Magnetic composite film for magnetic storage as well as preparation method of magnetic composite film

A composite film and magnetic storage technology, applied in the direction of coated magnetic layer, magnetic recording layer, disc carrier manufacturing, etc., can solve problems affecting the magnetization and interference of perpendicular magnetic recording media, achieve enhanced recording capability and reproduction efficiency, and improve The effect of storage density and uniform film thickness

CN111519152AInactive Publication Date: 2020-08-11蚌埠泰鑫材料技术有限公司
2 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2020-08-11
Estimated Expiration
Not applicable · inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
Patent Text Reader

Abstract

The invention discloses a magnetic composite film for magnetic storage as well as a preparation method of a magnetic composite film. According to the magnetic composite film, a non-magnetic silicon wafer serves as a substrate, and a soft magnetic layer, an alloy hard magnetic layer and a barium ferrite hard magnetic layer are sequentially arranged on the surface of the substrate; and the alloy hard magnetic layer is a [FePt / FeCo]N composite film layer with vertical magnetic anisotropy, wherein N is the number of periods and is a natural number between 2 and 5, the molar ratio of Fe to Pt in the FePt alloy layer is 1:(0.5-1.1), and the molar ratio of Fe to Co in the FeCo alloy layer is 1:(1-1.5). The BaFe12O19 hard magnetic layer serves as a protective film of the [FePt / FeCo]N alloy magnetic layer, so that high oxidation resistance, heat stability and wear resistance are achieved; and meanwhile, the BaFe12O19 hard magnetic layer and the [FePt / FeCo]N hard magnetic layer are both verticalmagnetic recording materials and are subjected to interlayer coupling to produce interface vertical magnetic anisotropy to form a magnetic tunnel junction, thereby further increasing storage densityand avoiding demagnetization phenomenon caused by the traditional metal protective film.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention belongs to the technical field of magnetic recording, and in particular relates to a magnetic composite film for magnetic storage and a preparation method thereof. Background technique

[0002] The perpendicular magnetic recording medium is the key component of the memory, with perpendicular magnetic anisotropy. The magnetic field generated by the magnetic read / write head perpendicular to the plane of the magnetic recording layer forms a recording bit, so that the magnetized adjacent recording bits are antiparallel State, so that the magnetic moments of adjacent recording bits attract each other, which is conducive to stabilizing the magnetization state of the recording bit and improving its coercive force, thereby facilitating the realization of higher density information storage. The existing perpendicular magnetic recording medium is mainly an alloy film composed of two or more elements in Fe, Co, Ni, Pt, and Pd. In order to improve it...

Examples

Embodiment 1

[0022] A magnetic composite film for magnetic storage: the magnetic composite film uses a nonmagnetic silicon wafer as a substrate, and a 15nm manganese zinc ferrite soft magnetic layer, an alloy hard magnetic layer, and a 20nm barium ferrite hard magnetic layer are sequentially arranged on its surface ; The alloy hard magnetic layer is [FePt / FeCo] with perpendicular magnetic anisotropy 3 Composite film layer, wherein the molar ratio of Fe and Pt in the FePt alloy layer is 1:0.5, the thickness of the single-layer FePt alloy layer is 4.5nm, the molar ratio of Fe and Co in the FeCo alloy layer is 1:1, and the single-layer FeCo alloy layer The layer thickness was 3 nm.

[0023] A method for preparing a magnetic composite film for magnetic storage, comprising the following steps:

[0024] S1: Pretreatment: washing and drying the silicon wafer;

[0025] S2: Sputtering soft magnetic layer: In an argon atmosphere, control the gas flow rate to 50sscm, use silicon wafer as the substr...

Embodiment 2

[0029] A magnetic composite film for magnetic storage: the magnetic composite film uses a non-magnetic silicon wafer as a substrate, and a 20nm manganese zinc ferrite soft magnetic layer, an alloy hard magnetic layer, and a 25nm barium ferrite hard magnetic layer are successively arranged on the surface of the magnetic composite film ; The alloy hard magnetic layer is [FePt / FeCo] with perpendicular magnetic anisotropy 5 Composite film layer, wherein the molar ratio of Fe and Pt in the FePt alloy layer is 1:1.1, the thickness of the single-layer FePt alloy layer is 3nm, the molar ratio of Fe and Co in the FeCo alloy layer is 1:1.5, and the single-layer FeCo alloy layer The thickness is 1.5nm.

[0030] A method for preparing a magnetic composite film for magnetic storage, comprising the following steps:

[0031] S1: Pretreatment: washing and drying the silicon wafer;

[0032] S2: Sputtering soft magnetic layer: In an argon atmosphere, control the gas flow rate to 50-80sscm, us...