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Field-effect transistor biosensor and preparation method thereof

A biosensor and field effect tube technology, applied in the field of biosensors, can solve the problems of low detection sensitivity and long time consumption, and achieve the effects of ultra-high sensitivity, easy manufacture, and short detection time

Active Publication Date: 2020-06-19
苏州微湃医疗科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Detection of specific protein kits related to certain human diseases (such as tumors or hepatitis B) and these specific protein detection methods currently used in clinical medicine generally have problems such as long time-consuming and low detection sensitivity

Method used

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  • Field-effect transistor biosensor and preparation method thereof
  • Field-effect transistor biosensor and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] Such as Figure 1-2 As shown, it is a field effect tube biosensor according to an embodiment of the present invention, which is aimed at detecting the specific protein concentration related to some specific diseases of the human body. A sensor substrate with a field effect tube (FET) structure, a polydimethylsiloxane (PDMS) storage tank prepared on the sensor substrate for sealing the target solution (analysis solution) in the field effect tube channel area.

[0042] The sensor base is prepared on a silicon substrate, and an intermediate layer of SiO is prepared between the sensor base and the silicon base. 2 , the two poles of the sensor base are made of chromium / gold double-layer material, and the two poles of the sensor base are deposited with Al 2 o 3 .

[0043] The biosensor also includes a reference electrode inserted into the tank as a grid to adjust the grid voltage during the measurement. In this embodiment, the reference electrode is an Ag / AgCl reference e...

Embodiment 2

[0045] A method for preparing a field effect tube biosensor, which is used to prepare the biosensor in Example 1, the method comprises the following steps:

[0046] S10, the plasma enhanced SiO 2 layer CVD deposition onto a silicon wafer, followed by sputter deposition of Mo thin films.

[0047] Specifically, the plasma-enhanced 280nm thick SiO 2 layer CVD deposition onto a pre-cleaned 3-inch silicon wafer, followed by sputter deposition of a 15 nm thick Mo film.

[0048] S20, performing vulcanization treatment on the Mo thin film layer in a CVD system.

[0049] Among them, the Mo thin film is made into a designed 1mm×1mm square shape, and then the Mo thin film layer is vulcanized in a custom-made CVD system, which includes a three-zone temperature-controlled tube furnace, and is equipped with a quartz tube, argon gas Conveyor system and vacuum pump.

[0050] Step S20 specifically includes:

[0051]S21. Put the Mo thin film into the downstream high-temperature zone of the...

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Abstract

The invention discloses a field-effect transistor biosensor and a preparation method thereof. The biosensor comprises a sensor matrix having a field effect transistor (FET) structure using a vertically--aligned two-dimensional molybdenum-disulfide-based nano film (vertically-aligned MoS2 nanolayers-VAMNs) as a main body and a polydimethylsiloxane (polydimethylsiloxane-PDMS) storage tank which is prepared on the sensor substrate and is used for sealing a target solution in a channel region of a field effect transistor. According to the invention, the concentration of specific proteins related to certain specific diseases (such as tumors or hepatitis B) in human serum can be detected by the field-effect transistor biosensor in a manner of measuring the electrical transmission performance ofthe sensor, so that early-stage diagnosis of some diseases is performed. Moreover, the field-effect transistor biosensor has the advantages of high detection speed, extremely high sensitivity and highaccuracy, and is suitable for the field of instant in-vitro detection.

Description

technical field [0001] The invention relates to the technical field of biosensors, in particular to a field effect tube biosensor and a preparation method thereof. Background technique [0002] A biosensor is an instrument that is sensitive to biological substances and converts its concentration into an electrical signal for detection. It consists of immobilized biosensitive materials as recognition elements (including enzymes, antibodies, antigens, microorganisms, cells, tissues, nucleic acids and other biologically active substances), appropriate physical and chemical transducers (such as oxygen electrodes, photosensitive tubes, field effect tubes, Piezoelectric crystals, etc.) and an analysis tool or system composed of a signal amplification device. According to different sensitive elements, biosensors can be divided into five categories: enzyme sensors (enzymesensor), microbial sensors (microbialsensor), cell sensors (organallsensor), tissue sensors (tis-suesensor) and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/414G01N33/68H01L29/78
CPCG01N27/4145G01N33/6893H01L29/78
Inventor 宋鹏飞刘新宇马海波栗昕岳春峰
Owner 苏州微湃医疗科技有限公司