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Cavity clad layer of magnetism-based or aluminum-based filter and preparation method thereof

A technology of filters and magnesium substrates, applied in the field of magnetron sputtering, can solve the problems of easy oxidation and discoloration of the silver plating layer, and achieve the effects of improving anti-oxidation and discoloration, reducing costs, and being easy to control

Pending Publication Date: 2020-11-20
西安匠心云涂科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problem of easy oxidation and discoloration of the silver-plated layer at high temperature, and to provide a magnesium-based or aluminum-based filter cavity coating and its preparation method

Method used

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  • Cavity clad layer of magnetism-based or aluminum-based filter and preparation method thereof
  • Cavity clad layer of magnetism-based or aluminum-based filter and preparation method thereof
  • Cavity clad layer of magnetism-based or aluminum-based filter and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Based on the aluminum substrate and the front plate of the inner cavity of the magnesium substrate filter, the specific implementation steps are as follows:

[0038] 1) Pretreatment

[0039] Use 0.6Mpa pressure and 1200 mesh (11μm) corundum sand to clean the passivation layer on the surface of the filter, then clean it in absolute ethanol, and dry it with compressed air.

[0040] 2) deposition process

[0041] The deposition system is the UDP-850 magnetron sputtering system produced by the British Teer company. The size of the target is 725mm×175mm×10mm. The A, B, C and D targets are respectively equipped with Cr, Cu, Al and Ag targets. Vacuum up to 3.0×10 -5 torr (4×10 -3 Pa), the product is deposited, and the process parameters are as follows:

[0042] Table 1 Process parameters of magnetron sputtering on the front plate of the aluminum matrix filter cavity

[0043]

[0044]Utilize the scanning electron microscope to test the Cu bottom layer thickness and the ...

Embodiment 2

[0046] Based on the aluminum matrix filter, the specific implementation steps are as follows:

[0047] 1) Pretreatment

[0048] First carry out industrial alkali cleaning, pickling and deionized water ultrasonication on the filter product, then use 0.6Mpa pressure, 1200 mesh (11μm) corundum sand to clean the surface passivation layer, then clean it in absolute ethanol, and then use compressed air blow dry.

[0049] 2) deposition process

[0050] The deposition system uses the UDP-850 magnetron sputtering system produced by the British Teer company. The size of the target is 725mm×175mm×10mm. The A, B, C and D targets are respectively equipped with Cr, Cu, Al and Ag targets. Vacuum up to 3.0×10 -5 torr (4×10 -3 Pa), the product is deposited, and the process parameters are as follows:

[0051] Table 2 Aluminum substrate filter magnetron sputtering process parameters

[0052]

[0053]

[0054] 3) According to the energy spectrum test and analysis, the molar ratio of C...

Embodiment 3

[0056] Based on the magnesium matrix filter, the specific implementation steps are as follows:

[0057] 1) Pretreatment

[0058] First carry out industrial alkali cleaning, pickling and deionized water ultrasonication on the filter product, then use 0.6Mpa pressure, 1200 mesh (11μm) corundum sand to clean the surface passivation layer, then clean it in absolute ethanol, and then use compressed air blow dry.

[0059] 2) deposition process

[0060] The deposition system uses the UDP-850 magnetron sputtering system produced by the British Teer company. The size of the target is 725mm×175mm×10mm. The A, B, C and D targets are respectively equipped with Cr, Cu, Al and Ag targets. Vacuum up to 3.0×10 -5 torr (4×10 -3 Pa), the product is deposited, and the process parameters are as follows:

[0061] Table 3 Magnetron sputtering process parameters of magnesium substrate filter

[0062]

[0063]

[0064] 3) According to the energy spectrum test and analysis, the molar ratio...

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Abstract

The invention discloses a cavity clad layer of a magnetism-based or aluminum-based filter and a preparation method thereof and belongs to the field of magnetron sputtering coating. The preparation method comprises the following steps of first, plating a 200-300 nm Cr layer as a priming coat by magnetron sputtering to replace a 200-700 nm Ni priming coat which is obtained by conventional electroplating or chemical plating; and then sputtering a Cu layer, and depositing a 1-2 [mu]m Cr-Al-Ag co-sputtering layer by a magnetron co-sputtering technology, wherein the use level of Ag is further reduced while the electrical property is ensured, and the cost is lowered; and by adding Cr into the co-sputtering layer, the binding force among films is improved, and Cr and Al can improve the antioxidantdiscoloration performance of the clad layer. The preparation method provided by the invention improves the compactness of the clad layer and reduces defects in the film, so that the surface contact resistance is reduced, and the integral performance of the filter is improved favorably.

Description

technical field [0001] The invention belongs to the field of magnetron sputtering, in particular to a magnesium-based or aluminum-based filter cavity coating and a preparation method thereof. Background technique [0002] Cavity filter is an important electronic device, which is widely used in radar, microwave, communication and other fields. At present, the cavity of the industrial cavity filter is generally a magnesium matrix or an aluminum matrix. Because of the special requirements for the conductivity, wear resistance and corrosion resistance of the cavity, the surface treatment of the cavity is often carried out by electroplating, US-4278957 Examples of cavity filter housings are given in , and EP-A-1544938-A. [0003] The electroplating process will cause consumption of precious metal materials and environmental pollution. With the development trend of high efficiency, environmental protection and miniaturization of communication equipment, people began to use diffe...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/16C23C14/02
CPCC23C14/352C23C14/165C23C14/021C23C14/028
Inventor 马洋刘建利
Owner 西安匠心云涂科技有限公司
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