiO is prepared between the sensor base and the silicon base. 2 , the two poles of the sensor base are made of chromium / gold double-layer material, and the two poles of the sensor base are deposited with Al 2 o 3 .
[0043] The biosensor also includes a reference electrode inserted into the tank as a grid to adjust the grid voltage during the measurement. In this embodiment, the reference electrode is an Ag / AgCl reference e...
Embodiment 2
[0045] A method for preparing a field effect tube biosensor, which is used to prepare the biosensor in Example 1, the method comprises the following steps:
[0046] S10, the plasma enhanced SiO 2 layer CVD deposition onto a silicon wafer, followed by sputter deposition of Mo thin films.
[0047] Specifically, the plasma-enhanced 280nm thick SiO 2 layer CVD deposition onto a pre-cleaned 3-inch silicon wafer, followed by sputter deposition of a 15 nm thick Mo film.
[0048] S20, performing vulcanization treatment on the Mo thin film layer in a CVD system.
[0049] Among them, the Mo thin film is made into a designed 1mm×1mm square shape, and then the Mo thin film layer is vulcanized in a custom-made CVD system, which includes a three-zone temperature-controlled tube furnace, and is equipped with a quartz tube, argon gas Conveyor system and vacuum pump.
[0050] Step S20 specifically includes:
[0051]S21. Put the Mo thin film into the downstream high-temperature zone of the...
PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 

