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Magnetic composite film for magnetic storage as well as preparation method of magnetic composite film

A composite film and magnetic storage technology, applied in the direction of coated magnetic layer, magnetic recording layer, disc carrier manufacturing, etc., can solve problems affecting the magnetization and interference of perpendicular magnetic recording media, achieve enhanced recording capability and reproduction efficiency, and improve The effect of storage density and uniform film thickness

Inactive Publication Date: 2020-08-11
蚌埠泰鑫材料技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing perpendicular magnetic recording medium is mainly an alloy film composed of two or more elements in Fe, Co, Ni, Pt, and Pd. In order to improve its oxidation resistance and wear resistance, it is necessary to cover its surface with a layer of inactive metal. Protective layer, such as the patent application number CN 105679339B, discloses a stress-assisted magnetic storage device, its preparation method and magnetic field writing method, using platinum, gold, tantalum and their alloys as the protective layer of the magnetic medium layer, such as application number It is a patent of CN 106898694A, which discloses a composite magnetic multilayer film structure that can adjust the size of the vertical exchange coupling field. The Ta metal layer is used as the protective layer of the TbCo layer, but any metal has interference and offset effects on the magnetic field, changing the magnetic induction. Line distribution and orientation, affecting the magnetization of perpendicular magnetic recording media

Method used

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  • Magnetic composite film for magnetic storage as well as preparation method of magnetic composite film
  • Magnetic composite film for magnetic storage as well as preparation method of magnetic composite film

Examples

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Effect test

Embodiment 1

[0022] A magnetic composite film for magnetic storage: the magnetic composite film uses a nonmagnetic silicon wafer as a substrate, and a 15nm manganese zinc ferrite soft magnetic layer, an alloy hard magnetic layer, and a 20nm barium ferrite hard magnetic layer are sequentially arranged on its surface ; The alloy hard magnetic layer is [FePt / FeCo] with perpendicular magnetic anisotropy 3 Composite film layer, wherein the molar ratio of Fe and Pt in the FePt alloy layer is 1:0.5, the thickness of the single-layer FePt alloy layer is 4.5nm, the molar ratio of Fe and Co in the FeCo alloy layer is 1:1, and the single-layer FeCo alloy layer The layer thickness was 3 nm.

[0023] A method for preparing a magnetic composite film for magnetic storage, comprising the following steps:

[0024] S1: Pretreatment: washing and drying the silicon wafer;

[0025] S2: Sputtering soft magnetic layer: In an argon atmosphere, control the gas flow rate to 50sscm, use silicon wafer as the substr...

Embodiment 2

[0029] A magnetic composite film for magnetic storage: the magnetic composite film uses a non-magnetic silicon wafer as a substrate, and a 20nm manganese zinc ferrite soft magnetic layer, an alloy hard magnetic layer, and a 25nm barium ferrite hard magnetic layer are successively arranged on the surface of the magnetic composite film ; The alloy hard magnetic layer is [FePt / FeCo] with perpendicular magnetic anisotropy 5 Composite film layer, wherein the molar ratio of Fe and Pt in the FePt alloy layer is 1:1.1, the thickness of the single-layer FePt alloy layer is 3nm, the molar ratio of Fe and Co in the FeCo alloy layer is 1:1.5, and the single-layer FeCo alloy layer The thickness is 1.5nm.

[0030] A method for preparing a magnetic composite film for magnetic storage, comprising the following steps:

[0031] S1: Pretreatment: washing and drying the silicon wafer;

[0032] S2: Sputtering soft magnetic layer: In an argon atmosphere, control the gas flow rate to 50-80sscm, us...

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Abstract

The invention discloses a magnetic composite film for magnetic storage as well as a preparation method of a magnetic composite film. According to the magnetic composite film, a non-magnetic silicon wafer serves as a substrate, and a soft magnetic layer, an alloy hard magnetic layer and a barium ferrite hard magnetic layer are sequentially arranged on the surface of the substrate; and the alloy hard magnetic layer is a [FePt / FeCo]N composite film layer with vertical magnetic anisotropy, wherein N is the number of periods and is a natural number between 2 and 5, the molar ratio of Fe to Pt in the FePt alloy layer is 1:(0.5-1.1), and the molar ratio of Fe to Co in the FeCo alloy layer is 1:(1-1.5). The BaFe12O19 hard magnetic layer serves as a protective film of the [FePt / FeCo]N alloy magnetic layer, so that high oxidation resistance, heat stability and wear resistance are achieved; and meanwhile, the BaFe12O19 hard magnetic layer and the [FePt / FeCo]N hard magnetic layer are both verticalmagnetic recording materials and are subjected to interlayer coupling to produce interface vertical magnetic anisotropy to form a magnetic tunnel junction, thereby further increasing storage densityand avoiding demagnetization phenomenon caused by the traditional metal protective film.

Description

technical field [0001] The invention belongs to the technical field of magnetic recording, and in particular relates to a magnetic composite film for magnetic storage and a preparation method thereof. Background technique [0002] The perpendicular magnetic recording medium is the key component of the memory, with perpendicular magnetic anisotropy. The magnetic field generated by the magnetic read / write head perpendicular to the plane of the magnetic recording layer forms a recording bit, so that the magnetized adjacent recording bits are antiparallel State, so that the magnetic moments of adjacent recording bits attract each other, which is conducive to stabilizing the magnetization state of the recording bit and improving its coercive force, thereby facilitating the realization of higher density information storage. The existing perpendicular magnetic recording medium is mainly an alloy film composed of two or more elements in Fe, Co, Ni, Pt, and Pd. In order to improve it...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/08C23C14/18C23C14/16G11B5/851G11B5/72
CPCC23C14/08C23C14/165C23C14/185C23C14/352G11B5/72G11B5/851
Inventor 沈文齐王文爽
Owner 蚌埠泰鑫材料技术有限公司
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