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Exposed metal protection liquid and method in plasma enhanced chemical vapor deposition (PECVD) process

A technology for protecting liquid and metal, applied in metal material coating process, coating, gaseous chemical plating, etc., to achieve the effect of in place protection measures, ensure coating quality, and simple operation

Pending Publication Date: 2020-11-10
SHANGHAI INST OF SPACE POWER SOURCES
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] After the coating is completed, the components of the solar cell wing are assembled with high reliability and precision. It is necessary to ensure the consistency of the bare metal assembly interface to adapt to the subsequent harsh working conditions such as high-frequency vibration and wide-range temperature shock. This requires that the bare metal be coated. The roughness and surface resistivity of the front and back surfaces remain unchanged, but the masks commonly used in vapor deposition cannot 100% prevent the deposition of gas on the metal surface

Method used

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  • Exposed metal protection liquid and method in plasma enhanced chemical vapor deposition (PECVD) process
  • Exposed metal protection liquid and method in plasma enhanced chemical vapor deposition (PECVD) process
  • Exposed metal protection liquid and method in plasma enhanced chemical vapor deposition (PECVD) process

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Experimental program
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Effect test

Embodiment 1

[0045] Step 1, prepare low-quality damage and easy-to-peel silicone rubber protection solution, wherein, α, ω-dihydroxy polydimethylsiloxane with molecular weight greater than or equal to 500g, 15g of white carbon black, 4g of tetraethyl orthosilicate, two Dibutyltin laurate 1g. First mix the masterbatch and white carbon black through a homogenizer, and then add dibutyltin dilaurate and ethyl orthosilicate in order after the mixing is complete; the last component needs to be fully stirred for 2 minutes after adding;

[0046] Step 2, apply the silicone rubber solution on the copper pad surface of the flat plate cable of the solar wing component to be coated with a fine brush, and apply it 1 or 2 times to ensure that the coating has no defects. After the coating is completed and cured at room temperature and pressure for 24 hours, the thickness of the protective film is measured to be 35 μm.

[0047] If there are water stains or hair debris on the surface of the cable (non-pad ...

Embodiment 2

[0052] Step 1, prepare a low-quality and easy-to-peel silicone rubber protection solution, including 100g of α,ω-dihydroxypolydimethylsiloxane with a molecular weight greater than or equal to 500, 20g of white carbon black, 3g of tetraethyl orthosilicate, and dilaurate Dibutyltin acid 1g. First mix the masterbatch and white carbon black through a homogenizer, and then add dibutyltin dilaurate and ethyl orthosilicate in sequence after the mixing is complete; after the last component is added, it needs to be fully stirred for 2 minutes.

[0053] Step 2, apply the silicone rubber solution on the copper pad surface of the flat plate cable of the solar wing component to be coated with a fine brush, and apply it 1 or 2 times to ensure that the coating has no defects. After the coating is completed and cured at room temperature and pressure for 24 hours, the thickness of the protective layer is measured to be 27 μm.

[0054] If there are water stains or hair debris on the surface of...

Embodiment 3

[0059] Step 1, preparing a low-quality and easy-to-peel silicone rubber protective solution, wherein, α, ω-dihydroxy polydimethylsiloxane with a molecular weight greater than or equal to 500g, 5g of white carbon black, 1g of tetraethyl orthosilicate, two Dibutyltin laurate 0.1g. First mix the masterbatch and white carbon black through a homogenizer, and then add dibutyltin dilaurate and ethyl orthosilicate in order after the mixing is complete; after the last component is added, it needs to be fully stirred for 5 minutes.

[0060] Step 2: Apply the silicone rubber solution on the surface of the copper foil of the solar wing furnace cable with a fine brush, and apply it 1 or 2 times to ensure that the coating has no defects. After the coating is completed and cured at room temperature and pressure for 24 hours, the workpiece is put into the PECVD equipment and vacuumed to 10 - 3 Pa hold the pressure for 24 hours before coating.

[0061] Step 3. After PECVD is completed, use ...

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Abstract

The invention provides exposed metal protection liquid and method in a plasma enhanced chemical vapor deposition (PECVD) process. Low-mass-loss easily-stripped silicon rubber protection liquid is coated on the surface of exposed metal of a workpiece before film coating, film coating operation is carried out on the workpiece after silicon rubber is cured to form a protection layer, and a silicon rubber film is stripped after film coating is finished. The low-mass-loss easily-stripped silicone rubber protection liquid is prepared from the following components in parts by mass: 100 parts of alpha,omega-dihydroxy polydimethylsiloxane, 5-20 parts of white carbon black, 1-5 parts of tetraethoxysilane and 0.1-1 part of dibutyltin dilaurate. The cured silicone rubber protection layer has the characteristics of low mass loss rate in a high vacuum environment, flat and bubble-free formed film, low peel strength and easiness in stripping. According to the protection liquid and method, an exposedmetal part of the workpiece can be temporarily protected in the film coating process, after the protection film is removed, no pollutant exists on the metal surface, the surface roughness and the resistivity are not changed, and the requirements of subsequent operation such as welding and cementing are met.

Description

technical field [0001] The invention belongs to the technical field of plasma chemical vapor deposition, and in particular relates to a protective solution and a protection method for exposed metal in a plasma chemical vapor deposition (PECVD) process. Background technique [0002] At present, the solar battery wings used in aerospace vehicles are directly exposed to the harsh space environment. In order to improve the overall space environment tolerance and prolong their service life, it is usually necessary to coat the surface of each component product. [0003] PECVD technology has been widely used in VLSI, optoelectronic devices and other fields since its research and development. Due to its advantages of fast deposition rate and good film quality, it has also been used in the coating of solar cell wing space protective film in recent years. system. The assembly interface of the solar cell wing, such as the pad, does not need to be coated, and the assembly interface is ...

Claims

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Application Information

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IPC IPC(8): C23C16/04C23C16/50C09D183/04C09D7/61C09D7/63
CPCC23C16/042C23C16/50C09D183/04C09D7/61C09D7/63C09D7/70C08K7/26C08K5/5415
Inventor 马聚沙沈一王志彬沈静曼吴敏潘宇雷刚姜德鹏陆剑峰
Owner SHANGHAI INST OF SPACE POWER SOURCES
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