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Flexible intelligent piezoelectric sensor based on coupling of pentacene organic field effect transistor and PVDF nanorod

A smart piezoelectric and pentacene technology, which is applied in the manufacture of electric solid-state devices, semiconductor devices, semiconductor/solid-state devices, etc., can solve the problems of low piezoelectric strain constant and limited charge

Active Publication Date: 2020-08-18
UNIV OF JINAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the low piezoelectric strain constant of the material itself, the amount of charge generated under the small deformation force is limited, and the need for high-precision instruments to measure it restricts its application in the field of pressure sensing.

Method used

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  • Flexible intelligent piezoelectric sensor based on coupling of pentacene organic field effect transistor and PVDF nanorod
  • Flexible intelligent piezoelectric sensor based on coupling of pentacene organic field effect transistor and PVDF nanorod
  • Flexible intelligent piezoelectric sensor based on coupling of pentacene organic field effect transistor and PVDF nanorod

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Experimental program
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Effect test

Embodiment 1

[0048] (1) The experimental PET film substrate was ultrasonically cleaned with ultrapure water, acetone solution and isopropanol for 10 minutes, and then the PET substrate was cleaned with an oxygen plasma cleaner for 10 minutes and dried in a nitrogen environment; the clean PET substrate was placed Into the metal vacuum coating instrument to s -1 Deposit about 100nm thick Al as the bottom gate electrode at a rate of about 100nm; then configure 7mg / ml PMMA solution and use a spin coater to form a 400nm PMMA film on the aluminum electrode at a rate of 4000rpm as the dielectric layer of the device. Treat for 2h at 60℃ in a drying oven; then use an organic vacuum coating instrument to s -1 Depositing a 40nm thick organic small molecule material pentacene to form an active layer to transport charges at a rate of 5%; then using a transmission electron microscope copper mesh (length 200um, width 40um, channel width 20um) as a mask on the pentacene film A metal vacuum coater was used...

Embodiment 2

[0052] (1) The experimental PET film substrate was ultrasonically cleaned with ultrapure water, acetone solution and isopropanol for 10 minutes, and then the PET substrate was cleaned with an oxygen plasma cleaner for 10 minutes and dried in a nitrogen environment; the clean PET substrate was placed Into the metal vacuum coating instrument to s -1 Deposit about 100nm thick Al as the bottom gate electrode at a rate of about 100nm; then configure 7mg / ml PMMA solution and use a spin coater to form a 400nm PMMA film on the aluminum electrode at a rate of 4000rpm as the dielectric layer of the device. Treat for 2h at 60℃ in a drying oven; then use an organic vacuum coating instrument to s -1 Depositing a 40nm thick organic small molecule material pentacene to form an active layer to transport charges at a rate of 5%; then using a transmission electron microscope copper mesh (length 200um, width 40um, channel width 20um) as a mask on the pentacene film A metal vacuum coater was used...

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Abstract

The invention discloses a flexible intelligent piezoelectric sensor based on coupling of a pentacene organic field effect transistor and a PVDF nanorod and a preparation method of the flexible intelligent piezoelectric sensor. The method comprises the following steps: firstly, the pentacene organic field effect transistor is prepared as a pressure sensor; a PVDF flexible material with nanorods onone side is prepared; Au films are plated on two sides of the PVDF flexible material to obtain a PVDF flexible piezoelectric material as a piezoelectric signal generation unit; and a closed loop is formed between the piezoelectric signal generation unit and a pressure sensor by using a conductive material. A transfer characteristic curve, an output characteristic curve, a device working linear region and a saturation region of the device are obtained by testing the electrical characteristics of the pentacene organic field effect transistor so as to know the mobility and the switching ratio ofthe device; and the lowest detection limit and sensitivity as well as the linear relation of the electrical characteristics of different bending angles at the wrist of a person are obtained by testingthe electrical characteristics of the flexible intelligent piezoelectric sensor under the action of weights with different masses.

Description

Technical field [0001] The invention relates to the technical field of flexible piezoelectric sensors, in particular to a flexible intelligent piezoelectric sensor based on the coupling of a pentacene organic field effect transistor and a PVDF nano column. Background technique [0002] At present, the tactile sensing of the commercial robot system has been lagging behind other sensing technologies due to the difficulties of design and preparation technology, and cannot realize the real intelligent application. Robot intelligent electronic skin is a flexible electronic system developed by using technologies such as smart materials, micro-electromechanics and sensors that can imitate human skin protection, perception and other functions. It is an important way to realize the tactile function of robots. [0003] The flexible piezoelectric material PVDF is an organic ferroelectric material with the advantages of flexible material, low density, low impedance and high voltage constant. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L25/16H01L21/50
CPCH01L25/16H01L21/50
Inventor 张丛丛刘宏王建孙铭远
Owner UNIV OF JINAN
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